HUP1900183A1 - Forgókompenzátoros ellipszométer - Google Patents

Forgókompenzátoros ellipszométer

Info

Publication number
HUP1900183A1
HUP1900183A1 HU1900183A HUP1900183A HUP1900183A1 HU P1900183 A1 HUP1900183 A1 HU P1900183A1 HU 1900183 A HU1900183 A HU 1900183A HU P1900183 A HUP1900183 A HU P1900183A HU P1900183 A1 HUP1900183 A1 HU P1900183A1
Authority
HU
Hungary
Prior art keywords
ellipsometer
rotary compensator
compensator
rotary
Prior art date
Application number
HU1900183A
Other languages
English (en)
Inventor
Laszlo Makai
Original Assignee
Semilab ZRT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semilab ZRT filed Critical Semilab ZRT
Priority to HU1900183A priority Critical patent/HUP1900183A1/hu
Priority to US16/882,599 priority patent/US20200371019A1/en
Priority to EP20176352.1A priority patent/EP3745112B1/en
Publication of HUP1900183A1 publication Critical patent/HUP1900183A1/hu

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3083—Birefringent or phase retarding elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/1805—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/212—Arrangement with total internal reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/04—Prisms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
HU1900183A 2019-05-25 2019-05-25 Forgókompenzátoros ellipszométer HUP1900183A1 (hu)

Priority Applications (3)

Application Number Priority Date Filing Date Title
HU1900183A HUP1900183A1 (hu) 2019-05-25 2019-05-25 Forgókompenzátoros ellipszométer
US16/882,599 US20200371019A1 (en) 2019-05-25 2020-05-25 Rotating-compensator ellipsometer
EP20176352.1A EP3745112B1 (en) 2019-05-25 2020-05-25 Rotating-compensator ellipsometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU1900183A HUP1900183A1 (hu) 2019-05-25 2019-05-25 Forgókompenzátoros ellipszométer

Publications (1)

Publication Number Publication Date
HUP1900183A1 true HUP1900183A1 (hu) 2020-11-30

Family

ID=89992914

Family Applications (1)

Application Number Title Priority Date Filing Date
HU1900183A HUP1900183A1 (hu) 2019-05-25 2019-05-25 Forgókompenzátoros ellipszométer

Country Status (3)

Country Link
US (1) US20200371019A1 (hu)
EP (1) EP3745112B1 (hu)
HU (1) HUP1900183A1 (hu)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4917461A (en) * 1989-01-11 1990-04-17 Goldstein Dennis H Achromatic infrared retarder
US7298480B2 (en) 2005-12-23 2007-11-20 Ecole Polytechnique Broadband ellipsometer / polarimeter system
US9404872B1 (en) 2011-06-29 2016-08-02 Kla-Tencor Corporation Selectably configurable multiple mode spectroscopic ellipsometry

Also Published As

Publication number Publication date
EP3745112C0 (en) 2023-08-23
EP3745112B1 (en) 2023-08-23
EP3745112A1 (en) 2020-12-02
US20200371019A1 (en) 2020-11-26

Similar Documents

Publication Publication Date Title
EP3568979A4 (en) INTRA-PREDICTION WITH MULTIPLE REFERENCE LINES
SG11202108409WA (en) Fast oblivious transfers
EP3759886A4 (en) GATEWAY WITH ACCESS CONTROL POINT
CA189650S (en) Roller
ZA202204675B (en) New methylquinazolinone derivatives
IL289197A (en) History of 2-hydroxycycloalkane-1-carbamoyl
IL280533A (en) Topical preparation
SI3812636T1 (sl) Kompenzator voda
IL290815A (en) History of alpha-d-galactopyranoside
IL287416A (en) Local formulation
EP3787450A4 (en) SHOWER SHELF INCLUDING A 4 WAY DEFLECTOR
IL277213A (en) Topical preparation
GB2581415B (en) Line roller
PL3754109T3 (pl) Preimpregnat o ulepszonej płaskości
FI3667148T3 (fi) Pituustasain
EP3804734A4 (en) TOPICAL COMPOSITION
HUP1900183A1 (hu) Forgókompenzátoros ellipszométer
GB201918002D0 (en) Rotary encoder
EP3799277A4 (en) ROTATING TRANSFORMER
HUE053910T2 (hu) Visszahúzható fedél-redõnyök
GB2585465B (en) Manufactured aggregate
GB201918039D0 (en) Topical composition
CA190066S (en) Retractable gate
CA190065S (en) Retractable gate
CA185657S (en) Roller

Legal Events

Date Code Title Description
FA9A Lapse of provisional patent protection due to relinquishment or protection considered relinquished