HU174659B - Arrangement for interferential angular and linear measurement - Google Patents

Arrangement for interferential angular and linear measurement

Info

Publication number
HU174659B
HU174659B HU76ZE451A HUZE000451A HU174659B HU 174659 B HU174659 B HU 174659B HU 76ZE451 A HU76ZE451 A HU 76ZE451A HU ZE000451 A HUZE000451 A HU ZE000451A HU 174659 B HU174659 B HU 174659B
Authority
HU
Hungary
Prior art keywords
interferential
angular
arrangement
linear measurement
linear
Prior art date
Application number
HU76ZE451A
Other languages
Hungarian (hu)
Inventor
Georg Amon
Original Assignee
Zeiss Jena Veb Carl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Jena Veb Carl filed Critical Zeiss Jena Veb Carl
Publication of HU174659B publication Critical patent/HU174659B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
HU76ZE451A 1975-11-24 1976-11-03 Arrangement for interferential angular and linear measurement HU174659B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD189621A DD124673A1 (en) 1975-11-24 1975-11-24

Publications (1)

Publication Number Publication Date
HU174659B true HU174659B (en) 1980-02-28

Family

ID=5502484

Family Applications (1)

Application Number Title Priority Date Filing Date
HU76ZE451A HU174659B (en) 1975-11-24 1976-11-03 Arrangement for interferential angular and linear measurement

Country Status (6)

Country Link
CH (1) CH608098A5 (en)
DD (1) DD124673A1 (en)
DE (1) DE2650121A1 (en)
FR (1) FR2332516A1 (en)
HU (1) HU174659B (en)
SU (1) SU721670A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4403152A (en) * 1981-05-18 1983-09-06 General Electric Company Optical fiber position sensor
SU1742615A1 (en) * 1987-05-05 1992-06-23 Центральный научно-исследовательский геологоразведочный институт цветных и благородных металлов Method for testing state of long object and device
RU1791703C (en) * 1987-10-30 1993-01-30 Центральный научно-исследовательский геологоразведочный институт цветных и благородных металлов Method of checking state of long-measure object
SU1791757A2 (en) * 1987-10-30 1993-01-30 Tsni Geologorazvedochnyj I Tsv Method and device for controlling the state of a long-size object

Also Published As

Publication number Publication date
FR2332516B1 (en) 1980-03-21
SU721670A1 (en) 1980-03-15
CH608098A5 (en) 1978-12-15
FR2332516A1 (en) 1977-06-17
DD124673A1 (en) 1977-03-09
DE2650121A1 (en) 1977-06-02

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