HU170602B - - Google Patents

Info

Publication number
HU170602B
HU170602B HUMU000540A HU170602B HU 170602 B HU170602 B HU 170602B HU MU000540 A HUMU000540 A HU MU000540A HU 170602 B HU170602 B HU 170602B
Authority
HU
Hungary
Application number
Other languages
Hungarian (hu)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to HUMU000540 priority Critical patent/HU170602B/hu
Priority to DE19752542636 priority patent/DE2542636C2/de
Publication of HU170602B publication Critical patent/HU170602B/hu

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
HUMU000540 1975-05-05 1975-05-05 HU170602B (en:Method)

Priority Applications (2)

Application Number Priority Date Filing Date Title
HUMU000540 HU170602B (en:Method) 1975-05-05 1975-05-05
DE19752542636 DE2542636C2 (de) 1975-05-05 1975-09-24 Digitale Schwingquarz-Schichtdicken-Meßeinrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HUMU000540 HU170602B (en:Method) 1975-05-05 1975-05-05

Publications (1)

Publication Number Publication Date
HU170602B true HU170602B (en:Method) 1977-07-28

Family

ID=10999715

Family Applications (1)

Application Number Title Priority Date Filing Date
HUMU000540 HU170602B (en:Method) 1975-05-05 1975-05-05

Country Status (2)

Country Link
DE (1) DE2542636C2 (en:Method)
HU (1) HU170602B (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT382963B (de) * 1980-11-24 1987-05-11 Leybold Heraeus Gmbh & Co Kg Messverfahren zur bestimmung der dicke duenner schichten

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3689747A (en) * 1970-12-09 1972-09-05 Ibm Digital evaporation monitor system
HU167641B (en:Method) * 1974-02-07 1975-11-28

Also Published As

Publication number Publication date
DE2542636A1 (de) 1976-11-18
DE2542636C2 (de) 1983-10-13

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Legal Events

Date Code Title Description
HU90 Patent valid on 900628
HMM4 Cancellation of final prot. due to non-payment of fee