HK27297A - Semiconductor memory arrangement using capacitors with two electrodes situated inside a groove and method of producing the same
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Semiconductor memory arrangement using capacitors with two electrodes situated inside a groove and method of producing the same
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Priority claimed from EP89109158Aexternal-prioritypatent/EP0399060B1/en
Application filed by Siemens AgfiledCriticalSiemens Ag
Priority to HK27297ApriorityCriticalpatent/HK27297A/en
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HK27297A1989-05-221997-03-06Semiconductor memory arrangement using capacitors with two electrodes situated inside a groove and method of producing the same
HK27297A
(en)