HK1047270A1 - Sulfuric acid rycycle apparatus. - Google Patents
Sulfuric acid rycycle apparatus.Info
- Publication number
- HK1047270A1 HK1047270A1 HK02109012A HK02109012A HK1047270A1 HK 1047270 A1 HK1047270 A1 HK 1047270A1 HK 02109012 A HK02109012 A HK 02109012A HK 02109012 A HK02109012 A HK 02109012A HK 1047270 A1 HK1047270 A1 HK 1047270A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- rycycle
- sulfuric acid
- sulfuric
- acid
- rycycle apparatus
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000354784A JP3635026B2 (en) | 2000-06-14 | 2000-11-21 | Sulfuric acid recycling equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1047270A1 true HK1047270A1 (en) | 2003-02-14 |
Family
ID=18827309
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK02109012A HK1047270A1 (en) | 2000-11-21 | 2002-12-12 | Sulfuric acid rycycle apparatus. |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN1191192C (en) |
HK (1) | HK1047270A1 (en) |
SG (1) | SG119142A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5572198B2 (en) * | 2011-10-31 | 2014-08-13 | セメス株式会社 | Substrate processing apparatus and chemical solution recycling method |
CN108550519A (en) * | 2018-06-08 | 2018-09-18 | 东莞市中图半导体科技有限公司 | A kind of cleaning device of semiconductor wafer |
CN110272028B (en) * | 2019-07-01 | 2023-12-01 | 中国华电科工集团有限公司 | SO 3 Standard gas preparation device and method |
CN111321423B (en) * | 2020-01-17 | 2021-06-11 | 湖北永绍科技股份有限公司 | Method for recovering sulfuric acid from waste sulfuric acid containing hydrogen peroxide |
CN111729893A (en) * | 2020-05-20 | 2020-10-02 | 宁夏隆基硅材料有限公司 | Semiconductor waste degumming method and device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4980032A (en) * | 1988-08-12 | 1990-12-25 | Alameda Instruments, Inc. | Distillation method and apparatus for reprocessing sulfuric acid |
JPH03147323A (en) * | 1989-11-01 | 1991-06-24 | Matsushita Electric Ind Co Ltd | Cleaning system |
JP3087680B2 (en) * | 1997-04-04 | 2000-09-11 | 日本電気株式会社 | Semiconductor manufacturing equipment |
US5963878A (en) * | 1998-07-30 | 1999-10-05 | Noram Engineering & Constructors Ltd. | Nitration process |
-
2001
- 2001-11-20 SG SG200107198A patent/SG119142A1/en unknown
- 2001-11-21 CN CNB011349794A patent/CN1191192C/en not_active Expired - Fee Related
-
2002
- 2002-12-12 HK HK02109012A patent/HK1047270A1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
SG119142A1 (en) | 2006-02-28 |
CN1191192C (en) | 2005-03-02 |
CN1354127A (en) | 2002-06-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20161121 |