HK1042746A1 - 鹵素與氟化合物濃度的測定方法，測定裝置以及鹵素化合物的製造方法 - Google Patents

鹵素與氟化合物濃度的測定方法，測定裝置以及鹵素化合物的製造方法

Info

Publication number
HK1042746A1
HK1042746A1 HK02104358.6A HK02104358A HK1042746A1 HK 1042746 A1 HK1042746 A1 HK 1042746A1 HK 02104358 A HK02104358 A HK 02104358A HK 1042746 A1 HK1042746 A1 HK 1042746A1
Authority
HK
Hong Kong
Prior art keywords
halogen
compound
measuring
concentration
manufacturing
Prior art date
Application number
HK02104358.6A
Other languages
English (en)
Inventor
大野博基
大井敏夫
加賀一有
館龍一
松田五明
Original Assignee
昭和電工株式會社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000129417A external-priority patent/JP2001311686A/ja
Priority claimed from JP2001075570A external-priority patent/JP2001343379A/ja
Application filed by 昭和電工株式會社 filed Critical 昭和電工株式會社
Publication of HK1042746A1 publication Critical patent/HK1042746A1/zh

Links

HK02104358.6A 2000-03-31 2002-06-11 鹵素與氟化合物濃度的測定方法，測定裝置以及鹵素化合物的製造方法 HK1042746A1 (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000098453 2000-03-31
JP2000129417A JP2001311686A (ja) 2000-04-28 2000-04-28 フッ素化合物濃度の測定方法、測定装置及びフッ素化合物の製造方法
JP2001075570A JP2001343379A (ja) 2000-03-31 2001-03-16 ハロゲン濃度の測定方法、測定装置及びハロゲン化合物の製造方法

Publications (1)

Publication Number Publication Date
HK1042746A1 true HK1042746A1 (zh) 2002-08-23

Family

ID=27342932

Family Applications (1)

Application Number Title Priority Date Filing Date
HK02104358.6A HK1042746A1 (zh) 2000-03-31 2002-06-11 鹵素與氟化合物濃度的測定方法，測定裝置以及鹵素化合物的製造方法

Country Status (3)

Country Link
CN (2) CN1683923B (zh)
HK (1) HK1042746A1 (zh)
TW (1) TW493069B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10228322B2 (en) * 2017-07-13 2019-03-12 Cymer LLC Apparatus for and method of sensing fluorine concentration
KR102366148B1 (ko) 2017-09-25 2022-02-23 사이머 엘엘씨 가스 방전 광원에서의 불소 검출 방법
EP3725759B1 (en) * 2017-12-12 2024-06-12 Resonac Corporation Method for producing fluorine-containing organic compounds
US11287370B2 (en) * 2018-03-12 2022-03-29 Kanto Denka Kogyo Co., Ltd. Method and device for analyzing gas
CN110102075B (zh) * 2019-03-18 2021-12-21 山东特检科技有限公司 溴素蒸馏工艺中基于视觉识别的加氯控制方法及装置
EP4067300A4 (en) 2019-11-27 2024-01-03 Resonac Corp METHOD FOR MEASURING THE FLUORINE GAS CONCENTRATION IN HALOGEN FLUORIDE CONTAINING GAS USING A MASS SPECTROMETER

Also Published As

Publication number Publication date
CN1683923B (zh) 2010-09-22
TW493069B (en) 2002-07-01
CN1683923A (zh) 2005-10-19
CN1330267A (zh) 2002-01-09

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