HK1035260A1 - Deep divot mask for enhanced buried-channel pfet performance and reliability. - Google Patents

Deep divot mask for enhanced buried-channel pfet performance and reliability.

Info

Publication number
HK1035260A1
HK1035260A1 HK01105921A HK01105921A HK1035260A1 HK 1035260 A1 HK1035260 A1 HK 1035260A1 HK 01105921 A HK01105921 A HK 01105921A HK 01105921 A HK01105921 A HK 01105921A HK 1035260 A1 HK1035260 A1 HK 1035260A1
Authority
HK
Hong Kong
Prior art keywords
mask
reliability
pfet performance
buried
enhanced
Prior art date
Application number
HK01105921A
Inventor
Hans-Oliver Joachim
Jack A Mandelman
Rajesh Rengarajan
Original Assignee
Ibm
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm, Siemens Corp filed Critical Ibm
Priority to HK01105921A priority Critical patent/HK1035260A1/en
Publication of HK1035260A1 publication Critical patent/HK1035260A1/en

Links

HK01105921A 2001-08-22 2001-08-22 Deep divot mask for enhanced buried-channel pfet performance and reliability. HK1035260A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
HK01105921A HK1035260A1 (en) 2001-08-22 2001-08-22 Deep divot mask for enhanced buried-channel pfet performance and reliability.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HK01105921A HK1035260A1 (en) 2001-08-22 2001-08-22 Deep divot mask for enhanced buried-channel pfet performance and reliability.

Publications (1)

Publication Number Publication Date
HK1035260A1 true HK1035260A1 (en) 2001-11-16

Family

ID=34131092

Family Applications (1)

Application Number Title Priority Date Filing Date
HK01105921A HK1035260A1 (en) 2001-08-22 2001-08-22 Deep divot mask for enhanced buried-channel pfet performance and reliability.

Country Status (1)

Country Link
HK (1) HK1035260A1 (en)

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20081009