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Priority claimed from US09/163,383external-prioritypatent/US6147361A/en
Priority claimed from PCT/US1998/021252external-prioritypatent/WO1999020005A2/en
Application filed by Qualcomm IncfiledCriticalQualcomm Inc
Publication of HK1033512A1publicationCriticalpatent/HK1033512A1/en
Polysilicon electromigration sensor which can detect and monitor electromigration in composite metal lines on integrated circuit structures with improved sensitivity