HK1014206A1 - Gas heater for processing gases - Google Patents

Gas heater for processing gases

Info

Publication number
HK1014206A1
HK1014206A1 HK98114622A HK98114622A HK1014206A1 HK 1014206 A1 HK1014206 A1 HK 1014206A1 HK 98114622 A HK98114622 A HK 98114622A HK 98114622 A HK98114622 A HK 98114622A HK 1014206 A1 HK1014206 A1 HK 1014206A1
Authority
HK
Hong Kong
Prior art keywords
gas heater
processing gases
gases
processing
heater
Prior art date
Application number
HK98114622A
Other languages
English (en)
Inventor
Craig C Collins
Erica A Ahlstrom
Original Assignee
Silicon Valley Group Thermail
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silicon Valley Group Thermail filed Critical Silicon Valley Group Thermail
Publication of HK1014206A1 publication Critical patent/HK1014206A1/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
    • F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H3/00—Air heaters
    • F24H3/02—Air heaters with forced circulation
    • F24H3/04—Air heaters with forced circulation the air being in direct contact with the heating medium, e.g. electric heating element
    • F24H3/0405—Air heaters with forced circulation the air being in direct contact with the heating medium, e.g. electric heating element using electric energy supply, e.g. the heating medium being a resistive element; Heating by direct contact, i.e. with resistive elements, electrodes and fins being bonded together without additional element in-between

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
HK98114622A 1992-11-04 1998-12-22 Gas heater for processing gases HK1014206A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/971,490 US5377300A (en) 1992-11-04 1992-11-04 Heater for processing gases
PCT/US1993/010532 WO1994010512A1 (fr) 1992-11-04 1993-11-03 Appareil de chauffage des gaz industriels

Publications (1)

Publication Number Publication Date
HK1014206A1 true HK1014206A1 (en) 1999-09-24

Family

ID=25518457

Family Applications (1)

Application Number Title Priority Date Filing Date
HK98114622A HK1014206A1 (en) 1992-11-04 1998-12-22 Gas heater for processing gases

Country Status (7)

Country Link
US (1) US5377300A (fr)
EP (1) EP0666972B1 (fr)
JP (1) JPH08501020A (fr)
KR (1) KR0163256B1 (fr)
DE (1) DE69322975T2 (fr)
HK (1) HK1014206A1 (fr)
WO (1) WO1994010512A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4300163C1 (de) * 1993-01-07 1994-03-17 Boellhoff Verfahrenstech Elektrischer Durchlauferhitzer
US6200389B1 (en) 1994-07-18 2001-03-13 Silicon Valley Group Thermal Systems Llc Single body injector and deposition chamber
AT404600B (de) 1997-03-12 1998-12-28 Voest Alpine Ind Anlagen Verfahren und einrichtung zum aufbereiten von reduktionsgas zur reduktion von erzen
TWI220540B (en) * 2003-07-18 2004-08-21 Au Optronics Corp Buffer of pressure gauge sensor used in dry etching reaction chamber
DE102012109546A1 (de) * 2012-10-08 2014-04-10 Ebm-Papst Mulfingen Gmbh & Co. Kg "Wandring für einen Axialventilator"
US20160053380A1 (en) * 2013-05-03 2016-02-25 United Technologies Corporation High temperature and high pressure portable gas heater

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE564986C (de) * 1932-11-25 Eloy Cignolo Vorrichtung zur Erwaermung von stroemenden Gasen auf elektrischem Wege
US3338476A (en) * 1965-10-24 1967-08-29 Texas Instruments Inc Heating device for use with aerosol containers
US3666918A (en) * 1971-03-11 1972-05-30 Patterson Kelley Co Electric powered water heating system
US3968346A (en) * 1973-06-01 1976-07-06 Cooksley Ralph D Method and apparatus for electrically heating a fluid
DE3434772A1 (de) * 1984-09-21 1986-04-03 Stihler Medizintechnik GmbH, 7000 Stuttgart Geraet zum anwaermen von infusions- und transfusionsloesungen
US4899032A (en) * 1987-03-12 1990-02-06 Siemens Aktiengesellschaft Electric heating element utilizing ceramic PTC resistors for heating flooring media
DE9103209U1 (de) * 1990-04-03 1991-06-13 Geberit Ag, Jona, St.Gallen Thermostatisch geregelte Heizeinrichtung für eine Unterdusche eines Wasserklosetts

Also Published As

Publication number Publication date
EP0666972A1 (fr) 1995-08-16
WO1994010512A1 (fr) 1994-05-11
DE69322975T2 (de) 1999-05-27
KR0163256B1 (ko) 1998-12-15
DE69322975D1 (de) 1999-02-18
EP0666972A4 (fr) 1996-01-17
JPH08501020A (ja) 1996-02-06
EP0666972B1 (fr) 1999-01-07
KR950704659A (ko) 1995-11-20
US5377300A (en) 1994-12-27

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20031103

PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)