HK1004293A1 - Laterally sensitive accelerometer and method for making - Google Patents

Laterally sensitive accelerometer and method for making

Info

Publication number
HK1004293A1
HK1004293A1 HK98102985A HK98102985A HK1004293A1 HK 1004293 A1 HK1004293 A1 HK 1004293A1 HK 98102985 A HK98102985 A HK 98102985A HK 98102985 A HK98102985 A HK 98102985A HK 1004293 A1 HK1004293 A1 HK 1004293A1
Authority
HK
Hong Kong
Prior art keywords
making
substrate
coupled
capacitor plate
movable
Prior art date
Application number
HK98102985A
Inventor
Paul T Bennet
David F Mietus
Ronald J Gutteridge
Ljubisa Ristic
Daniel N Koury
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of HK1004293A1 publication Critical patent/HK1004293A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)

Abstract

A micromachined capacitor structure having a first anchor (12) attached to the substrate (24), a tether (13) coupled to the anchor (12) and having a portion free to move in a lateral direction over the substrate (24) in response to acceleration. A tie-bar (14) is coupled to the movable portion of the tether (13), and at least one movable capacitor plate (16) is coupled to the tie bar (13). A first fixed capacitor plate (18) is attached to the substrate (24) laterally overlapping and vertically spaced from the at least one movable capacitor plate (16). <IMAGE>
HK98102985A 1992-08-10 1998-04-09 Laterally sensitive accelerometer and method for making HK1004293A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/926,616 US5337606A (en) 1992-08-10 1992-08-10 Laterally sensitive accelerometer and method for making

Publications (1)

Publication Number Publication Date
HK1004293A1 true HK1004293A1 (en) 1998-11-20

Family

ID=25453456

Family Applications (1)

Application Number Title Priority Date Filing Date
HK98102985A HK1004293A1 (en) 1992-08-10 1998-04-09 Laterally sensitive accelerometer and method for making

Country Status (5)

Country Link
US (1) US5337606A (en)
EP (1) EP0582797B1 (en)
JP (1) JPH06109759A (en)
DE (1) DE69306687T2 (en)
HK (1) HK1004293A1 (en)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5620931A (en) * 1990-08-17 1997-04-15 Analog Devices, Inc. Methods for fabricating monolithic device containing circuitry and suspended microstructure
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
JP3367113B2 (en) 1992-04-27 2003-01-14 株式会社デンソー Acceleration sensor
US5734105A (en) 1992-10-13 1998-03-31 Nippondenso Co., Ltd. Dynamic quantity sensor
FR2700012B1 (en) * 1992-12-28 1995-03-03 Commissariat Energie Atomique Integrated accelerometer with sensitive axis parallel to the substrate.
DE4447487A1 (en) * 1994-03-30 1995-10-19 Siemens Ag Micromechanical acceleration sensor unit motor vehicle airbag, seat belt restraint
DE4431232C2 (en) * 1994-09-02 1999-07-08 Hahn Schickard Ges Integrable spring-mass system
DE4431338C2 (en) * 1994-09-02 2003-07-31 Bosch Gmbh Robert accelerometer
DE4432837B4 (en) * 1994-09-15 2004-05-13 Robert Bosch Gmbh Accelerometer and measuring method
US5604313A (en) * 1994-11-23 1997-02-18 Tokyo Gas Co., Ltd. Varying apparent mass accelerometer
US5542295A (en) * 1994-12-01 1996-08-06 Analog Devices, Inc. Apparatus to minimize stiction in micromachined structures
US5565625A (en) * 1994-12-01 1996-10-15 Analog Devices, Inc. Sensor with separate actuator and sense fingers
US5662771A (en) * 1994-12-01 1997-09-02 Analog Devices, Inc. Surface micromachining process
DE19503236B4 (en) * 1995-02-02 2006-05-24 Robert Bosch Gmbh Sensor made of a multilayer substrate
DE19506401A1 (en) * 1995-02-23 1996-08-29 Siemens Ag Acceleration sensor
US5583291A (en) * 1995-07-31 1996-12-10 Motorola, Inc. Micromechanical anchor structure
US5550090A (en) * 1995-09-05 1996-08-27 Motorola Inc. Method for fabricating a monolithic semiconductor device with integrated surface micromachined structures
DE19537814B4 (en) * 1995-10-11 2009-11-19 Robert Bosch Gmbh Sensor and method for producing a sensor
GB9819817D0 (en) 1998-09-12 1998-11-04 Secr Defence Improvements relating to micro-machining
WO2000026608A2 (en) * 1998-11-04 2000-05-11 Infineon Technologies Ag Deformation measuring device
KR100464309B1 (en) * 1998-12-31 2005-02-28 삼성전자주식회사 Micro-accelerometer for detecting acceleration and manufacturing method thereof
JP4238437B2 (en) 1999-01-25 2009-03-18 株式会社デンソー Semiconductor dynamic quantity sensor and manufacturing method thereof
US6545661B1 (en) * 1999-06-21 2003-04-08 Midway Amusement Games, Llc Video game system having a control unit with an accelerometer for controlling a video game
US6230566B1 (en) 1999-10-01 2001-05-15 The Regents Of The University Of California Micromachined low frequency rocking accelerometer with capacitive pickoff
EP1191338A1 (en) * 2000-03-31 2002-03-27 Mitsubishi Denki Kabushiki Kaisha Acceleration sensor
US6539524B1 (en) * 2000-05-10 2003-03-25 Agere Systems Inc. Method and apparatus for matching capacitance of filters having different circuit topologies
US6536280B1 (en) * 2000-09-12 2003-03-25 Ic Mechanics, Inc. Thin film MEMS sensors employing electrical sensing and force feedback
US6571628B1 (en) * 2000-10-16 2003-06-03 Institute Of Microelectronics Z-axis accelerometer
DE10231729B4 (en) * 2002-07-13 2011-08-11 Robert Bosch GmbH, 70469 Component with a surface micromechanical structure
US7004027B2 (en) * 2003-03-03 2006-02-28 Yamaha Corporation Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4091680A (en) * 1975-06-16 1978-05-30 Diax Force transducer having a linear transfer characteristic
FR2578323B1 (en) * 1985-03-01 1987-11-20 Metravib Sa INTEGRATED SENSOR OF MECHANICAL QUANTITIES WITH CAPACITIVE EFFECT AND MANUFACTURING METHOD.
GB8628611D0 (en) * 1986-11-29 1987-03-18 Accelerometer Temperature sensing arrangement
DE69113632T2 (en) * 1990-08-17 1996-03-21 Analog Devices Inc MONOLITHIC ACCELERATOR.
US5181156A (en) * 1992-05-14 1993-01-19 Motorola Inc. Micromachined capacitor structure and method for making

Also Published As

Publication number Publication date
JPH06109759A (en) 1994-04-22
US5337606A (en) 1994-08-16
DE69306687D1 (en) 1997-01-30
EP0582797A1 (en) 1994-02-16
EP0582797B1 (en) 1996-12-18
DE69306687T2 (en) 1997-06-12

Similar Documents

Publication Publication Date Title
HK1004293A1 (en) Laterally sensitive accelerometer and method for making
FR2616561B1 (en) METHOD FOR CONTROLLING THE OPERATION OF A SECURITY MODULE
FR2636288B1 (en) DEVICE AND METHOD FOR MAINTAINING THE STABILITY OF A VEHICLE
FR2562843B1 (en) DEVICE FOR CONTROLLING THE DURATION OF A VEHICLE SUSPENSION
ITMI931086A1 (en) APPARATUS TO INFLATE A RETENTION DEVICE FOR A VEHICLE&#39;S OCCUPANT
FR2562844B1 (en) DEVICE FOR CONTROLLING THE DURATION OF A VEHICLE SUSPENSION
FR2648095B1 (en) DEVICE FOR PROTECTING AN OCCUPANT OF A VEHICLE
EP0292989A3 (en) Apparatus and method for effecting fine movement by impact force produced by piezoelectric or electrostrictive element
FR2695369B1 (en) Method for regulating the stability of a vehicle.
FR2594922B1 (en) METHOD FOR ADJUSTING THE SHOCK ABSORBING FORCE OF A SHOCK ABSORBER
FR2629435B1 (en) METHOD AND DEVICE FOR FORMING A STACK OF BAGS, PARTICULARLY BAGS FOR PHOTOGRAPHIC WORKS
FR2689845B1 (en) DEVICE FOR LOCKING THE MOVEMENT OF A VEHICLE IN A PREDETERMINED DIRECTION.
FR2569977B1 (en) STRAINERING CYLINDER FOR INFLATABLE PENELINE ERECTION DEVICE
FR2684784B1 (en) METHOD AND DEVICE FOR GENERATING A SIGNAL REPRESENTING THE CROSS-MOTION OF A VEHICLE.
FR2737181B1 (en) METHOD AND DEVICE FOR REDUCING VIBRATIONS GENERATED ON THE STRUCTURE OF A HELICOPTER
FR2625246B1 (en) DEVICE FOR HANGING A VEHICLE OPENING PANEL
FR2626593B1 (en) METHOD AND DEVICE FOR THE PRODUCTION OF A ROAD COVERING
IT8722837A0 (en) DEVICE FOR ADJUSTING THE HEIGHT OF A CONTROL SLIDER ON A SPINNING FRAME.
FR2698656B1 (en) Improvements to the devices for detecting the engaged position of a bolt.
FR2680146B1 (en) PROTECTION DEVICE FOR OCCUPANTS OF A VEHICLE.
FR2629959B1 (en) METHOD FOR REGULATING THE VOLTAGE OF A VOLTAGE SIGNAL, PARTICULARLY FOR X-RAY TUBE
FR2612636B1 (en) METHOD AND DEVICE FOR MONITORING THE TENSION FORCE OF A THREAD
FR2572030B1 (en) PLATE CHANGE DEVICE FOR AIR SUSPENSION VEHICLE, PARTICULARLY FOR INDUSTRIAL VEHICLE FOR THE TRANSPORT OF PERSONS
FR2684946B1 (en) METHOD FOR CONTROLLING THE DECELERATION OF A VEHICLE.
FR2627902B1 (en) METHOD FOR MOUNTING THE SURFACE OF A SEMICONDUCTOR DEVICE

Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20040601