GR1004237B - Gas flow microsystem and specially designed housing for use in medical equipment for respiratory control - Google Patents

Gas flow microsystem and specially designed housing for use in medical equipment for respiratory control

Info

Publication number
GR1004237B
GR1004237B GR20020100127A GR2002100127A GR1004237B GR 1004237 B GR1004237 B GR 1004237B GR 20020100127 A GR20020100127 A GR 20020100127A GR 2002100127 A GR2002100127 A GR 2002100127A GR 1004237 B GR1004237 B GR 1004237B
Authority
GR
Greece
Prior art keywords
sensor
heater
silicon
microsystem
respiratory control
Prior art date
Application number
GR20020100127A
Other languages
Greek (el)
Inventor
Ανδρουλα Νασιοπουλου
Γρηγοριος Καλτσας
Original Assignee
Εκεφε "Δημοκριτος" Ινστιτουτο Μικροηλεκτρονικης
Ανδρουλα Νασιοπουλου
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Εκεφε "Δημοκριτος" Ινστιτουτο Μικροηλεκτρονικης, Ανδρουλα Νασιοπουλου filed Critical Εκεφε "Δημοκριτος" Ινστιτουτο Μικροηλεκτρονικης
Priority to GR20020100127A priority Critical patent/GR1004237B/en
Publication of GR1004237B publication Critical patent/GR1004237B/en

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  • Measuring Volume Flow (AREA)

Abstract

t is an object of the present patent to provide a gas system for medical applications, composed of a silicon sensor (12), an electronic circuit for readout and power supply of the sensor and a sensor housing. The silicon sensor is a thermal device,composed of a heater (3) and two series of the thermocouples (4,5) on both sides of the heater. The heater and the hot contacts (6) of the thermocouples lie on a porous silicon layer (2), locally formed on the silicon substrate (1) by electrochemical dissolution of bulk silicon. The cold contacts (7) lie on bulk silicon. The electronic circuit supplies a power to the heater and amplifies the sensor output. The housing of the sensor is composed of a main tube (9) with an internal bypass (10) inwhich the sensor device is fixed. The bypass tube is parallel to the direction of flow in the main. tube. The system is appropriate for respiratory control in medical applications.
GR20020100127A 2002-03-06 2002-03-06 Gas flow microsystem and specially designed housing for use in medical equipment for respiratory control GR1004237B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GR20020100127A GR1004237B (en) 2002-03-06 2002-03-06 Gas flow microsystem and specially designed housing for use in medical equipment for respiratory control

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GR20020100127A GR1004237B (en) 2002-03-06 2002-03-06 Gas flow microsystem and specially designed housing for use in medical equipment for respiratory control

Publications (1)

Publication Number Publication Date
GR1004237B true GR1004237B (en) 2003-05-14

Family

ID=29559831

Family Applications (1)

Application Number Title Priority Date Filing Date
GR20020100127A GR1004237B (en) 2002-03-06 2002-03-06 Gas flow microsystem and specially designed housing for use in medical equipment for respiratory control

Country Status (1)

Country Link
GR (1) GR1004237B (en)

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