GR1004237B - Gas flow microsystem and specially designed housing for use in medical equipment for respiratory control - Google Patents
Gas flow microsystem and specially designed housing for use in medical equipment for respiratory controlInfo
- Publication number
- GR1004237B GR1004237B GR20020100127A GR2002100127A GR1004237B GR 1004237 B GR1004237 B GR 1004237B GR 20020100127 A GR20020100127 A GR 20020100127A GR 2002100127 A GR2002100127 A GR 2002100127A GR 1004237 B GR1004237 B GR 1004237B
- Authority
- GR
- Greece
- Prior art keywords
- sensor
- heater
- silicon
- microsystem
- respiratory control
- Prior art date
Links
Landscapes
- Measuring Volume Flow (AREA)
Abstract
t is an object of the present patent to provide a gas system for medical applications, composed of a silicon sensor (12), an electronic circuit for readout and power supply of the sensor and a sensor housing. The silicon sensor is a thermal device,composed of a heater (3) and two series of the thermocouples (4,5) on both sides of the heater. The heater and the hot contacts (6) of the thermocouples lie on a porous silicon layer (2), locally formed on the silicon substrate (1) by electrochemical dissolution of bulk silicon. The cold contacts (7) lie on bulk silicon. The electronic circuit supplies a power to the heater and amplifies the sensor output. The housing of the sensor is composed of a main tube (9) with an internal bypass (10) inwhich the sensor device is fixed. The bypass tube is parallel to the direction of flow in the main. tube. The system is appropriate for respiratory control in medical applications.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GR20020100127A GR1004237B (en) | 2002-03-06 | 2002-03-06 | Gas flow microsystem and specially designed housing for use in medical equipment for respiratory control |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GR20020100127A GR1004237B (en) | 2002-03-06 | 2002-03-06 | Gas flow microsystem and specially designed housing for use in medical equipment for respiratory control |
Publications (1)
Publication Number | Publication Date |
---|---|
GR1004237B true GR1004237B (en) | 2003-05-14 |
Family
ID=29559831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GR20020100127A GR1004237B (en) | 2002-03-06 | 2002-03-06 | Gas flow microsystem and specially designed housing for use in medical equipment for respiratory control |
Country Status (1)
Country | Link |
---|---|
GR (1) | GR1004237B (en) |
-
2002
- 2002-03-06 GR GR20020100127A patent/GR1004237B/en unknown
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