GR1001213B - Arrangement and method to increase the ultra violet radiation emitted by a plasma created by laser-rays - Google Patents

Arrangement and method to increase the ultra violet radiation emitted by a plasma created by laser-rays

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Publication number
GR1001213B
GR1001213B GR880100318A GR880100318A GR1001213B GR 1001213 B GR1001213 B GR 1001213B GR 880100318 A GR880100318 A GR 880100318A GR 880100318 A GR880100318 A GR 880100318A GR 1001213 B GR1001213 B GR 1001213B
Authority
GR
Greece
Prior art keywords
laser
rays
arrangement
increase
created
Prior art date
Application number
GR880100318A
Other languages
Greek (el)
Other versions
GR880100318A (en
Inventor
G Farkas
Z Horvats
Cs Toth
Konstantinos Fotakis
Dimitrios Charalampidis
Ilias Chontzopoulos
Original Assignee
Ilias Chontzopoulos
Konstantinos Fotakis
Dimitrios Charalampidis
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ilias Chontzopoulos, Konstantinos Fotakis, Dimitrios Charalampidis filed Critical Ilias Chontzopoulos
Publication of GR880100318A publication Critical patent/GR880100318A/en
Publication of GR1001213B publication Critical patent/GR1001213B/en

Links

Abstract

Η εφεύρεση αναφέρεται σε σημειακή πηγή υπεριώδους ακτινοβολίας (200-350 mm) και μπορεί να χρησιμοποιηθεί σε διαφόρους τομείς της επιστήμης και της τεχνολογίας όπως είναι η φασματοσκοπική ανάλυση, η μικροσκοπία, η φωτόλυση, η κατεργασία επιφανειών, η φωτολιθογραφία, η φωτοχημεία κλπ. 'Οπως φαίνεται και στην εικόνα αυτή αποτελείται από το πλάσμα (7) που δημιουργείται πάνω στον στερεό στόχο (2) με την χρήση παλμικού excimer λέϊζερ (3) και φακού (5) σε αντιδραστήρα κενού (1) ο οποίος έχει παράθυρο (8) περατό τόσο στην εκπεμπόμενη υπεριώδη ανκτινοβολία (7) όσο και στην δέσμη του λέϊζερ (4) που είναι δυνατή και εύκολη η αλλαγή της σχετικής θέσης του στερεού στόχου (2) και της δέσμης του λεϊζερ (4), παρουσία στατικού ηλεκτρικού πεδίου 10 KV/cm που δημιουργείται έτσι ώστε, αν ο στερεός στόχος (2) είναι αγώγιμος τότε χρησιμοποιείται σαν θετικό ηλεκτρόδιο, ενώ τα τοιχώματα (11) του μεταλλικού αντιδραστήρα κενού (1) χρησιμοποιούνται σαν αρνητικό ηλεκτρόδιο και γειώνονται. ωThe invention refers to a point source of ultraviolet radiation (200-350 mm) and can be used in various fields of science and technology such as spectroscopic analysis, microscopy, photolysis, surface treatment, photolithography, photochemistry, etc. As can be seen in this image, it consists of the plasma (7) created on the solid target (2) using a pulsed excimer laser (3) and a lens (5) in a vacuum reactor (1) which has a window (8) both in the emitted UV radiation (7) and in the laser beam (4) that it is possible and easy to change the relative position of the solid target (2) and the laser beam (4), in the presence of a static electric field of 10 KV/cm which is created so that, if the solid target (2) is conductive then it is used as a positive electrode, while the walls (11) of the metal vacuum reactor (1) are used as a negative electrode and are grounded. oh

GR880100318A 1988-05-16 1988-05-16 Arrangement and method to increase the ultra violet radiation emitted by a plasma created by laser-rays GR1001213B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GR88100318 1988-05-16

Publications (2)

Publication Number Publication Date
GR880100318A GR880100318A (en) 1990-03-12
GR1001213B true GR1001213B (en) 1993-06-21

Family

ID=10938741

Family Applications (1)

Application Number Title Priority Date Filing Date
GR880100318A GR1001213B (en) 1988-05-16 1988-05-16 Arrangement and method to increase the ultra violet radiation emitted by a plasma created by laser-rays

Country Status (1)

Country Link
GR (1) GR1001213B (en)

Also Published As

Publication number Publication date
GR880100318A (en) 1990-03-12

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