GR1001213B - Arrangement and method to increase the ultra violet radiation emitted by a plasma created by laser-rays - Google Patents
Arrangement and method to increase the ultra violet radiation emitted by a plasma created by laser-raysInfo
- Publication number
- GR1001213B GR1001213B GR880100318A GR880100318A GR1001213B GR 1001213 B GR1001213 B GR 1001213B GR 880100318 A GR880100318 A GR 880100318A GR 880100318 A GR880100318 A GR 880100318A GR 1001213 B GR1001213 B GR 1001213B
- Authority
- GR
- Greece
- Prior art keywords
- laser
- rays
- arrangement
- increase
- created
- Prior art date
Links
Abstract
Η εφεύρεση αναφέρεται σε σημειακή πηγή υπεριώδους ακτινοβολίας (200-350 mm) και μπορεί να χρησιμοποιηθεί σε διαφόρους τομείς της επιστήμης και της τεχνολογίας όπως είναι η φασματοσκοπική ανάλυση, η μικροσκοπία, η φωτόλυση, η κατεργασία επιφανειών, η φωτολιθογραφία, η φωτοχημεία κλπ. 'Οπως φαίνεται και στην εικόνα αυτή αποτελείται από το πλάσμα (7) που δημιουργείται πάνω στον στερεό στόχο (2) με την χρήση παλμικού excimer λέϊζερ (3) και φακού (5) σε αντιδραστήρα κενού (1) ο οποίος έχει παράθυρο (8) περατό τόσο στην εκπεμπόμενη υπεριώδη ανκτινοβολία (7) όσο και στην δέσμη του λέϊζερ (4) που είναι δυνατή και εύκολη η αλλαγή της σχετικής θέσης του στερεού στόχου (2) και της δέσμης του λεϊζερ (4), παρουσία στατικού ηλεκτρικού πεδίου 10 KV/cm που δημιουργείται έτσι ώστε, αν ο στερεός στόχος (2) είναι αγώγιμος τότε χρησιμοποιείται σαν θετικό ηλεκτρόδιο, ενώ τα τοιχώματα (11) του μεταλλικού αντιδραστήρα κενού (1) χρησιμοποιούνται σαν αρνητικό ηλεκτρόδιο και γειώνονται. ωThe invention refers to a point source of ultraviolet radiation (200-350 mm) and can be used in various fields of science and technology such as spectroscopic analysis, microscopy, photolysis, surface treatment, photolithography, photochemistry, etc. As can be seen in this image, it consists of the plasma (7) created on the solid target (2) using a pulsed excimer laser (3) and a lens (5) in a vacuum reactor (1) which has a window (8) both in the emitted UV radiation (7) and in the laser beam (4) that it is possible and easy to change the relative position of the solid target (2) and the laser beam (4), in the presence of a static electric field of 10 KV/cm which is created so that, if the solid target (2) is conductive then it is used as a positive electrode, while the walls (11) of the metal vacuum reactor (1) are used as a negative electrode and are grounded. oh
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GR88100318 | 1988-05-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
GR880100318A GR880100318A (en) | 1990-03-12 |
GR1001213B true GR1001213B (en) | 1993-06-21 |
Family
ID=10938741
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GR880100318A GR1001213B (en) | 1988-05-16 | 1988-05-16 | Arrangement and method to increase the ultra violet radiation emitted by a plasma created by laser-rays |
Country Status (1)
Country | Link |
---|---|
GR (1) | GR1001213B (en) |
-
1988
- 1988-05-16 GR GR880100318A patent/GR1001213B/en unknown
Also Published As
Publication number | Publication date |
---|---|
GR880100318A (en) | 1990-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ES2041374T3 (en) | ELIMINATION OF SURFACE POLLUTANTS BY RADIATION FROM A HIGH ENERGY SOURCE. | |
NO954027D0 (en) | Removal of surface contaminants by radiation | |
ATE127617T1 (en) | HIGH POWER SPOTLIGHTS. | |
ATE45246T1 (en) | DEVICE FOR X-RAY RADIATION. | |
ES2187870T3 (en) | APPARATUS FOR THERAPY WITH A LASER IRRADIATION DEVICE. | |
EP1179381A3 (en) | Surface treatment apparatus | |
DE69532268D1 (en) | Spectrometer with selectable beam path of the light coming from an inductively excited plasma source | |
EP0824026A3 (en) | Radiation treatment apparatus and method | |
DE3784241D1 (en) | FLUORESCENT LIGHTING SYSTEM. | |
DE69329524D1 (en) | Imaging device | |
ES2164093T3 (en) | ELEMENTAL ANALYSIS PROCEDURE FOR OPTICAL EMISSION SPECTROMETRY IN A PLASMA PRODUCED BY A LASER RAY IN THE PRESENCE OF ARGON. | |
CA2080083A1 (en) | Optical arrangement for exposure apparatus | |
ATE180703T1 (en) | REMOVAL OF SURFACE CONTAMINATION THROUGH RADIATION | |
JPS55129313A (en) | Light deflector | |
GR1001213B (en) | Arrangement and method to increase the ultra violet radiation emitted by a plasma created by laser-rays | |
KR880013274A (en) | X-ray lithograph | |
Katoh et al. | High aspect ratio micromachining by synchrotron radiation direct photo-etching | |
DE69110918D1 (en) | Electron beam irradiation apparatus. | |
EP0730148A3 (en) | Apparatus and method to measure the hardening of a UV-curable agent containing pigment | |
JPH0760654B2 (en) | Ion beam generation method and device | |
ES2029126T3 (en) | LASER DEVICE, ESPECIALLY FOR THERAPEUTIC APPLICATIONS. | |
KR950025951A (en) | Laser irradiation device | |
RU93005253A (en) | METHOD OF SUBSURFACE MARKING OF THE BODY OF A MATERIAL AND A DEVICE FOR ITS IMPLEMENTATION | |
JPH0215552A (en) | Ion injecting device | |
KR100504189B1 (en) | Ultraviolet ray generating device and method |