GB9903361D0 - Removing water from articles - Google Patents

Removing water from articles

Info

Publication number
GB9903361D0
GB9903361D0 GBGB9903361.5A GB9903361A GB9903361D0 GB 9903361 D0 GB9903361 D0 GB 9903361D0 GB 9903361 A GB9903361 A GB 9903361A GB 9903361 D0 GB9903361 D0 GB 9903361D0
Authority
GB
United Kingdom
Prior art keywords
articles
removing water
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9903361.5A
Other versions
GB2346953A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HENLY STEPHEN R
Original Assignee
HENLY STEPHEN R
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HENLY STEPHEN R filed Critical HENLY STEPHEN R
Priority to GB9903361A priority Critical patent/GB2346953A/en
Publication of GB9903361D0 publication Critical patent/GB9903361D0/en
Publication of GB2346953A publication Critical patent/GB2346953A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/14—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects using gases or vapours other than air or steam, e.g. inert gases
    • F26B21/145—Condensing the vapour onto the surface of the materials to be dried

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
GB9903361A 1999-02-16 1999-02-16 Removing water from articles Withdrawn GB2346953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9903361A GB2346953A (en) 1999-02-16 1999-02-16 Removing water from articles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9903361A GB2346953A (en) 1999-02-16 1999-02-16 Removing water from articles

Publications (2)

Publication Number Publication Date
GB9903361D0 true GB9903361D0 (en) 1999-04-07
GB2346953A GB2346953A (en) 2000-08-23

Family

ID=10847759

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9903361A Withdrawn GB2346953A (en) 1999-02-16 1999-02-16 Removing water from articles

Country Status (1)

Country Link
GB (1) GB2346953A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004525515A (en) * 2001-03-15 2004-08-19 アクリオン・エルエルシー Steam generation for drying
JP6426927B2 (en) * 2013-09-30 2018-11-21 芝浦メカトロニクス株式会社 Substrate processing apparatus and substrate processing method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE152487T1 (en) * 1988-07-08 1997-05-15 Rhone Poulenc Chimie CLEANING AND DRYING ELECTRONIC COMPONENTS
US5539995A (en) * 1994-03-16 1996-07-30 Verteq, Inc. Continuous flow vapor dryer system
TW301761B (en) * 1994-11-29 1997-04-01 Sharp Kk

Also Published As

Publication number Publication date
GB2346953A (en) 2000-08-23

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)