GB9827196D0 - Plasma processing apparatus - Google Patents

Plasma processing apparatus

Info

Publication number
GB9827196D0
GB9827196D0 GBGB9827196.8A GB9827196A GB9827196D0 GB 9827196 D0 GB9827196 D0 GB 9827196D0 GB 9827196 A GB9827196 A GB 9827196A GB 9827196 D0 GB9827196 D0 GB 9827196D0
Authority
GB
United Kingdom
Prior art keywords
processing apparatus
plasma processing
plasma
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9827196.8A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surface Technology Systems Ltd
Original Assignee
Surface Technology Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surface Technology Systems Ltd filed Critical Surface Technology Systems Ltd
Priority to GBGB9827196.8A priority Critical patent/GB9827196D0/en
Publication of GB9827196D0 publication Critical patent/GB9827196D0/en
Priority to PCT/GB1999/004168 priority patent/WO2000036631A1/en
Priority to KR1020007008638A priority patent/KR100768610B1/en
Priority to KR1020077011424A priority patent/KR100829288B1/en
Priority to JP2000588789A priority patent/JP4714309B2/en
Priority to EP99958406A priority patent/EP1055250B1/en
Priority to AT99958406T priority patent/ATE458261T1/en
Priority to DE69942020T priority patent/DE69942020D1/en
Priority to US11/080,964 priority patent/US7491649B2/en
Ceased legal-status Critical Current

Links

GBGB9827196.8A 1998-12-11 1998-12-11 Plasma processing apparatus Ceased GB9827196D0 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
GBGB9827196.8A GB9827196D0 (en) 1998-12-11 1998-12-11 Plasma processing apparatus
PCT/GB1999/004168 WO2000036631A1 (en) 1998-12-11 1999-12-10 Plasma processing apparatus
KR1020007008638A KR100768610B1 (en) 1998-12-11 1999-12-10 Plasma processing apparatus
KR1020077011424A KR100829288B1 (en) 1998-12-11 1999-12-10 Plasma processing apparatus
JP2000588789A JP4714309B2 (en) 1998-12-11 1999-12-10 Plasma processing equipment
EP99958406A EP1055250B1 (en) 1998-12-11 1999-12-10 Plasma processing apparatus
AT99958406T ATE458261T1 (en) 1998-12-11 1999-12-10 PLASMA TREATMENT DEVICE
DE69942020T DE69942020D1 (en) 1998-12-11 1999-12-10 PLASMA TREATMENT DEVICE
US11/080,964 US7491649B2 (en) 1998-12-11 2005-03-16 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9827196.8A GB9827196D0 (en) 1998-12-11 1998-12-11 Plasma processing apparatus

Publications (1)

Publication Number Publication Date
GB9827196D0 true GB9827196D0 (en) 1999-02-03

Family

ID=10843984

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9827196.8A Ceased GB9827196D0 (en) 1998-12-11 1998-12-11 Plasma processing apparatus

Country Status (1)

Country Link
GB (1) GB9827196D0 (en)

Similar Documents

Publication Publication Date Title
EP1096554A4 (en) Plasma processing apparatus
SG63778A1 (en) Plasma processing apparatus
EP1069603A4 (en) Processing apparatus
EP1193746A4 (en) Apparatus for plasma processing
EP1187187A4 (en) Plasma processing apparatus
EP1100119A4 (en) Plasma processing method
GB9620151D0 (en) Plasma processing apparatus
EP1061155A4 (en) Vacuum processing apparatus
EP1306893A4 (en) Plasma processing apparatus
EP1289003A4 (en) Plasma processing apparatus
TW479915U (en) Plasma treatment apparatus
EP0805475A3 (en) Plasma processing apparatus
TW504041U (en) Wafer processing apparatus
EP1276356A4 (en) Apparatus for plasma processing
EP1119033A4 (en) Plasma processing method
SG66424A1 (en) Plasma processing apparatus
EP1215717A4 (en) Magnetron plasma processing apparatus
IL138264A0 (en) Plasma processing apparatus and plasma processing method
TW458486U (en) Plasma processing device
TW399773U (en) Plasma processing device
GB9714341D0 (en) Plasma processing apparatus
EP1156516A4 (en) Method and apparatus for plasma processing
IL138903A0 (en) Apparatus for gas processing
EP1154466A4 (en) Method and apparatus for plasma processing
GB9812852D0 (en) Plasma processing apparatus

Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)