GB9813606D0 - Improvements relating to wafer edge polishing - Google Patents

Improvements relating to wafer edge polishing

Info

Publication number
GB9813606D0
GB9813606D0 GBGB9813606.2A GB9813606A GB9813606D0 GB 9813606 D0 GB9813606 D0 GB 9813606D0 GB 9813606 A GB9813606 A GB 9813606A GB 9813606 D0 GB9813606 D0 GB 9813606D0
Authority
GB
United Kingdom
Prior art keywords
improvements relating
wafer edge
edge polishing
polishing
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9813606.2A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intermec Europe Ltd
Original Assignee
Unova UK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unova UK Ltd filed Critical Unova UK Ltd
Priority to GBGB9813606.2A priority Critical patent/GB9813606D0/en
Publication of GB9813606D0 publication Critical patent/GB9813606D0/en
Priority to PCT/GB1999/001928 priority patent/WO1999067054A1/en
Priority to CNB998097063A priority patent/CN1138612C/en
Priority to KR10-2000-7014818A priority patent/KR100416446B1/en
Priority to ES99926637T priority patent/ES2186368T3/en
Priority to AT99926637T priority patent/ATE226127T1/en
Priority to JP2000555724A priority patent/JP2002518195A/en
Priority to EP99926637A priority patent/EP1089851B1/en
Priority to US09/720,111 priority patent/US6428397B1/en
Priority to DE69903547T priority patent/DE69903547T2/en
Priority to GB9914215A priority patent/GB2342060B/en
Priority to TW088112436A priority patent/TW445193B/en
Ceased legal-status Critical Current

Links

GBGB9813606.2A 1998-06-25 1998-06-25 Improvements relating to wafer edge polishing Ceased GB9813606D0 (en)

Priority Applications (12)

Application Number Priority Date Filing Date Title
GBGB9813606.2A GB9813606D0 (en) 1998-06-25 1998-06-25 Improvements relating to wafer edge polishing
GB9914215A GB2342060B (en) 1998-06-25 1999-06-17 Wafer edge polishing method and apparatus
ES99926637T ES2186368T3 (en) 1998-06-25 1999-06-17 METHOD AND APPLIANCE OF POLISHING OF OBLEA EDGE.
CNB998097063A CN1138612C (en) 1998-06-25 1999-06-17 Waffer edge polishing method and apparatus
KR10-2000-7014818A KR100416446B1 (en) 1998-06-25 1999-06-17 Wafer edge polishing method and apparatus
PCT/GB1999/001928 WO1999067054A1 (en) 1998-06-25 1999-06-17 Wafer edge polishing method and apparatus
AT99926637T ATE226127T1 (en) 1998-06-25 1999-06-17 METHOD AND DEVICE FOR CHAMFERING SEMICONDUCTOR DISCS
JP2000555724A JP2002518195A (en) 1998-06-25 1999-06-17 Wafer edge polishing method and apparatus
EP99926637A EP1089851B1 (en) 1998-06-25 1999-06-17 Wafer edge polishing method and apparatus
US09/720,111 US6428397B1 (en) 1998-06-25 1999-06-17 Wafer edge polishing method and apparatus
DE69903547T DE69903547T2 (en) 1998-06-25 1999-06-17 METHOD AND DEVICE FOR BEVELING SEMICONDUCTOR DISCS
TW088112436A TW445193B (en) 1998-06-25 1999-07-22 Wafer edge polishing method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9813606.2A GB9813606D0 (en) 1998-06-25 1998-06-25 Improvements relating to wafer edge polishing

Publications (1)

Publication Number Publication Date
GB9813606D0 true GB9813606D0 (en) 1998-08-26

Family

ID=10834287

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9813606.2A Ceased GB9813606D0 (en) 1998-06-25 1998-06-25 Improvements relating to wafer edge polishing

Country Status (1)

Country Link
GB (1) GB9813606D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)