GB9811081D0 - Apparatus for coupling power into a body of gas - Google Patents

Apparatus for coupling power into a body of gas

Info

Publication number
GB9811081D0
GB9811081D0 GBGB9811081.0A GB9811081A GB9811081D0 GB 9811081 D0 GB9811081 D0 GB 9811081D0 GB 9811081 A GB9811081 A GB 9811081A GB 9811081 D0 GB9811081 D0 GB 9811081D0
Authority
GB
United Kingdom
Prior art keywords
gas
coupling power
coupling
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9811081.0A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Research Laboratories Ltd
Original Assignee
Central Research Laboratories Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Research Laboratories Ltd filed Critical Central Research Laboratories Ltd
Priority to GBGB9811081.0A priority Critical patent/GB9811081D0/en
Publication of GB9811081D0 publication Critical patent/GB9811081D0/en
Priority to PCT/GB1999/001592 priority patent/WO1999062308A1/en
Priority to JP2000551588A priority patent/JP2002517079A/en
Priority to EP99922363A priority patent/EP1080614A1/en
Priority to CA002332860A priority patent/CA2332860A1/en
Priority to KR1020007013084A priority patent/KR20010034882A/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/048—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using an excitation coil
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
GBGB9811081.0A 1998-05-22 1998-05-22 Apparatus for coupling power into a body of gas Ceased GB9811081D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GBGB9811081.0A GB9811081D0 (en) 1998-05-22 1998-05-22 Apparatus for coupling power into a body of gas
PCT/GB1999/001592 WO1999062308A1 (en) 1998-05-22 1999-05-19 Apparatus for coupling power into a body of gas
JP2000551588A JP2002517079A (en) 1998-05-22 1999-05-19 Device for coupling power in a gaseous body
EP99922363A EP1080614A1 (en) 1998-05-22 1999-05-19 Apparatus for coupling power into a body of gas
CA002332860A CA2332860A1 (en) 1998-05-22 1999-05-19 Apparatus for coupling power into a body of gas
KR1020007013084A KR20010034882A (en) 1998-05-22 1999-05-19 Apparatus for coupling power into a body of gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9811081.0A GB9811081D0 (en) 1998-05-22 1998-05-22 Apparatus for coupling power into a body of gas

Publications (1)

Publication Number Publication Date
GB9811081D0 true GB9811081D0 (en) 1998-07-22

Family

ID=10832568

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9811081.0A Ceased GB9811081D0 (en) 1998-05-22 1998-05-22 Apparatus for coupling power into a body of gas

Country Status (6)

Country Link
EP (1) EP1080614A1 (en)
JP (1) JP2002517079A (en)
KR (1) KR20010034882A (en)
CA (1) CA2332860A1 (en)
GB (1) GB9811081D0 (en)
WO (1) WO1999062308A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8401307A (en) * 1984-04-24 1985-11-18 Philips Nv ELECTRESSLESS LOW PRESSURE DISCHARGE LAMP.
US4918031A (en) * 1988-12-28 1990-04-17 American Telephone And Telegraph Company,At&T Bell Laboratories Processes depending on plasma generation using a helical resonator
US6200412B1 (en) * 1996-02-16 2001-03-13 Novellus Systems, Inc. Chemical vapor deposition system including dedicated cleaning gas injection
US5726523A (en) * 1996-05-06 1998-03-10 Matsushita Electric Works Research & Development Labratory Electrodeless fluorescent lamp with bifilar coil and faraday shield
JP2872976B2 (en) * 1996-11-19 1999-03-24 日本高周波株式会社 Inductively coupled plasma generator

Also Published As

Publication number Publication date
KR20010034882A (en) 2001-04-25
JP2002517079A (en) 2002-06-11
WO1999062308A1 (en) 1999-12-02
EP1080614A1 (en) 2001-03-07
CA2332860A1 (en) 1999-12-02

Similar Documents

Publication Publication Date Title
GB2339978B (en) Battery connection apparatus
ZA9711338B (en) Process for making gas hydrates
GB0025552D0 (en) Process and apparatus for the generation of power
GB9824879D0 (en) Socket for pipe coupling
PL325310A1 (en) Method of introducing a gas into liquids
GB2288632B (en) Coupling for pipes
AU134621S (en) Socket of pipe coupling
PL322305A1 (en) Method of obtaining a gas hydrate
GB2346576B (en) A rotary and a method for facilitating the connection of pipes
GB0030738D0 (en) Method and apparatus for transmitting power
GB2346577B (en) An apparatus and a method for facilitating the connection of pipes
HUP0003672A3 (en) Hydrokinetic coupling apparatus
HUP0004591A3 (en) Hydrokinetic coupling apparatus
EP0704237A3 (en) Device for introducing gas
GB9811081D0 (en) Apparatus for coupling power into a body of gas
AU137051S (en) Lance adaptor
HK1018854A1 (en) A gas insulated apparatus
PL339047A1 (en) Method of obtaining a laughing gas
ZA98942B (en) Method of an arrangement for positioning the mouth of a consumablbe lance
GB2323904B (en) Lateral pipe adaptor
GB0031116D0 (en) Method of operating a power station
GB9909689D0 (en) A method of transmitting
KR0108652Y1 (en) Apparatus of a gas boiler
TW355608U (en) Improvement for starting apparatus of gas releasing
GB9802757D0 (en) A method of operating an autoclave

Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)