GB9802943D0 - System for directing a charged partical beam - Google Patents

System for directing a charged partical beam

Info

Publication number
GB9802943D0
GB9802943D0 GBGB9802943.2A GB9802943A GB9802943D0 GB 9802943 D0 GB9802943 D0 GB 9802943D0 GB 9802943 A GB9802943 A GB 9802943A GB 9802943 D0 GB9802943 D0 GB 9802943D0
Authority
GB
United Kingdom
Prior art keywords
partical
directing
charged
partical beam
charged partical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9802943.2A
Other versions
GB2334372A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to GB9802943A priority Critical patent/GB2334372A/en
Publication of GB9802943D0 publication Critical patent/GB9802943D0/en
Priority to JP11031757A priority patent/JPH11312641A/en
Publication of GB2334372A publication Critical patent/GB2334372A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
GB9802943A 1998-02-11 1998-02-11 System for directing a charged particle beam, e.g. for electron beam projection Withdrawn GB2334372A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9802943A GB2334372A (en) 1998-02-11 1998-02-11 System for directing a charged particle beam, e.g. for electron beam projection
JP11031757A JPH11312641A (en) 1998-02-11 1999-02-09 Optical system for charged-beam apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9802943A GB2334372A (en) 1998-02-11 1998-02-11 System for directing a charged particle beam, e.g. for electron beam projection

Publications (2)

Publication Number Publication Date
GB9802943D0 true GB9802943D0 (en) 1998-04-08
GB2334372A GB2334372A (en) 1999-08-18

Family

ID=10826835

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9802943A Withdrawn GB2334372A (en) 1998-02-11 1998-02-11 System for directing a charged particle beam, e.g. for electron beam projection

Country Status (2)

Country Link
JP (1) JPH11312641A (en)
GB (1) GB2334372A (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2627176B2 (en) * 1976-06-15 1978-09-14 Siemens Ag, 1000 Berlin Und 8000 Muenchen Electron beam optical projection device with a long focal length magnetic lens
US4303864A (en) * 1979-10-25 1981-12-01 The United States Of America As Represented By The United States Department Of Energy Sextupole system for the correction of spherical aberration
US4389571A (en) * 1981-04-01 1983-06-21 The United States Of America As Represented By The United States Department Of Energy Multiple sextupole system for the correction of third and higher order aberration
JPH0613280A (en) * 1992-03-30 1994-01-21 Ims Ionen Mikrofab Syst Gmbh Particle, especially ion optical describing apparatus

Also Published As

Publication number Publication date
JPH11312641A (en) 1999-11-09
GB2334372A (en) 1999-08-18

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)