GB9723445D0 - Manufacture - Google Patents

Manufacture

Info

Publication number
GB9723445D0
GB9723445D0 GBGB9723445.4A GB9723445A GB9723445D0 GB 9723445 D0 GB9723445 D0 GB 9723445D0 GB 9723445 A GB9723445 A GB 9723445A GB 9723445 D0 GB9723445 D0 GB 9723445D0
Authority
GB
United Kingdom
Prior art keywords
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9723445.4A
Other versions
GB2320135A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Smiths Group PLC
Original Assignee
Smiths Group PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9625186.3A external-priority patent/GB9625186D0/en
Application filed by Smiths Group PLC filed Critical Smiths Group PLC
Priority to GB9723445A priority Critical patent/GB2320135A/en
Publication of GB9723445D0 publication Critical patent/GB9723445D0/en
Publication of GB2320135A publication Critical patent/GB2320135A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
GB9723445A 1996-12-04 1997-11-06 Semiconductor wafer processing apparatus Withdrawn GB2320135A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9723445A GB2320135A (en) 1996-12-04 1997-11-06 Semiconductor wafer processing apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9625186.3A GB9625186D0 (en) 1996-12-04 1996-12-04 Manufacture
GB9723445A GB2320135A (en) 1996-12-04 1997-11-06 Semiconductor wafer processing apparatus

Publications (2)

Publication Number Publication Date
GB9723445D0 true GB9723445D0 (en) 1998-01-07
GB2320135A GB2320135A (en) 1998-06-10

Family

ID=26310546

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9723445A Withdrawn GB2320135A (en) 1996-12-04 1997-11-06 Semiconductor wafer processing apparatus

Country Status (1)

Country Link
GB (1) GB2320135A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG106599A1 (en) * 2000-02-01 2004-10-29 Tokyo Electron Ltd Substrate processing apparatus and substrate processing method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1983000950A1 (en) * 1981-09-11 1983-03-17 Sato, Shigeru Method and device for producing amorphous silicon solar battery
EP0219826B1 (en) * 1985-10-24 1994-09-07 Texas Instruments Incorporated Vacuum processing system
EP0608633B1 (en) * 1993-01-28 1999-03-03 Applied Materials, Inc. Method for multilayer CVD processing in a single chamber
EP0634699A1 (en) * 1993-07-16 1995-01-18 Semiconductor Systems, Inc. Clustered photolithography system

Also Published As

Publication number Publication date
GB2320135A (en) 1998-06-10

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)