GB9710108D0 - Optical grating generating apparatus - Google Patents

Optical grating generating apparatus

Info

Publication number
GB9710108D0
GB9710108D0 GBGB9710108.3A GB9710108A GB9710108D0 GB 9710108 D0 GB9710108 D0 GB 9710108D0 GB 9710108 A GB9710108 A GB 9710108A GB 9710108 D0 GB9710108 D0 GB 9710108D0
Authority
GB
United Kingdom
Prior art keywords
generating apparatus
optical grating
grating generating
optical
grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9710108.3A
Other versions
GB2325528A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ahead Optoelectronics Inc
Original Assignee
Ahead Optoelectronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ahead Optoelectronics Inc filed Critical Ahead Optoelectronics Inc
Priority to GB9710108A priority Critical patent/GB2325528A/en
Publication of GB9710108D0 publication Critical patent/GB9710108D0/en
Publication of GB2325528A publication Critical patent/GB2325528A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns
GB9710108A 1997-05-19 1997-05-19 Optical grating generating apparatus Withdrawn GB2325528A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9710108A GB2325528A (en) 1997-05-19 1997-05-19 Optical grating generating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9710108A GB2325528A (en) 1997-05-19 1997-05-19 Optical grating generating apparatus

Publications (2)

Publication Number Publication Date
GB9710108D0 true GB9710108D0 (en) 1997-07-09
GB2325528A GB2325528A (en) 1998-11-25

Family

ID=10812519

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9710108A Withdrawn GB2325528A (en) 1997-05-19 1997-05-19 Optical grating generating apparatus

Country Status (1)

Country Link
GB (1) GB2325528A (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB516014A (en) * 1937-06-24 1939-12-20 Paul Nickelsberg Improvements in or relating to photographic printing apparatus
GB1489816A (en) * 1975-12-12 1977-10-26 Marconi Co Ltd Apparatus for producing linear movement
DE3447488A1 (en) * 1984-10-19 1986-05-07 Canon K.K., Tokio/Tokyo PROJECTION DEVICE
US4978841A (en) * 1989-08-24 1990-12-18 Lasa Industries, Inc. Automatic leveling system and a method of leveling a workpiece based on focus detection
US5283141A (en) * 1992-03-05 1994-02-01 National Semiconductor Photolithography control system and method using latent image measurements
JP3402850B2 (en) * 1995-05-09 2003-05-06 キヤノン株式会社 Projection exposure apparatus and device manufacturing method using the same

Also Published As

Publication number Publication date
GB2325528A (en) 1998-11-25

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)