GB9620150D0 - Plasma processing apparatus - Google Patents
Plasma processing apparatusInfo
- Publication number
- GB9620150D0 GB9620150D0 GBGB9620150.4A GB9620150A GB9620150D0 GB 9620150 D0 GB9620150 D0 GB 9620150D0 GB 9620150 A GB9620150 A GB 9620150A GB 9620150 D0 GB9620150 D0 GB 9620150D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- processing apparatus
- plasma processing
- plasma
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9620150.4A GB9620150D0 (en) | 1996-09-27 | 1996-09-27 | Plasma processing apparatus |
EP97307538A EP0838839B1 (en) | 1996-09-27 | 1997-09-25 | Plasma processing apparatus |
DE69736081T DE69736081T2 (en) | 1996-09-27 | 1997-09-25 | Plasma processing apparatus |
AT97307538T ATE396494T1 (en) | 1996-09-27 | 1997-09-25 | PLASMA PROCESSING DEVICE |
EP03002201A EP1324371B1 (en) | 1996-09-27 | 1997-09-25 | Plasma processing apparatus |
KR1019970048706A KR100505176B1 (en) | 1996-09-27 | 1997-09-25 | Plasma Processing Equipment |
DE69738704T DE69738704D1 (en) | 1996-09-27 | 1997-09-25 | A plasma processing apparatus |
US08/938,995 US6259209B1 (en) | 1996-09-27 | 1997-09-26 | Plasma processing apparatus with coils in dielectric windows |
JP26469497A JP3967433B2 (en) | 1996-09-27 | 1997-09-29 | Plasma processing equipment |
US09/884,460 US6534922B2 (en) | 1996-09-27 | 2001-06-20 | Plasma processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9620150.4A GB9620150D0 (en) | 1996-09-27 | 1996-09-27 | Plasma processing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9620150D0 true GB9620150D0 (en) | 1996-11-13 |
Family
ID=10800572
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9620150.4A Pending GB9620150D0 (en) | 1996-09-27 | 1996-09-27 | Plasma processing apparatus |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB9620150D0 (en) |
-
1996
- 1996-09-27 GB GBGB9620150.4A patent/GB9620150D0/en active Pending
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