GB9620150D0 - Plasma processing apparatus - Google Patents

Plasma processing apparatus

Info

Publication number
GB9620150D0
GB9620150D0 GBGB9620150.4A GB9620150A GB9620150D0 GB 9620150 D0 GB9620150 D0 GB 9620150D0 GB 9620150 A GB9620150 A GB 9620150A GB 9620150 D0 GB9620150 D0 GB 9620150D0
Authority
GB
United Kingdom
Prior art keywords
processing apparatus
plasma processing
plasma
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9620150.4A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surface Technology Systems Ltd
Original Assignee
Surface Technology Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surface Technology Systems Ltd filed Critical Surface Technology Systems Ltd
Priority to GBGB9620150.4A priority Critical patent/GB9620150D0/en
Publication of GB9620150D0 publication Critical patent/GB9620150D0/en
Priority to KR1019970048706A priority patent/KR100505176B1/en
Priority to AT97307538T priority patent/ATE396494T1/en
Priority to EP03002201A priority patent/EP1324371B1/en
Priority to DE69736081T priority patent/DE69736081T2/en
Priority to DE69738704T priority patent/DE69738704D1/en
Priority to EP97307538A priority patent/EP0838839B1/en
Priority to US08/938,995 priority patent/US6259209B1/en
Priority to JP26469497A priority patent/JP3967433B2/en
Priority to US09/884,460 priority patent/US6534922B2/en
Pending legal-status Critical Current

Links

GBGB9620150.4A 1996-09-27 1996-09-27 Plasma processing apparatus Pending GB9620150D0 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
GBGB9620150.4A GB9620150D0 (en) 1996-09-27 1996-09-27 Plasma processing apparatus
EP97307538A EP0838839B1 (en) 1996-09-27 1997-09-25 Plasma processing apparatus
DE69736081T DE69736081T2 (en) 1996-09-27 1997-09-25 Plasma processing apparatus
AT97307538T ATE396494T1 (en) 1996-09-27 1997-09-25 PLASMA PROCESSING DEVICE
EP03002201A EP1324371B1 (en) 1996-09-27 1997-09-25 Plasma processing apparatus
KR1019970048706A KR100505176B1 (en) 1996-09-27 1997-09-25 Plasma Processing Equipment
DE69738704T DE69738704D1 (en) 1996-09-27 1997-09-25 A plasma processing apparatus
US08/938,995 US6259209B1 (en) 1996-09-27 1997-09-26 Plasma processing apparatus with coils in dielectric windows
JP26469497A JP3967433B2 (en) 1996-09-27 1997-09-29 Plasma processing equipment
US09/884,460 US6534922B2 (en) 1996-09-27 2001-06-20 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9620150.4A GB9620150D0 (en) 1996-09-27 1996-09-27 Plasma processing apparatus

Publications (1)

Publication Number Publication Date
GB9620150D0 true GB9620150D0 (en) 1996-11-13

Family

ID=10800572

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9620150.4A Pending GB9620150D0 (en) 1996-09-27 1996-09-27 Plasma processing apparatus

Country Status (1)

Country Link
GB (1) GB9620150D0 (en)

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