GB9608938D0 - Dimethylaluminum hydrate composition, process for producing the same and method of reducing viscosity of dimethylaluminum hydride - Google Patents

Dimethylaluminum hydrate composition, process for producing the same and method of reducing viscosity of dimethylaluminum hydride

Info

Publication number
GB9608938D0
GB9608938D0 GBGB9608938.8A GB9608938A GB9608938D0 GB 9608938 D0 GB9608938 D0 GB 9608938D0 GB 9608938 A GB9608938 A GB 9608938A GB 9608938 D0 GB9608938 D0 GB 9608938D0
Authority
GB
United Kingdom
Prior art keywords
dimethylaluminum
producing
same
reducing viscosity
hydride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB9608938.8A
Other versions
GB2300189A8 (en
GB2300189B (en
GB2300189A (en
Inventor
Kazuhisa Kajihara
Tadaaki Yako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Priority to GB9707230A priority Critical patent/GB2309970B/en
Publication of GB9608938D0 publication Critical patent/GB9608938D0/en
Publication of GB2300189A publication Critical patent/GB2300189A/en
Publication of GB2300189A8 publication Critical patent/GB2300189A8/en
Application granted granted Critical
Publication of GB2300189B publication Critical patent/GB2300189B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic System
    • C07F5/06—Aluminium compounds
    • C07F5/061—Aluminium compounds with C-aluminium linkage
    • C07F5/065—Aluminium compounds with C-aluminium linkage compounds with an Al-H linkage
GB9608938A 1995-04-28 1996-04-29 Dimethylaluminum hydride composition and process for producing the same Expired - Fee Related GB2300189B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9707230A GB2309970B (en) 1995-04-28 1996-04-29 Method of reducing viscosity of dimethylaluminum hydride

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10675895 1995-04-28
JP8014117A JPH0912581A (en) 1995-04-28 1996-01-30 Dimethylaluminum hydride composition, its production and viscosity adjustment of dimethylaluminum hydride

Publications (4)

Publication Number Publication Date
GB9608938D0 true GB9608938D0 (en) 1996-07-03
GB2300189A GB2300189A (en) 1996-10-30
GB2300189A8 GB2300189A8 (en) 1997-09-11
GB2300189B GB2300189B (en) 1998-01-07

Family

ID=26350021

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9608938A Expired - Fee Related GB2300189B (en) 1995-04-28 1996-04-29 Dimethylaluminum hydride composition and process for producing the same

Country Status (4)

Country Link
JP (1) JPH0912581A (en)
KR (1) KR960037690A (en)
DE (1) DE19616830A1 (en)
GB (1) GB2300189B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2309970B (en) * 1995-04-28 1998-01-07 Sumitomo Chemical Co Method of reducing viscosity of dimethylaluminum hydride
KR100298128B1 (en) * 1998-04-16 2001-08-07 정명식 Method of decreasing viscosity of dimethylaluminum hydride which is useful as precursor in prepration of aluminum thin membrane
KR100289945B1 (en) * 1998-09-15 2001-09-17 신현국 Precursor for chemical vapor deposition of aluminum thin film and preparing the same
KR101367141B1 (en) 2007-08-03 2014-02-25 삼성전자주식회사 Organometallic Precursor, Method of Forming a Thin Film using the Organometallic Precursor and Method of Manufacturing a Metal Wiring

Also Published As

Publication number Publication date
GB2300189A8 (en) 1997-09-11
JPH0912581A (en) 1997-01-14
GB2300189B (en) 1998-01-07
KR960037690A (en) 1996-11-19
GB2300189A (en) 1996-10-30
DE19616830A1 (en) 1996-10-31

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20000429