GB9608178D0 - Image enhancement using interferometry - Google Patents

Image enhancement using interferometry

Info

Publication number
GB9608178D0
GB9608178D0 GBGB9608178.1A GB9608178A GB9608178D0 GB 9608178 D0 GB9608178 D0 GB 9608178D0 GB 9608178 A GB9608178 A GB 9608178A GB 9608178 D0 GB9608178 D0 GB 9608178D0
Authority
GB
United Kingdom
Prior art keywords
interferometry
image enhancement
enhancement
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9608178.1A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bio Rad Micromeasurements Ltd
Original Assignee
Bio Rad Micromeasurements Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bio Rad Micromeasurements Ltd filed Critical Bio Rad Micromeasurements Ltd
Priority to GBGB9608178.1A priority Critical patent/GB9608178D0/en
Publication of GB9608178D0 publication Critical patent/GB9608178D0/en
Priority to PCT/GB1997/001006 priority patent/WO1997040422A1/en
Priority to AU25163/97A priority patent/AU2516397A/en
Pending legal-status Critical Current

Links

GBGB9608178.1A 1996-04-19 1996-04-19 Image enhancement using interferometry Pending GB9608178D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GBGB9608178.1A GB9608178D0 (en) 1996-04-19 1996-04-19 Image enhancement using interferometry
PCT/GB1997/001006 WO1997040422A1 (en) 1996-04-19 1997-04-11 Image enhancement using interferometry
AU25163/97A AU2516397A (en) 1996-04-19 1997-04-11 Image enhancement using interferometry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9608178.1A GB9608178D0 (en) 1996-04-19 1996-04-19 Image enhancement using interferometry

Publications (1)

Publication Number Publication Date
GB9608178D0 true GB9608178D0 (en) 1996-06-26

Family

ID=10792378

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9608178.1A Pending GB9608178D0 (en) 1996-04-19 1996-04-19 Image enhancement using interferometry

Country Status (3)

Country Link
AU (1) AU2516397A (en)
GB (1) GB9608178D0 (en)
WO (1) WO1997040422A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3796363B2 (en) 1998-10-30 2006-07-12 キヤノン株式会社 Position detection apparatus and exposure apparatus using the same
US7054071B2 (en) * 2004-07-08 2006-05-30 Spectel Research Corporation Mireau interference objective lens

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5073018A (en) * 1989-10-04 1991-12-17 The Board Of Trustees Of The Leland Stanford Junior University Correlation microscope
US5375175A (en) * 1992-03-06 1994-12-20 The Board Of Trustees Of The Leland Stanford Junior University Method and apparatus of measuring line structures with an optical microscope by data clustering and classification
EP0562133B1 (en) * 1992-03-23 1998-02-25 Erland Torbjörn Sandström Method and apparatus for forming an image
US5438413A (en) * 1993-03-03 1995-08-01 Kla Instruments Corporation Process for measuring overlay misregistration during semiconductor wafer fabrication
US5633714A (en) * 1994-12-19 1997-05-27 International Business Machines Corporation Preprocessing of image amplitude and phase data for CD and OL measurement

Also Published As

Publication number Publication date
AU2516397A (en) 1997-11-12
WO1997040422A1 (en) 1997-10-30

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