GB9524117D0 - Improvements in boron ion sources for ion implantation apparatus - Google Patents
Improvements in boron ion sources for ion implantation apparatusInfo
- Publication number
- GB9524117D0 GB9524117D0 GBGB9524117.0A GB9524117A GB9524117D0 GB 9524117 D0 GB9524117 D0 GB 9524117D0 GB 9524117 A GB9524117 A GB 9524117A GB 9524117 D0 GB9524117 D0 GB 9524117D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- implantation apparatus
- ion
- boron
- ion implantation
- sources
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9524117.0A GB9524117D0 (en) | 1995-11-24 | 1995-11-24 | Improvements in boron ion sources for ion implantation apparatus |
GB9623923A GB2307594A (en) | 1995-11-24 | 1996-11-18 | Boron ion sources for ion implantation apparatus |
US08/990,323 US5977552A (en) | 1995-11-24 | 1997-12-11 | Boron ion sources for ion implantation apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9524117.0A GB9524117D0 (en) | 1995-11-24 | 1995-11-24 | Improvements in boron ion sources for ion implantation apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9524117D0 true GB9524117D0 (en) | 1996-01-24 |
Family
ID=10784439
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9524117.0A Pending GB9524117D0 (en) | 1995-11-24 | 1995-11-24 | Improvements in boron ion sources for ion implantation apparatus |
GB9623923A Withdrawn GB2307594A (en) | 1995-11-24 | 1996-11-18 | Boron ion sources for ion implantation apparatus |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9623923A Withdrawn GB2307594A (en) | 1995-11-24 | 1996-11-18 | Boron ion sources for ion implantation apparatus |
Country Status (1)
Country | Link |
---|---|
GB (2) | GB9524117D0 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3339492B2 (en) | 2000-05-10 | 2002-10-28 | 日新電機株式会社 | Operation method of ion source and ion beam irradiation device |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2408829C2 (en) * | 1974-02-23 | 1984-03-22 | Ibm Deutschland Gmbh, 7000 Stuttgart | Boron ion source material and process for its manufacture |
GB9210897D0 (en) * | 1992-05-21 | 1992-07-08 | Superion Ltd | Apparatus for and method of producing ions |
-
1995
- 1995-11-24 GB GBGB9524117.0A patent/GB9524117D0/en active Pending
-
1996
- 1996-11-18 GB GB9623923A patent/GB2307594A/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
GB2307594A (en) | 1997-05-28 |
GB9623923D0 (en) | 1997-01-08 |
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