GB9524117D0 - Improvements in boron ion sources for ion implantation apparatus - Google Patents

Improvements in boron ion sources for ion implantation apparatus

Info

Publication number
GB9524117D0
GB9524117D0 GBGB9524117.0A GB9524117A GB9524117D0 GB 9524117 D0 GB9524117 D0 GB 9524117D0 GB 9524117 A GB9524117 A GB 9524117A GB 9524117 D0 GB9524117 D0 GB 9524117D0
Authority
GB
United Kingdom
Prior art keywords
implantation apparatus
ion
boron
ion implantation
sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9524117.0A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to GBGB9524117.0A priority Critical patent/GB9524117D0/en
Publication of GB9524117D0 publication Critical patent/GB9524117D0/en
Priority to GB9623923A priority patent/GB2307594A/en
Priority to US08/990,323 priority patent/US5977552A/en
Pending legal-status Critical Current

Links

GBGB9524117.0A 1995-11-24 1995-11-24 Improvements in boron ion sources for ion implantation apparatus Pending GB9524117D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GBGB9524117.0A GB9524117D0 (en) 1995-11-24 1995-11-24 Improvements in boron ion sources for ion implantation apparatus
GB9623923A GB2307594A (en) 1995-11-24 1996-11-18 Boron ion sources for ion implantation apparatus
US08/990,323 US5977552A (en) 1995-11-24 1997-12-11 Boron ion sources for ion implantation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9524117.0A GB9524117D0 (en) 1995-11-24 1995-11-24 Improvements in boron ion sources for ion implantation apparatus

Publications (1)

Publication Number Publication Date
GB9524117D0 true GB9524117D0 (en) 1996-01-24

Family

ID=10784439

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB9524117.0A Pending GB9524117D0 (en) 1995-11-24 1995-11-24 Improvements in boron ion sources for ion implantation apparatus
GB9623923A Withdrawn GB2307594A (en) 1995-11-24 1996-11-18 Boron ion sources for ion implantation apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB9623923A Withdrawn GB2307594A (en) 1995-11-24 1996-11-18 Boron ion sources for ion implantation apparatus

Country Status (1)

Country Link
GB (2) GB9524117D0 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3339492B2 (en) 2000-05-10 2002-10-28 日新電機株式会社 Operation method of ion source and ion beam irradiation device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2408829C2 (en) * 1974-02-23 1984-03-22 Ibm Deutschland Gmbh, 7000 Stuttgart Boron ion source material and process for its manufacture
GB9210897D0 (en) * 1992-05-21 1992-07-08 Superion Ltd Apparatus for and method of producing ions

Also Published As

Publication number Publication date
GB2307594A (en) 1997-05-28
GB9623923D0 (en) 1997-01-08

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