GB9520950D0 - Water-processable chemically amplified resist - Google Patents
Water-processable chemically amplified resistInfo
- Publication number
- GB9520950D0 GB9520950D0 GBGB9520950.8A GB9520950A GB9520950D0 GB 9520950 D0 GB9520950 D0 GB 9520950D0 GB 9520950 A GB9520950 A GB 9520950A GB 9520950 D0 GB9520950 D0 GB 9520950D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- processable
- water
- chemically amplified
- amplified resist
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9520950.8A GB9520950D0 (en) | 1995-10-13 | 1995-10-13 | Water-processable chemically amplified resist |
PCT/IB1996/001082 WO1997014079A1 (en) | 1995-10-13 | 1996-10-11 | Water-processable, chemically amplified resist compositions and processes |
CA 2234512 CA2234512A1 (en) | 1995-10-13 | 1996-10-11 | Water-processable, chemically amplified resist compositions and processes |
EP96931943A EP0855050A1 (en) | 1995-10-13 | 1996-10-11 | Water-processable, chemically amplified resist compositions and processes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9520950.8A GB9520950D0 (en) | 1995-10-13 | 1995-10-13 | Water-processable chemically amplified resist |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9520950D0 true GB9520950D0 (en) | 1995-12-13 |
Family
ID=10782236
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9520950.8A Pending GB9520950D0 (en) | 1995-10-13 | 1995-10-13 | Water-processable chemically amplified resist |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0855050A1 (en) |
CA (1) | CA2234512A1 (en) |
GB (1) | GB9520950D0 (en) |
WO (1) | WO1997014079A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0957399B1 (en) * | 1998-04-24 | 2004-02-18 | Infineon Technologies AG | Radiation-sensitive composition and its use |
DE10054121B4 (en) * | 2000-10-31 | 2006-06-14 | Infineon Technologies Ag | Process for structuring a photoresist layer |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3825430A (en) * | 1972-02-09 | 1974-07-23 | Minnesota Mining & Mfg | Light-sensitive composition and method |
US4294909A (en) * | 1979-12-26 | 1981-10-13 | E. I. Du Pont De Nemours And Company | Photosensitive negative-working toning process |
EP0380676B1 (en) * | 1988-02-17 | 1994-05-04 | Tosoh Corporation | Photoresist composition |
ES2090217T3 (en) * | 1990-12-20 | 1996-10-16 | Siemens Ag | PHOTOSENSITIVE LACQUER. |
US5332650A (en) * | 1991-09-06 | 1994-07-26 | Japan Synthetic Rubber Co., Ltd. | Radiation-sensitive composition |
JP2936956B2 (en) * | 1993-04-15 | 1999-08-23 | 信越化学工業株式会社 | Resist material |
-
1995
- 1995-10-13 GB GBGB9520950.8A patent/GB9520950D0/en active Pending
-
1996
- 1996-10-11 CA CA 2234512 patent/CA2234512A1/en not_active Abandoned
- 1996-10-11 WO PCT/IB1996/001082 patent/WO1997014079A1/en not_active Application Discontinuation
- 1996-10-11 EP EP96931943A patent/EP0855050A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
WO1997014079A1 (en) | 1997-04-17 |
EP0855050A1 (en) | 1998-07-29 |
CA2234512A1 (en) | 1997-04-17 |
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