GB9520950D0 - Water-processable chemically amplified resist - Google Patents

Water-processable chemically amplified resist

Info

Publication number
GB9520950D0
GB9520950D0 GBGB9520950.8A GB9520950A GB9520950D0 GB 9520950 D0 GB9520950 D0 GB 9520950D0 GB 9520950 A GB9520950 A GB 9520950A GB 9520950 D0 GB9520950 D0 GB 9520950D0
Authority
GB
United Kingdom
Prior art keywords
processable
water
chemically amplified
amplified resist
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9520950.8A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Martinex R&D Inc
Original Assignee
Martinex R&D Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Martinex R&D Inc filed Critical Martinex R&D Inc
Priority to GBGB9520950.8A priority Critical patent/GB9520950D0/en
Publication of GB9520950D0 publication Critical patent/GB9520950D0/en
Priority to PCT/IB1996/001082 priority patent/WO1997014079A1/en
Priority to CA 2234512 priority patent/CA2234512A1/en
Priority to EP96931943A priority patent/EP0855050A1/en
Pending legal-status Critical Current

Links

GBGB9520950.8A 1995-10-13 1995-10-13 Water-processable chemically amplified resist Pending GB9520950D0 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GBGB9520950.8A GB9520950D0 (en) 1995-10-13 1995-10-13 Water-processable chemically amplified resist
PCT/IB1996/001082 WO1997014079A1 (en) 1995-10-13 1996-10-11 Water-processable, chemically amplified resist compositions and processes
CA 2234512 CA2234512A1 (en) 1995-10-13 1996-10-11 Water-processable, chemically amplified resist compositions and processes
EP96931943A EP0855050A1 (en) 1995-10-13 1996-10-11 Water-processable, chemically amplified resist compositions and processes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9520950.8A GB9520950D0 (en) 1995-10-13 1995-10-13 Water-processable chemically amplified resist

Publications (1)

Publication Number Publication Date
GB9520950D0 true GB9520950D0 (en) 1995-12-13

Family

ID=10782236

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9520950.8A Pending GB9520950D0 (en) 1995-10-13 1995-10-13 Water-processable chemically amplified resist

Country Status (4)

Country Link
EP (1) EP0855050A1 (en)
CA (1) CA2234512A1 (en)
GB (1) GB9520950D0 (en)
WO (1) WO1997014079A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0957399B1 (en) * 1998-04-24 2004-02-18 Infineon Technologies AG Radiation-sensitive composition and its use
DE10054121B4 (en) * 2000-10-31 2006-06-14 Infineon Technologies Ag Process for structuring a photoresist layer

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3825430A (en) * 1972-02-09 1974-07-23 Minnesota Mining & Mfg Light-sensitive composition and method
US4294909A (en) * 1979-12-26 1981-10-13 E. I. Du Pont De Nemours And Company Photosensitive negative-working toning process
EP0380676B1 (en) * 1988-02-17 1994-05-04 Tosoh Corporation Photoresist composition
ES2090217T3 (en) * 1990-12-20 1996-10-16 Siemens Ag PHOTOSENSITIVE LACQUER.
US5332650A (en) * 1991-09-06 1994-07-26 Japan Synthetic Rubber Co., Ltd. Radiation-sensitive composition
JP2936956B2 (en) * 1993-04-15 1999-08-23 信越化学工業株式会社 Resist material

Also Published As

Publication number Publication date
WO1997014079A1 (en) 1997-04-17
EP0855050A1 (en) 1998-07-29
CA2234512A1 (en) 1997-04-17

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