GB947920A - Improvements in or relating to devices for measuring displacements - Google Patents
Improvements in or relating to devices for measuring displacementsInfo
- Publication number
- GB947920A GB947920A GB1383660A GB1383660A GB947920A GB 947920 A GB947920 A GB 947920A GB 1383660 A GB1383660 A GB 1383660A GB 1383660 A GB1383660 A GB 1383660A GB 947920 A GB947920 A GB 947920A
- Authority
- GB
- United Kingdom
- Prior art keywords
- raster
- moirú
- photo
- electric
- zones
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 title abstract 6
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 230000011664 signaling Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
947,920. Electric selective signalling systems. PHILIPS ELECTRICAL INDUSTRIES Ltd. April 20, 1960 [April 23, 1959], No.13836/60. Heading G4H. Relates to an arrangement for measuring the magnitude and direction of rectilinear or rotary displacement of a member, e.g. a machine tool member, in which a raster, e.g. a diffraction grating or absorption raster, is attached to the member, said raster having lines substantially at right angles to the direction of displacement, a beam of light is directed onto the raster to form a luminous image consisting of bright and dark moirÚ bands which move substantially at right angles to themselves on displacement of the raster and the luminous image is projected on to a plurality of, e.g. four, photo-electric cells whose output pulses are counted in an electronic counter to give the displacement magnitude, the direction of displacement being indicated by the relative phase relationship of the pulse outputs. According to the present invention the effects of any irregularities in the raster are reduced by arranging that the area of the luminous image covered by the photo-electric cells comprises at least two moirÚ periods, a moirÚ period being the distance between two successive bright moirÚ bands and each period being regarded as divided into a number of zones I, II, III, IV equal to the number of photo-electric cells, the light from each of the first zones I being directed on to a first photo-electric cell, the light from each of the second zones II being directed on to a second photo-electric cell and so on. The arrangement described comprises a fixed raster 1 and a raster 2 movable in the direction of its length and having opaque lines inclined relative to those of the fixed raster 1 to produce moirÚ bands extending parallel to the direction of movement but alternatively the two rasters may have different raster periods or constants in which case the moirÚ bands extend parallel to the raster lines. The invention is also applicable to an arrangement comprising a single raster as described in Specification 906,101. As shown in Fig. 3, light from a source 3 focused by lens 4 on the movable raster 2 and fixed raster 1 is projected by lenses 5, 6 on to a double prism 7 having its axes at right angles to the plane of the paper. In conjunction with a lens 8, light from the zones I, I is simultaneously projected on to the photo-cell 9, and that from zones IV, IV is incident on the cell 12. The outputs from the cells 9. . .12 are fed to an electric counter T which provides an indication of the movement in extent and direction of the raster 2 relative to the fixed raster 1. Specification 760,321 also is referred to.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL238520 | 1959-04-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB947920A true GB947920A (en) | 1964-01-29 |
Family
ID=19751687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1383660A Expired GB947920A (en) | 1959-04-23 | 1960-04-20 | Improvements in or relating to devices for measuring displacements |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB947920A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2157825A (en) * | 1984-04-24 | 1985-10-30 | Perkin Elmer Corp | Apparatus for measuring overlay error between a mask pattern and a wafer pattern |
-
1960
- 1960-04-20 GB GB1383660A patent/GB947920A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2157825A (en) * | 1984-04-24 | 1985-10-30 | Perkin Elmer Corp | Apparatus for measuring overlay error between a mask pattern and a wafer pattern |
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