GB947920A - Improvements in or relating to devices for measuring displacements - Google Patents

Improvements in or relating to devices for measuring displacements

Info

Publication number
GB947920A
GB947920A GB1383660A GB1383660A GB947920A GB 947920 A GB947920 A GB 947920A GB 1383660 A GB1383660 A GB 1383660A GB 1383660 A GB1383660 A GB 1383660A GB 947920 A GB947920 A GB 947920A
Authority
GB
United Kingdom
Prior art keywords
raster
moirú
photo
electric
zones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1383660A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electrical Industries Ltd
Original Assignee
Philips Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electrical Industries Ltd filed Critical Philips Electrical Industries Ltd
Publication of GB947920A publication Critical patent/GB947920A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

947,920. Electric selective signalling systems. PHILIPS ELECTRICAL INDUSTRIES Ltd. April 20, 1960 [April 23, 1959], No.13836/60. Heading G4H. Relates to an arrangement for measuring the magnitude and direction of rectilinear or rotary displacement of a member, e.g. a machine tool member, in which a raster, e.g. a diffraction grating or absorption raster, is attached to the member, said raster having lines substantially at right angles to the direction of displacement, a beam of light is directed onto the raster to form a luminous image consisting of bright and dark moirÚ bands which move substantially at right angles to themselves on displacement of the raster and the luminous image is projected on to a plurality of, e.g. four, photo-electric cells whose output pulses are counted in an electronic counter to give the displacement magnitude, the direction of displacement being indicated by the relative phase relationship of the pulse outputs. According to the present invention the effects of any irregularities in the raster are reduced by arranging that the area of the luminous image covered by the photo-electric cells comprises at least two moirÚ periods, a moirÚ period being the distance between two successive bright moirÚ bands and each period being regarded as divided into a number of zones I, II, III, IV equal to the number of photo-electric cells, the light from each of the first zones I being directed on to a first photo-electric cell, the light from each of the second zones II being directed on to a second photo-electric cell and so on. The arrangement described comprises a fixed raster 1 and a raster 2 movable in the direction of its length and having opaque lines inclined relative to those of the fixed raster 1 to produce moirÚ bands extending parallel to the direction of movement but alternatively the two rasters may have different raster periods or constants in which case the moirÚ bands extend parallel to the raster lines. The invention is also applicable to an arrangement comprising a single raster as described in Specification 906,101. As shown in Fig. 3, light from a source 3 focused by lens 4 on the movable raster 2 and fixed raster 1 is projected by lenses 5, 6 on to a double prism 7 having its axes at right angles to the plane of the paper. In conjunction with a lens 8, light from the zones I, I is simultaneously projected on to the photo-cell 9, and that from zones IV, IV is incident on the cell 12. The outputs from the cells 9. . .12 are fed to an electric counter T which provides an indication of the movement in extent and direction of the raster 2 relative to the fixed raster 1. Specification 760,321 also is referred to.
GB1383660A 1959-04-23 1960-04-20 Improvements in or relating to devices for measuring displacements Expired GB947920A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL238520 1959-04-23

Publications (1)

Publication Number Publication Date
GB947920A true GB947920A (en) 1964-01-29

Family

ID=19751687

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1383660A Expired GB947920A (en) 1959-04-23 1960-04-20 Improvements in or relating to devices for measuring displacements

Country Status (1)

Country Link
GB (1) GB947920A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2157825A (en) * 1984-04-24 1985-10-30 Perkin Elmer Corp Apparatus for measuring overlay error between a mask pattern and a wafer pattern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2157825A (en) * 1984-04-24 1985-10-30 Perkin Elmer Corp Apparatus for measuring overlay error between a mask pattern and a wafer pattern

Similar Documents

Publication Publication Date Title
US3971002A (en) Device for the optical read-out of a diffractive track belonging to a data carrier in the form of a disc or tape
GB1502161A (en) Machine-tool displacement measuring
US3245307A (en) Moire fringe apparatus for measuring small movements
GB1153579A (en) Equipment for the Measuring of Alteration in the Position of Two Systems Capable of Movement Relative to each other
JPS5248331A (en) Scanning system with light beam
GB1504691A (en) Measurement apparatus
GB940167A (en) Improvements in or relating to devices for digital measurement of the displacement of an object
JPS5397448A (en) Self amplifying deflection scanning optical system
US3114046A (en) Position measuring system
US3906220A (en) Optical correlator
GB1159033A (en) Improvements relating to Optical Inspection Devices.
US3198061A (en) Optical system for analyzing movement of a movable grating
DE59006260D1 (en) OPTICAL POSITIONING SYSTEM FOR AT LEAST ONE PICTURE POINT.
GB1431067A (en) Apparatus for measuring a property of movement
GB1228277A (en)
GB1399706A (en) Optical scanning device
GB947920A (en) Improvements in or relating to devices for measuring displacements
GB1473615A (en) Spectrometer with interferential selective amplitude modulation
GB1525049A (en) Displacement-indicating apparatus
GB1150080A (en) Apparatus for measuring a dimension of a body
US3423591A (en) Device for determining mean value of two opposite peripheral coordinates of a solar image
GB1139691A (en) A device for the absolute digital presentation of measuring values
GB1108214A (en) Interferometric measuring system
GB1143581A (en)
GB1376245A (en) Optical scanning apparatus