GB9418658D0 - An apparatus for generating a glow discharge - Google Patents

An apparatus for generating a glow discharge

Info

Publication number
GB9418658D0
GB9418658D0 GB9418658A GB9418658A GB9418658D0 GB 9418658 D0 GB9418658 D0 GB 9418658D0 GB 9418658 A GB9418658 A GB 9418658A GB 9418658 A GB9418658 A GB 9418658A GB 9418658 D0 GB9418658 D0 GB 9418658D0
Authority
GB
United Kingdom
Prior art keywords
generating
glow discharge
glow
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB9418658A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Research Laboratories Ltd
Original Assignee
Central Research Laboratories Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Research Laboratories Ltd filed Critical Central Research Laboratories Ltd
Priority to GB9418658A priority Critical patent/GB9418658D0/en
Publication of GB9418658D0 publication Critical patent/GB9418658D0/en
Priority to PCT/GB1995/002012 priority patent/WO1996008836A1/en
Pending legal-status Critical Current

Links

GB9418658A 1994-09-16 1994-09-16 An apparatus for generating a glow discharge Pending GB9418658D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9418658A GB9418658D0 (en) 1994-09-16 1994-09-16 An apparatus for generating a glow discharge
PCT/GB1995/002012 WO1996008836A1 (en) 1994-09-16 1995-08-25 An apparatus for generating a glow discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9418658A GB9418658D0 (en) 1994-09-16 1994-09-16 An apparatus for generating a glow discharge

Publications (1)

Publication Number Publication Date
GB9418658D0 true GB9418658D0 (en) 1994-11-02

Family

ID=10761415

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9418658A Pending GB9418658D0 (en) 1994-09-16 1994-09-16 An apparatus for generating a glow discharge

Country Status (2)

Country Link
GB (1) GB9418658D0 (en)
WO (1) WO1996008836A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6237526B1 (en) * 1999-03-26 2001-05-29 Tokyo Electron Limited Process apparatus and method for improving plasma distribution and performance in an inductively coupled plasma
DE10304585A1 (en) * 2003-02-05 2004-08-19 Abb Research Ltd. Two- or multi-dimensional magnetic field generation arrangement

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE58904540D1 (en) * 1988-03-24 1993-07-08 Siemens Ag METHOD AND DEVICE FOR PRODUCING SEMICONDUCTOR LAYERS CONSISTING OF AMORPHOUS SILICON-GERMANIUM ALLOYS BY GLIMMENT CHARGING TECHNOLOGY, ESPECIALLY FOR SOLAR CELLS.
DE3942964A1 (en) * 1989-12-23 1991-06-27 Leybold Ag DEVICE FOR PRODUCING A PLASMA

Also Published As

Publication number Publication date
WO1996008836A1 (en) 1996-03-21

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