GB9404301D0 - Stripper compositions and their use - Google Patents

Stripper compositions and their use

Info

Publication number
GB9404301D0
GB9404301D0 GB9404301A GB9404301A GB9404301D0 GB 9404301 D0 GB9404301 D0 GB 9404301D0 GB 9404301 A GB9404301 A GB 9404301A GB 9404301 A GB9404301 A GB 9404301A GB 9404301 D0 GB9404301 D0 GB 9404301D0
Authority
GB
United Kingdom
Prior art keywords
stripper compositions
stripper
compositions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB9404301A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech UK Ltd
Original Assignee
Atotech UK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech UK Ltd filed Critical Atotech UK Ltd
Priority to GB9404301A priority Critical patent/GB9404301D0/en
Publication of GB9404301D0 publication Critical patent/GB9404301D0/en
Priority to PCT/EP1995/000858 priority patent/WO1995023999A1/en
Pending legal-status Critical Current

Links

GB9404301A 1994-03-04 1994-03-04 Stripper compositions and their use Pending GB9404301D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9404301A GB9404301D0 (en) 1994-03-04 1994-03-04 Stripper compositions and their use
PCT/EP1995/000858 WO1995023999A1 (en) 1994-03-04 1995-03-06 Aqueous composition for removing polymer resist layers from substrate surfaces and its use

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9404301A GB9404301D0 (en) 1994-03-04 1994-03-04 Stripper compositions and their use

Publications (1)

Publication Number Publication Date
GB9404301D0 true GB9404301D0 (en) 1994-04-20

Family

ID=10751381

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9404301A Pending GB9404301D0 (en) 1994-03-04 1994-03-04 Stripper compositions and their use

Country Status (2)

Country Link
GB (1) GB9404301D0 (en)
WO (1) WO1995023999A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5817610A (en) * 1996-09-06 1998-10-06 Olin Microelectronic Chemicals, Inc. Non-corrosive cleaning composition for removing plasma etching residues
US5759973A (en) * 1996-09-06 1998-06-02 Olin Microelectronic Chemicals, Inc. Photoresist stripping and cleaning compositions
MXPA00011391A (en) * 1998-05-18 2005-06-20 Mallinckrodt Inc Silicate-containing alkaline compositions for cleaning microelectronic substrates.
US5980643A (en) * 1998-06-18 1999-11-09 Semitool, Inc. Alkaline water-based solution for cleaning metallized microelectronic
EP1729179A1 (en) 2005-06-03 2006-12-06 Atotech Deutschland Gmbh Method for fine line resist stripping

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3268203D1 (en) * 1981-04-10 1986-02-13 Shipley Co Metal ion-free photoresist developer composition
EP0097282A3 (en) * 1982-06-17 1984-07-25 Shipley Company Inc. Developer compositions for photoresists
CA1285418C (en) * 1985-07-18 1991-07-02 Robert A. Owens Pre-exposure method for increased sensitivity in high contrast resist development
CA1281578C (en) * 1985-07-18 1991-03-19 Susan A. Ferguson High contrast photoresist developer with enhanced sensitivity
DD277773A1 (en) * 1988-12-02 1990-04-11 Akad Wissenschaften Ddr WAESSER-ALKALISCH DEVELOPABLE POSITIVE RESISTANT
US5250393A (en) * 1990-12-20 1993-10-05 Fuji Photo Film Co., Ltd. Method for developing presensitized plate for use in making lithographic printing plate

Also Published As

Publication number Publication date
WO1995023999A1 (en) 1995-09-08

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