GB9205665D0 - Piezo-electric motor - Google Patents
Piezo-electric motorInfo
- Publication number
- GB9205665D0 GB9205665D0 GB929205665A GB9205665A GB9205665D0 GB 9205665 D0 GB9205665 D0 GB 9205665D0 GB 929205665 A GB929205665 A GB 929205665A GB 9205665 A GB9205665 A GB 9205665A GB 9205665 D0 GB9205665 D0 GB 9205665D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- piezo
- electric motor
- motor
- electric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB929205665A GB9205665D0 (en) | 1992-03-16 | 1992-03-16 | Piezo-electric motor |
PCT/GB1993/000539 WO1993019494A1 (en) | 1992-03-16 | 1993-03-16 | Piezoelectric motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB929205665A GB9205665D0 (en) | 1992-03-16 | 1992-03-16 | Piezo-electric motor |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9205665D0 true GB9205665D0 (en) | 1992-04-29 |
Family
ID=10712204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB929205665A Pending GB9205665D0 (en) | 1992-03-16 | 1992-03-16 | Piezo-electric motor |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB9205665D0 (en) |
WO (1) | WO1993019494A1 (en) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2735923B1 (en) * | 1995-06-23 | 1997-08-29 | Suisse Electronique Microtech | VERY HIGH PRECISION PIEZOELECTRIC ACTUATOR |
DE19710601C2 (en) * | 1997-03-14 | 1999-05-20 | Univ Magdeburg Tech | Motion generator |
EP1311007A1 (en) * | 2001-11-07 | 2003-05-14 | ASML Netherlands B.V. | Piezoelectric actuator, lithographic apparatus and device manufacturing method |
AU2002354358A1 (en) * | 2001-11-23 | 2003-06-10 | Ecicm B.V. | Method and devices for driving a body |
US6849989B2 (en) | 2002-10-31 | 2005-02-01 | Andreas Schmid | Translation and rotation positioning motor |
WO2005114825A1 (en) * | 2004-05-20 | 2005-12-01 | Japan Science And Technology Agency | Method and device for precisely resisting and moving high load |
US7646137B2 (en) * | 2004-06-11 | 2010-01-12 | Fujinon Corporation | Actuator and its control method and lens device |
EP1693906B1 (en) * | 2005-02-17 | 2007-08-01 | Agie Sa | Piezoelectric driving element |
DE102005023988B4 (en) * | 2005-05-20 | 2007-03-01 | Universität Hamburg | Piezoelectric motor |
DE102008004867A1 (en) | 2007-01-25 | 2008-08-07 | Siemens Aktiengesellschaft | Lamella collimator for radiotherapy device, has lamellae attached to linear drive with piezoactuator that is controllable by control device for displacing lamella in adjustment direction |
JP4997633B2 (en) * | 2007-04-11 | 2012-08-08 | 独立行政法人物質・材料研究機構 | Nano actuator |
US8143763B2 (en) | 2009-05-29 | 2012-03-27 | Rhk Technology, Inc. | Linear piezoelectric nano-positioner |
DE102012202945A1 (en) | 2011-03-14 | 2012-12-13 | Smaract Gmbh | Method for controlling an inertial drive |
WO2012130555A1 (en) | 2011-03-30 | 2012-10-04 | Smaract Gmbh | Method for actuating a multi-actuator drive device |
TWI472471B (en) * | 2011-06-03 | 2015-02-11 | Academia Sinica | Multi-axes actuating apparatus |
KR20130088479A (en) | 2012-01-31 | 2013-08-08 | 삼성전자주식회사 | Slip-stick type piezoelectric actuator |
DE102012004294A1 (en) | 2012-03-02 | 2013-09-05 | SmarAct Holding GmbH | Method for controlling a multi-actuator drive |
DE102012004401A1 (en) | 2012-03-02 | 2013-09-05 | SmarAct Holding GmbH | Method for controlling a multi-actuator drive |
DE102012221892B4 (en) | 2012-11-29 | 2016-05-19 | Picofine GmbH | Drive device and method for linear or rotary positioning |
KR101920723B1 (en) | 2012-12-10 | 2019-02-14 | 삼성전자주식회사 | Piezoelectric liner actuator |
CN103427703A (en) * | 2013-07-11 | 2013-12-04 | 南京邮电大学 | Miniature nanomotor based on shearing piezoelectric effect |
EP2916450B1 (en) | 2014-03-03 | 2017-06-28 | Picofine GmbH | Drive device and method for the production of a guided, linear or rotational movement |
DE102014014997B4 (en) | 2014-10-09 | 2018-05-17 | Attocube Systems Ag | Stick-slip drive, in particular piezo-actuated inertial drive |
DE102014221001A1 (en) | 2014-10-16 | 2016-04-21 | Picofine GmbH | Drive device and method for linear and / or rotational positioning |
US10090781B2 (en) * | 2016-01-14 | 2018-10-02 | Modus Medical Devices Inc. | Piezoelectric motor assembly |
DE102017127745B4 (en) | 2017-11-23 | 2020-10-15 | Picofine GmbH | Pre-loaded inertial drive |
DE102021103462A1 (en) | 2021-02-15 | 2022-08-18 | SmarAct Holding GmbH | Device and method for linear or rotary positioning |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3006973C2 (en) * | 1980-02-25 | 1982-06-09 | Siemens AG, 1000 Berlin und 8000 München | Arrangement for executing a controllable linear movement |
JPS58139681A (en) * | 1982-02-09 | 1983-08-19 | Toshiba Corp | Rotary fine moving mechanism |
DE3511447A1 (en) * | 1984-06-01 | 1985-12-05 | Jenoptik Jena Gmbh, Ddr 6900 Jena | Piezo-drive having contact-pressure force deflection and oscillation-system guidance |
US4874979A (en) * | 1988-10-03 | 1989-10-17 | Burleigh Instruments, Inc. | Electromechanical translation apparatus |
-
1992
- 1992-03-16 GB GB929205665A patent/GB9205665D0/en active Pending
-
1993
- 1993-03-16 WO PCT/GB1993/000539 patent/WO1993019494A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO1993019494A1 (en) | 1993-09-30 |
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