GB9205665D0 - Piezo-electric motor - Google Patents

Piezo-electric motor

Info

Publication number
GB9205665D0
GB9205665D0 GB929205665A GB9205665A GB9205665D0 GB 9205665 D0 GB9205665 D0 GB 9205665D0 GB 929205665 A GB929205665 A GB 929205665A GB 9205665 A GB9205665 A GB 9205665A GB 9205665 D0 GB9205665 D0 GB 9205665D0
Authority
GB
United Kingdom
Prior art keywords
piezo
electric motor
motor
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB929205665A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fisons Ltd
Original Assignee
Fisons Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fisons Ltd filed Critical Fisons Ltd
Priority to GB929205665A priority Critical patent/GB9205665D0/en
Publication of GB9205665D0 publication Critical patent/GB9205665D0/en
Priority to PCT/GB1993/000539 priority patent/WO1993019494A1/en
Pending legal-status Critical Current

Links

GB929205665A 1992-03-16 1992-03-16 Piezo-electric motor Pending GB9205665D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB929205665A GB9205665D0 (en) 1992-03-16 1992-03-16 Piezo-electric motor
PCT/GB1993/000539 WO1993019494A1 (en) 1992-03-16 1993-03-16 Piezoelectric motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929205665A GB9205665D0 (en) 1992-03-16 1992-03-16 Piezo-electric motor

Publications (1)

Publication Number Publication Date
GB9205665D0 true GB9205665D0 (en) 1992-04-29

Family

ID=10712204

Family Applications (1)

Application Number Title Priority Date Filing Date
GB929205665A Pending GB9205665D0 (en) 1992-03-16 1992-03-16 Piezo-electric motor

Country Status (2)

Country Link
GB (1) GB9205665D0 (en)
WO (1) WO1993019494A1 (en)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2735923B1 (en) * 1995-06-23 1997-08-29 Suisse Electronique Microtech VERY HIGH PRECISION PIEZOELECTRIC ACTUATOR
DE19710601C2 (en) * 1997-03-14 1999-05-20 Univ Magdeburg Tech Motion generator
EP1311007A1 (en) * 2001-11-07 2003-05-14 ASML Netherlands B.V. Piezoelectric actuator, lithographic apparatus and device manufacturing method
AU2002354358A1 (en) * 2001-11-23 2003-06-10 Ecicm B.V. Method and devices for driving a body
US6849989B2 (en) 2002-10-31 2005-02-01 Andreas Schmid Translation and rotation positioning motor
WO2005114825A1 (en) * 2004-05-20 2005-12-01 Japan Science And Technology Agency Method and device for precisely resisting and moving high load
US7646137B2 (en) * 2004-06-11 2010-01-12 Fujinon Corporation Actuator and its control method and lens device
EP1693906B1 (en) * 2005-02-17 2007-08-01 Agie Sa Piezoelectric driving element
DE102005023988B4 (en) * 2005-05-20 2007-03-01 Universität Hamburg Piezoelectric motor
DE102008004867A1 (en) 2007-01-25 2008-08-07 Siemens Aktiengesellschaft Lamella collimator for radiotherapy device, has lamellae attached to linear drive with piezoactuator that is controllable by control device for displacing lamella in adjustment direction
JP4997633B2 (en) * 2007-04-11 2012-08-08 独立行政法人物質・材料研究機構 Nano actuator
US8143763B2 (en) 2009-05-29 2012-03-27 Rhk Technology, Inc. Linear piezoelectric nano-positioner
DE102012202945A1 (en) 2011-03-14 2012-12-13 Smaract Gmbh Method for controlling an inertial drive
WO2012130555A1 (en) 2011-03-30 2012-10-04 Smaract Gmbh Method for actuating a multi-actuator drive device
TWI472471B (en) * 2011-06-03 2015-02-11 Academia Sinica Multi-axes actuating apparatus
KR20130088479A (en) 2012-01-31 2013-08-08 삼성전자주식회사 Slip-stick type piezoelectric actuator
DE102012004294A1 (en) 2012-03-02 2013-09-05 SmarAct Holding GmbH Method for controlling a multi-actuator drive
DE102012004401A1 (en) 2012-03-02 2013-09-05 SmarAct Holding GmbH Method for controlling a multi-actuator drive
DE102012221892B4 (en) 2012-11-29 2016-05-19 Picofine GmbH Drive device and method for linear or rotary positioning
KR101920723B1 (en) 2012-12-10 2019-02-14 삼성전자주식회사 Piezoelectric liner actuator
CN103427703A (en) * 2013-07-11 2013-12-04 南京邮电大学 Miniature nanomotor based on shearing piezoelectric effect
EP2916450B1 (en) 2014-03-03 2017-06-28 Picofine GmbH Drive device and method for the production of a guided, linear or rotational movement
DE102014014997B4 (en) 2014-10-09 2018-05-17 Attocube Systems Ag Stick-slip drive, in particular piezo-actuated inertial drive
DE102014221001A1 (en) 2014-10-16 2016-04-21 Picofine GmbH Drive device and method for linear and / or rotational positioning
US10090781B2 (en) * 2016-01-14 2018-10-02 Modus Medical Devices Inc. Piezoelectric motor assembly
DE102017127745B4 (en) 2017-11-23 2020-10-15 Picofine GmbH Pre-loaded inertial drive
DE102021103462A1 (en) 2021-02-15 2022-08-18 SmarAct Holding GmbH Device and method for linear or rotary positioning

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3006973C2 (en) * 1980-02-25 1982-06-09 Siemens AG, 1000 Berlin und 8000 München Arrangement for executing a controllable linear movement
JPS58139681A (en) * 1982-02-09 1983-08-19 Toshiba Corp Rotary fine moving mechanism
DE3511447A1 (en) * 1984-06-01 1985-12-05 Jenoptik Jena Gmbh, Ddr 6900 Jena Piezo-drive having contact-pressure force deflection and oscillation-system guidance
US4874979A (en) * 1988-10-03 1989-10-17 Burleigh Instruments, Inc. Electromechanical translation apparatus

Also Published As

Publication number Publication date
WO1993019494A1 (en) 1993-09-30

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