GB9106138D0 - Mirrors - Google Patents

Mirrors

Info

Publication number
GB9106138D0
GB9106138D0 GB919106138A GB9106138A GB9106138D0 GB 9106138 D0 GB9106138 D0 GB 9106138D0 GB 919106138 A GB919106138 A GB 919106138A GB 9106138 A GB9106138 A GB 9106138A GB 9106138 D0 GB9106138 D0 GB 9106138D0
Authority
GB
United Kingdom
Prior art keywords
mirrors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB919106138A
Other versions
GB2242995B (en
GB2242995A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Publication of GB9106138D0 publication Critical patent/GB9106138D0/en
Publication of GB2242995A publication Critical patent/GB2242995A/en
Application granted granted Critical
Publication of GB2242995B publication Critical patent/GB2242995B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
GB9106138A 1990-03-22 1991-03-22 Saddle toroid mirror array Expired - Fee Related GB2242995B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB909006493A GB9006493D0 (en) 1990-03-22 1990-03-22 Mirrors

Publications (3)

Publication Number Publication Date
GB9106138D0 true GB9106138D0 (en) 1991-05-08
GB2242995A GB2242995A (en) 1991-10-16
GB2242995B GB2242995B (en) 1993-12-22

Family

ID=10673099

Family Applications (2)

Application Number Title Priority Date Filing Date
GB909006493A Pending GB9006493D0 (en) 1990-03-22 1990-03-22 Mirrors
GB9106138A Expired - Fee Related GB2242995B (en) 1990-03-22 1991-03-22 Saddle toroid mirror array

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB909006493A Pending GB9006493D0 (en) 1990-03-22 1990-03-22 Mirrors

Country Status (4)

Country Link
EP (1) EP0521083A1 (en)
JP (1) JPH05508909A (en)
GB (2) GB9006493D0 (en)
WO (1) WO1991014973A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5439781A (en) * 1993-05-10 1995-08-08 At&T Corp. Device fabrication entailing synchrotron radiation
EP1037113A3 (en) * 1999-03-12 2003-09-10 ASML Netherlands B.V. Illumination system for extreme ultraviolet radiation and its application in lithographic apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB512319A (en) * 1938-01-25 1939-09-01 Alfred Whitaker Improvements in or relating to apparatus adapted to radiate energy and reflectors therefor
US4538886A (en) * 1983-04-19 1985-09-03 Stellar Energy Ststems, Inc. Circular arc solar concentrator
GB2210736B (en) * 1987-10-06 1991-10-09 Raychem Corp Re-enterable enclosure around splice
ATE121555T1 (en) * 1988-03-11 1995-05-15 Rosser Roy J OPTICAL DEVICES AND METHODS FOR THEIR PRODUCTION.

Also Published As

Publication number Publication date
EP0521083A1 (en) 1993-01-07
GB2242995B (en) 1993-12-22
GB9006493D0 (en) 1990-05-23
GB2242995A (en) 1991-10-16
JPH05508909A (en) 1993-12-09
WO1991014973A1 (en) 1991-10-03

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19970322