GB9010638D0 - Photon assisted cvd apparatus and method - Google Patents

Photon assisted cvd apparatus and method

Info

Publication number
GB9010638D0
GB9010638D0 GB909010638A GB9010638A GB9010638D0 GB 9010638 D0 GB9010638 D0 GB 9010638D0 GB 909010638 A GB909010638 A GB 909010638A GB 9010638 A GB9010638 A GB 9010638A GB 9010638 D0 GB9010638 D0 GB 9010638D0
Authority
GB
United Kingdom
Prior art keywords
cvd apparatus
assisted cvd
photon assisted
photon
cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB909010638A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Priority to GB909010638A priority Critical patent/GB9010638D0/en
Publication of GB9010638D0 publication Critical patent/GB9010638D0/en
Priority to PCT/GB1991/000723 priority patent/WO1991018129A1/en
Pending legal-status Critical Current

Links

GB909010638A 1990-05-11 1990-05-11 Photon assisted cvd apparatus and method Pending GB9010638D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB909010638A GB9010638D0 (en) 1990-05-11 1990-05-11 Photon assisted cvd apparatus and method
PCT/GB1991/000723 WO1991018129A1 (en) 1990-05-11 1991-05-07 Photon assisted cvd apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB909010638A GB9010638D0 (en) 1990-05-11 1990-05-11 Photon assisted cvd apparatus and method

Publications (1)

Publication Number Publication Date
GB9010638D0 true GB9010638D0 (en) 1990-07-04

Family

ID=10675862

Family Applications (1)

Application Number Title Priority Date Filing Date
GB909010638A Pending GB9010638D0 (en) 1990-05-11 1990-05-11 Photon assisted cvd apparatus and method

Country Status (2)

Country Link
GB (1) GB9010638D0 (en)
WO (1) WO1991018129A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020511000A (en) 2017-02-24 2020-04-09 ファースト・ソーラー・インコーポレーテッド Doped photovoltaic semiconductor layer and manufacturing method
FI129557B (en) * 2019-11-28 2022-04-29 Picosun Oy Substrate processing apparatus and method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166032A (en) * 1984-02-09 1985-08-29 Mitsubishi Electric Corp Device for forming film utilizing photochemical reaction
JPS61192339A (en) * 1985-02-21 1986-08-26 Agency Of Ind Science & Technol Photochemical reaction apparatus

Also Published As

Publication number Publication date
WO1991018129A1 (en) 1991-11-28

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