GB8912526D0 - Pattern processing on tin oxide films - Google Patents

Pattern processing on tin oxide films

Info

Publication number
GB8912526D0
GB8912526D0 GB898912526A GB8912526A GB8912526D0 GB 8912526 D0 GB8912526 D0 GB 8912526D0 GB 898912526 A GB898912526 A GB 898912526A GB 8912526 A GB8912526 A GB 8912526A GB 8912526 D0 GB8912526 D0 GB 8912526D0
Authority
GB
United Kingdom
Prior art keywords
tin oxide
oxide films
pattern processing
pattern
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB898912526A
Other versions
GB2233286A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ANDERSON J
LAVERTY S
MAGUIRE P
MCLAUGHLIN J
SHIELDS J
Original Assignee
ANDERSON J
LAVERTY S
MAGUIRE P
MCLAUGHLIN J
SHIELDS J
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ANDERSON J, LAVERTY S, MAGUIRE P, MCLAUGHLIN J, SHIELDS J filed Critical ANDERSON J
Priority to GB8912526A priority Critical patent/GB2233286A/en
Publication of GB8912526D0 publication Critical patent/GB8912526D0/en
Publication of GB2233286A publication Critical patent/GB2233286A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/53After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete
    • C04B41/5338Etching
    • C04B41/5346Dry etching
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/91After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics involving the removal of part of the materials of the treated articles, e.g. etching
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/313Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being gas discharge devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Drying Of Semiconductors (AREA)
GB8912526A 1989-06-01 1989-06-01 Pattern processing on tin oxide films Withdrawn GB2233286A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8912526A GB2233286A (en) 1989-06-01 1989-06-01 Pattern processing on tin oxide films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8912526A GB2233286A (en) 1989-06-01 1989-06-01 Pattern processing on tin oxide films

Publications (2)

Publication Number Publication Date
GB8912526D0 true GB8912526D0 (en) 1989-07-19
GB2233286A GB2233286A (en) 1991-01-09

Family

ID=10657672

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8912526A Withdrawn GB2233286A (en) 1989-06-01 1989-06-01 Pattern processing on tin oxide films

Country Status (1)

Country Link
GB (1) GB2233286A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0652585A1 (en) * 1993-11-02 1995-05-10 Leybold Aktiengesellschaft Process and device for etching thin layers, preferably Indium-Tin-Oxide layers

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826603B2 (en) * 1976-09-01 1983-06-03 日電バリアン株式会社 Plasma etching method for transparent conductive film

Also Published As

Publication number Publication date
GB2233286A (en) 1991-01-09

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)