GB8816725D0 - Pulsed plasma apparatus & process - Google Patents

Pulsed plasma apparatus & process

Info

Publication number
GB8816725D0
GB8816725D0 GB888816725A GB8816725A GB8816725D0 GB 8816725 D0 GB8816725 D0 GB 8816725D0 GB 888816725 A GB888816725 A GB 888816725A GB 8816725 A GB8816725 A GB 8816725A GB 8816725 D0 GB8816725 D0 GB 8816725D0
Authority
GB
United Kingdom
Prior art keywords
plasma apparatus
pulsed plasma
pulsed
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB888816725A
Other versions
GB2208656B (en
GB2208656A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
STC PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB858516537A external-priority patent/GB8516537D0/en
Application filed by STC PLC filed Critical STC PLC
Priority to GB8816725A priority Critical patent/GB2208656B/en
Publication of GB8816725D0 publication Critical patent/GB8816725D0/en
Publication of GB2208656A publication Critical patent/GB2208656A/en
Application granted granted Critical
Publication of GB2208656B publication Critical patent/GB2208656B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
GB8816725A 1985-06-29 1986-06-27 Pulsed radio frequency plasma apparatus and process Expired - Fee Related GB2208656B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8816725A GB2208656B (en) 1985-06-29 1986-06-27 Pulsed radio frequency plasma apparatus and process

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB858516537A GB8516537D0 (en) 1985-06-29 1985-06-29 Pulsed plasma apparatus
GB8615825A GB2178062B (en) 1985-06-29 1986-06-27 Pulsed plasma process and apparatus
GB8816725A GB2208656B (en) 1985-06-29 1986-06-27 Pulsed radio frequency plasma apparatus and process

Publications (3)

Publication Number Publication Date
GB8816725D0 true GB8816725D0 (en) 1988-08-17
GB2208656A GB2208656A (en) 1989-04-12
GB2208656B GB2208656B (en) 1990-01-17

Family

ID=26289436

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8816725A Expired - Fee Related GB2208656B (en) 1985-06-29 1986-06-27 Pulsed radio frequency plasma apparatus and process

Country Status (1)

Country Link
GB (1) GB2208656B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4137606C1 (en) * 1991-11-15 1992-07-30 Schott Glaswerke, 6500 Mainz, De
GB0108738D0 (en) 2001-04-06 2001-05-30 Bae Systems Plc Turbulent flow drag reduction
DE102007021386A1 (en) * 2007-05-04 2008-11-06 Christof-Herbert Diener Short-cycle low-pressure plasma system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1080562A (en) * 1977-02-10 1980-07-01 Frederick D. King Method of and apparatus for manufacturing an optical fibre with plasma activated deposition in a tube
GB2070340B (en) * 1980-02-07 1983-10-12 Shinetsu Chemical Co Method for surface properties of a disclike shaped article of a vinyl chloridebased resin
DE3010314C2 (en) * 1980-03-18 1982-01-07 Beerwald, Hans, Dr.Rer.Nat., 5370 Kall Process for the internal coating of electrically non-conductive pipes by means of gas discharges
NL8103648A (en) * 1981-08-03 1983-03-01 Philips Nv METHOD FOR MANUFACTURING FORMS FOR DRAWING OPTICAL FIBERS AND FORMS ACCORDING TO THIS METHOD AND FOR APPARATUS FOR MANUFACTURING OPTICAL FIBERS
GB2105729B (en) * 1981-09-15 1985-06-12 Itt Ind Ltd Surface processing of a substrate material
DE3147986C2 (en) * 1981-12-04 1992-02-27 Leybold-Heraeus GmbH, 5000 Köln Device for generating a microwave plasma for the treatment of substrates, in particular for the plasma polymerization of monomers

Also Published As

Publication number Publication date
GB2208656B (en) 1990-01-17
GB2208656A (en) 1989-04-12

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20040627