GB863881A - Improvements in or relating to methods of coating cylindrical members by thermal evaporation in a vacuum and apparatus for carrying out such methods - Google Patents

Improvements in or relating to methods of coating cylindrical members by thermal evaporation in a vacuum and apparatus for carrying out such methods

Info

Publication number
GB863881A
GB863881A GB263758A GB263758A GB863881A GB 863881 A GB863881 A GB 863881A GB 263758 A GB263758 A GB 263758A GB 263758 A GB263758 A GB 263758A GB 863881 A GB863881 A GB 863881A
Authority
GB
United Kingdom
Prior art keywords
members
cage
metal
filament
cylindrical members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB263758A
Inventor
Jacob Riseman
Dorothy Morse Hoffman
Benjamin Solow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Resistance Co
Original Assignee
International Resistance Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Resistance Co filed Critical International Resistance Co
Priority to GB263758A priority Critical patent/GB863881A/en
Publication of GB863881A publication Critical patent/GB863881A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

863,881. Coating by vapour deposition. INTERNATIONAL RESISTANCE CO. Jan. 27, 1958, No. 2637/58. Class 82(2) In apparatus for coating cylindrical members by thermal evaporation in a vacuum, a rotatable support is located in an evacuable chamber and has means for rotatably mounting the cylindrical members thereon at equal distances from and parallel to the axis of rotation of the support, and a coated wire filament is mounted along or parallel to the axis of the support and co-extensive with the cylindrical members and is provided with heating means so as to evaporate the coating therefrom. As shown, cage 10 is supported for rotation upon pairs of wheels 13, 13 and 14, 14, and cylindrical members 15 on which metal is to be deposited, are mounted on supports 16 of the cage. The cage is rotated and filament 17 heated to the evaporation temperature of the metal coated thereon so that metal vapour flows in all directions to condense upon members 15 and upon plate 20 which indicates the thickness of the coatings by measurement of its resistance. Supports 16, which are of stiff wire and fitted in members 15 so that there is no relative movement therebetween, are mounted between sides 11 of cage 10 in opposed spiral slots 25. The lower side of. one end of each support is weighted so that as cage 10 rotates, each support rotates about its own axis through the same angle as the cage whereby all points of members 15 are evenly exposed to filament 17. During evaporation, cage 10 is rotated in the direction of arrow 64 so that supports 16 are retained in slots 25. To unload members 15 after evaporation, cage 10 is rotated in the direction of arrow 65 so that supports 16 drop out of slots 25. To ensure that members 15 are provided with coatings which are uniform from end to end, the central portion of main heater wire 34 (Fig. 7) of filament 17 is helically wound with wire 36 before covering it with coating metal 35. Thus when filament 17 is heated, the central portion will be cooler than the rest of wire 34 so that a smaller amount of metal 35 will be evaporated therefrom. The apparatus may be used for making resistors by metallizing glass or ceramic cylindrical members and then applying terminal coatings after masking the central portions of the members. If necessary, a metal which adheres well to the resistance film and the terminating metal is interposed.
GB263758A 1958-01-27 1958-01-27 Improvements in or relating to methods of coating cylindrical members by thermal evaporation in a vacuum and apparatus for carrying out such methods Expired GB863881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB263758A GB863881A (en) 1958-01-27 1958-01-27 Improvements in or relating to methods of coating cylindrical members by thermal evaporation in a vacuum and apparatus for carrying out such methods

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB263758A GB863881A (en) 1958-01-27 1958-01-27 Improvements in or relating to methods of coating cylindrical members by thermal evaporation in a vacuum and apparatus for carrying out such methods

Publications (1)

Publication Number Publication Date
GB863881A true GB863881A (en) 1961-03-29

Family

ID=9743069

Family Applications (1)

Application Number Title Priority Date Filing Date
GB263758A Expired GB863881A (en) 1958-01-27 1958-01-27 Improvements in or relating to methods of coating cylindrical members by thermal evaporation in a vacuum and apparatus for carrying out such methods

Country Status (1)

Country Link
GB (1) GB863881A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1295958B (en) * 1965-05-03 1969-05-22 American Components Inc Method and device for vacuum evaporation of metal layers on bulk material
GB2290801A (en) * 1994-06-30 1996-01-10 Agency Ind Science Techn Producing thin film using high gravity field

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1295958B (en) * 1965-05-03 1969-05-22 American Components Inc Method and device for vacuum evaporation of metal layers on bulk material
GB2290801A (en) * 1994-06-30 1996-01-10 Agency Ind Science Techn Producing thin film using high gravity field
US5635241A (en) * 1994-06-30 1997-06-03 Agency Of Industrial Science And Technology Method for producing thin film and apparatus therefor
GB2290801B (en) * 1994-06-30 1998-11-25 Agency Ind Science Techn Method for producing thin film and apparatus therefor

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