GB8627258D0 - Flow control device - Google Patents

Flow control device

Info

Publication number
GB8627258D0
GB8627258D0 GB868627258A GB8627258A GB8627258D0 GB 8627258 D0 GB8627258 D0 GB 8627258D0 GB 868627258 A GB868627258 A GB 868627258A GB 8627258 A GB8627258 A GB 8627258A GB 8627258 D0 GB8627258 D0 GB 8627258D0
Authority
GB
United Kingdom
Prior art keywords
control device
flow control
flow
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB868627258A
Other versions
GB2185129A (en
GB2185129B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP25484185A external-priority patent/JPS62115826A/en
Priority claimed from JP25483985A external-priority patent/JPS62115824A/en
Application filed by Canon Inc filed Critical Canon Inc
Publication of GB8627258D0 publication Critical patent/GB8627258D0/en
Publication of GB2185129A publication Critical patent/GB2185129A/en
Application granted granted Critical
Publication of GB2185129B publication Critical patent/GB2185129B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • H05H1/16—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
    • H05H1/18—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields wherein the fields oscillate at very high frequency, e.g. in the microwave range, e.g. using cyclotron resonance
GB8627258A 1985-11-15 1986-11-14 Flow control device for fine particle stream Expired GB2185129B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25484185A JPS62115826A (en) 1985-11-15 1985-11-15 Fine particle flow controller
JP25483985A JPS62115824A (en) 1985-11-15 1985-11-15 Fine particle flow controller

Publications (3)

Publication Number Publication Date
GB8627258D0 true GB8627258D0 (en) 1986-12-17
GB2185129A GB2185129A (en) 1987-07-08
GB2185129B GB2185129B (en) 1989-10-11

Family

ID=26541873

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8627258A Expired GB2185129B (en) 1985-11-15 1986-11-14 Flow control device for fine particle stream

Country Status (3)

Country Link
DE (1) DE3638942A1 (en)
FR (1) FR2591002B1 (en)
GB (1) GB2185129B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3926023A1 (en) * 1988-09-06 1990-03-15 Schott Glaswerke CVD COATING METHOD FOR PRODUCING LAYERS AND DEVICE FOR CARRYING OUT THE METHOD
US5043548A (en) * 1989-02-08 1991-08-27 General Electric Company Axial flow laser plasma spraying
WO1991019016A1 (en) * 1990-05-19 1991-12-12 Institut Teoreticheskoi I Prikladnoi Mekhaniki Sibirskogo Otdelenia Akademii Nauk Sssr Method and device for coating
FR2664294B1 (en) * 1990-07-06 1992-10-23 Plasmametal METHOD FOR METALLIZING A SURFACE.
DE19513918C1 (en) * 1995-04-12 1996-11-07 Fraunhofer Ges Forschung Method of coating submicrometer structures for highly integrated circuits
JP6109796B2 (en) 2014-09-16 2017-04-05 三菱日立パワーシステムズ株式会社 Powder conveying device and char recovery device

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1775964C3 (en) * 1965-08-23 1974-08-08 Hans Clearwater Fla. Ernst (V.St.A.) Valve for controlling a flow of a flowable material containing magnetizable particles. Eliminated from: 1553038
US3508564A (en) * 1967-04-10 1970-04-28 Trw Inc Electro-fluidic active devices
US3547074A (en) * 1967-04-13 1970-12-15 Block Engineering Apparatus for forming microelements
US3904505A (en) * 1970-03-20 1975-09-09 Space Sciences Inc Apparatus for film deposition
JPS523583A (en) * 1975-06-27 1977-01-12 Toshinori Takagi Crystal film forming process
CA1109545A (en) * 1976-05-08 1981-09-22 Nissan Motor Co., Ltd. Electrostatic apparatus for controlling flow rate of liquid
GB1582641A (en) * 1976-06-01 1981-01-14 Nissan Motor Fluid flow rate control apparatus
JPS52147325A (en) * 1976-06-01 1977-12-07 Nissan Motor Flow quantity control equipment
US4175029A (en) * 1978-03-16 1979-11-20 Dmitriev Jury A Apparatus for ion plasma coating of articles
US4393333A (en) * 1979-12-10 1983-07-12 Hitachi, Ltd. Microwave plasma ion source
US4395440A (en) * 1980-10-09 1983-07-26 Matsushita Electric Industrial Co., Ltd. Method of and apparatus for manufacturing ultrafine particle film
AU8288282A (en) * 1981-05-04 1982-11-11 Optical Coating Laboratory, Inc. Production and utilization of activated molecular beams
JPS6130036A (en) * 1984-07-23 1986-02-12 Fujitsu Ltd Microwave plasma processing apparatus
JPS61177366A (en) * 1985-01-31 1986-08-09 Sharp Corp Production of ultrafine particle dispersed substrate

Also Published As

Publication number Publication date
DE3638942C2 (en) 1988-05-26
FR2591002A1 (en) 1987-06-05
DE3638942A1 (en) 1987-05-21
GB2185129A (en) 1987-07-08
FR2591002B1 (en) 1995-10-27
GB2185129B (en) 1989-10-11

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20061113