GB8604615D0 - Micro-displacement measuring apparatus - Google Patents

Micro-displacement measuring apparatus

Info

Publication number
GB8604615D0
GB8604615D0 GB868604615A GB8604615A GB8604615D0 GB 8604615 D0 GB8604615 D0 GB 8604615D0 GB 868604615 A GB868604615 A GB 868604615A GB 8604615 A GB8604615 A GB 8604615A GB 8604615 D0 GB8604615 D0 GB 8604615D0
Authority
GB
United Kingdom
Prior art keywords
micro
measuring apparatus
displacement measuring
displacement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB868604615A
Other versions
GB2172700A (en
GB2172700B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of GB8604615D0 publication Critical patent/GB8604615D0/en
Publication of GB2172700A publication Critical patent/GB2172700A/en
Application granted granted Critical
Publication of GB2172700B publication Critical patent/GB2172700B/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Transform (AREA)
  • Measurement Of Optical Distance (AREA)
GB08604615A 1985-02-28 1986-02-25 Micro-displacement measuring apparatus Expired GB2172700B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60041754A JPH0690009B2 (en) 1985-02-28 1985-02-28 Micro displacement measurement method using semiconductor laser

Publications (3)

Publication Number Publication Date
GB8604615D0 true GB8604615D0 (en) 1986-04-03
GB2172700A GB2172700A (en) 1986-09-24
GB2172700B GB2172700B (en) 1988-07-20

Family

ID=12617204

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08604615A Expired GB2172700B (en) 1985-02-28 1986-02-25 Micro-displacement measuring apparatus

Country Status (4)

Country Link
US (1) US4806778A (en)
JP (1) JPH0690009B2 (en)
DE (1) DE3606090C2 (en)
GB (1) GB2172700B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4824240A (en) * 1986-04-15 1989-04-25 Hughes Aircraft Company Internal laser interferometer
DE3943470A1 (en) * 1989-05-29 1990-12-13 Rainer Thiessen OBJECT PROXIMITY AND DROP DETECTOR
DE3943469A1 (en) * 1989-05-29 1991-02-21 Rainer Thiessen Non-marking RPM measurement at smooth shafts - determining angular deviation alpha of reflector of external resonator of laser-sensor compared to vertical of optical axis
DE3917388C1 (en) * 1989-05-29 1990-11-29 Rainer 8000 Muenchen De Thiessen
DE3920716C1 (en) * 1989-06-24 1990-11-29 Wild Leitz Gmbh, 6330 Wetzlar, De
US5260562A (en) * 1989-09-29 1993-11-09 Regents Of The University Of California High-resolution light microscope using coherent light reflected from a target to modulate the power output from a laser
JP3618451B2 (en) * 1996-03-28 2005-02-09 オリンパス株式会社 Optical displacement sensor
DE19741122C2 (en) * 1997-09-12 2003-09-25 Forschungsverbund Berlin Ev Arrangement for measurement and structuring (near field arrangement)
US6313915B1 (en) * 1998-08-27 2001-11-06 Murata Manufacturing Co., Ltd. Displacement measuring method and apparatus
US6097552A (en) * 1999-05-27 2000-08-01 Polaroid Corporation Autofocus actuator device
US7549345B2 (en) * 2004-06-14 2009-06-23 Surface Technology Holdings, Ltd. Method and apparatus for sensing distortion
KR100737177B1 (en) * 2006-05-15 2007-07-10 경북대학교 산학협력단 Interferometer using vertical-cavity surface-emitting lasers

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1038140A (en) * 1962-11-22 1966-08-10 Nat Res Dev Measuring apparatus incorporating a laser
JPS5930233B2 (en) * 1976-12-21 1984-07-25 三菱電機株式会社 distance measuring device
JPS6047902A (en) * 1983-08-26 1985-03-15 Norito Suzuki Moving direction judging circuit
JPH0697261B2 (en) * 1984-06-01 1994-11-30 シャープ株式会社 Micro displacement measuring device using semiconductor laser

Also Published As

Publication number Publication date
GB2172700A (en) 1986-09-24
JPS61221614A (en) 1986-10-02
JPH0690009B2 (en) 1994-11-14
DE3606090A1 (en) 1987-01-29
DE3606090C2 (en) 1995-04-27
US4806778A (en) 1989-02-21
GB2172700B (en) 1988-07-20

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20060224