GB8405550D0 - Detector apparatus - Google Patents

Detector apparatus

Info

Publication number
GB8405550D0
GB8405550D0 GB848405550A GB8405550A GB8405550D0 GB 8405550 D0 GB8405550 D0 GB 8405550D0 GB 848405550 A GB848405550 A GB 848405550A GB 8405550 A GB8405550 A GB 8405550A GB 8405550 D0 GB8405550 D0 GB 8405550D0
Authority
GB
United Kingdom
Prior art keywords
detector apparatus
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB848405550A
Other versions
GB2159939A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Priority to GB08405550A priority Critical patent/GB2159939A/en
Publication of GB8405550D0 publication Critical patent/GB8405550D0/en
Priority to NL8500528A priority patent/NL8500528A/en
Priority to DE19853506812 priority patent/DE3506812A1/en
Priority to JP60037745A priority patent/JPS60228905A/en
Priority to FR8503123A priority patent/FR2563908A1/en
Publication of GB2159939A publication Critical patent/GB2159939A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
GB08405550A 1984-03-02 1984-03-02 Detector apparatus Withdrawn GB2159939A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB08405550A GB2159939A (en) 1984-03-02 1984-03-02 Detector apparatus
NL8500528A NL8500528A (en) 1984-03-02 1985-02-25 DETECTOR DEVICE.
DE19853506812 DE3506812A1 (en) 1984-03-02 1985-02-27 DETECTOR DEVICE
JP60037745A JPS60228905A (en) 1984-03-02 1985-02-28 Duplex type detector device for optical alignment
FR8503123A FR2563908A1 (en) 1984-03-02 1985-03-04 APPARATUS AND METHOD FOR DETECTING MARKING ON A SURFACE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08405550A GB2159939A (en) 1984-03-02 1984-03-02 Detector apparatus

Publications (2)

Publication Number Publication Date
GB8405550D0 true GB8405550D0 (en) 1984-04-04
GB2159939A GB2159939A (en) 1985-12-11

Family

ID=10557494

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08405550A Withdrawn GB2159939A (en) 1984-03-02 1984-03-02 Detector apparatus

Country Status (5)

Country Link
JP (1) JPS60228905A (en)
DE (1) DE3506812A1 (en)
FR (1) FR2563908A1 (en)
GB (1) GB2159939A (en)
NL (1) NL8500528A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3621961A1 (en) * 1986-07-01 1988-01-14 Wenglorz Sensoric Gmbh Reflected-light barrier for the contactless tracking of an instrument
US5993681A (en) * 1998-05-08 1999-11-30 Lucent Technology, Inc. Method and apparatus for aiming a spray etcher nozzle

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB892973A (en) * 1957-03-14 1962-04-04 Emi Ltd Improvements relating to electrical positioning apparatus
US3335281A (en) * 1963-09-24 1967-08-08 Spartanics Symmetrically saturated position servo control with dual amplitude optical offset scanning
BE685048A (en) * 1965-08-17 1967-01-16
DE2539206A1 (en) * 1975-09-03 1977-03-17 Siemens Ag METHOD FOR AUTOMATIC ADJUSTMENT OF SEMI-CONDUCTOR DISCS
DE2622283A1 (en) * 1976-05-19 1977-12-08 Bosch Gmbh Robert METHOD FOR LOCATING A SOLID PLATE AND SOLID PLATE FOR CARRYING OUT THE METHOD
DE2630209C3 (en) * 1976-07-05 1981-02-12 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Electro-optical sensing device
DE2702448C2 (en) * 1977-01-20 1982-12-16 Siemens AG, 1000 Berlin und 8000 München Method for positioning a workpiece provided with a mark relative to a scanning field or to a mask
GB1560778A (en) * 1978-03-21 1980-02-06 Int Computers Ltd Methods of aligning articles
DE3116634A1 (en) * 1981-04-27 1982-11-11 Karl Süss KG, Präzisionsgeräte für Wissenschaft und Industrie - GmbH & Co, 8046 Garching Device for automatically adjusting planar objects having two reference points, in particular in the production of semiconductor components
GB2109538A (en) * 1981-11-02 1983-06-02 Philips Electronic Associated Electron beam alignment

Also Published As

Publication number Publication date
DE3506812A1 (en) 1985-09-26
JPS60228905A (en) 1985-11-14
NL8500528A (en) 1985-10-01
GB2159939A (en) 1985-12-11
FR2563908A1 (en) 1985-11-08

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)