GB741557A - Improvements relating to apparatus for measuring optical thicknesses - Google Patents

Improvements relating to apparatus for measuring optical thicknesses

Info

Publication number
GB741557A
GB741557A GB2654952A GB2654952A GB741557A GB 741557 A GB741557 A GB 741557A GB 2654952 A GB2654952 A GB 2654952A GB 2654952 A GB2654952 A GB 2654952A GB 741557 A GB741557 A GB 741557A
Authority
GB
United Kingdom
Prior art keywords
beams
image
strip
analyser
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2654952A
Inventor
James Dyson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to GB2654952A priority Critical patent/GB741557A/en
Publication of GB741557A publication Critical patent/GB741557A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/0016Technical microscopes, e.g. for inspection or measuring in industrial production processes

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

741,557. Optical apparatus. ASSOCIATED ELECTRICAL INDUSTRIES, Ltd. Nov. 23, 1953 [Oct. 22, 1952], No. 26549/52. Class 97 (1). Apparatus for measuring the optical thickness of a transparent object comprises a microscope having means dividing the illuminating beam into ordinary and extraordinary beams so that one passes through the object and the other by-passes the object, and means for combining the beams which have respectively passed through and by-passed the object so that they interfere and an analysing apparatus for measuring the phase difference between the two beams. As shown, the illuminating beam 5 is divided by a birefringent plate 2, for example of Iceland Spar, into an ordinary beam 6 by-passing the object 1 and an extraordinary beam 7 passing through it. The planes of polarization of the beams are interchanged by passage through a half-wave plate 4 and they are combined by a birefringent plate 3 similar to the plate 2. The combined beams are reflected by a concave spherical mirror 9 and by a semi-reflecting surface 10 to form an image of the object at the pole of the mirror 9 which is observed by the microscope objective 11. An analyser in the eyepiece renders the interference effects in the image of the object visible. To measure the phase difference between the beams within the image and outside the image a halfwave plate in the form of a narrow strip 12 is located in the image plane of the objective 11 with its principal directions coinciding with the planes of polarization of the beams 6 and 7 and extending into the field beyond the image of the object 1. A quarter-wave plate 13 converts these beams into circularly polarized beams with opposite senses of rotation the result being a linearly polarized beam the direction of polarization of which depends on the phase difference between the beams 6 and 7. An analyser 14 is provided, rotatable about a vertical axis, and is rotated until the intensity within the strip is equal to that outside the strip first for the portion of the strip covering the image and then for the portion extending into the field, the difference between the angular rotations of the analyser 14 indicating the optical thickness of the object. In a modification a quarter-wave plate is placed above the objective and the strip 12 replaced by a half-wave plate in the form of a lattice, a rotatable analyser again being provided.
GB2654952A 1952-10-22 1952-10-22 Improvements relating to apparatus for measuring optical thicknesses Expired GB741557A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2654952A GB741557A (en) 1952-10-22 1952-10-22 Improvements relating to apparatus for measuring optical thicknesses

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2654952A GB741557A (en) 1952-10-22 1952-10-22 Improvements relating to apparatus for measuring optical thicknesses

Publications (1)

Publication Number Publication Date
GB741557A true GB741557A (en) 1955-12-07

Family

ID=10245390

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2654952A Expired GB741557A (en) 1952-10-22 1952-10-22 Improvements relating to apparatus for measuring optical thicknesses

Country Status (1)

Country Link
GB (1) GB741557A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3146294A (en) * 1959-02-13 1964-08-25 American Optical Corp Interference microscope optical systems
US3345905A (en) * 1960-12-27 1967-10-10 Saint Gobain Apparatus for measuring phase differences in polarized light

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3146294A (en) * 1959-02-13 1964-08-25 American Optical Corp Interference microscope optical systems
US3345905A (en) * 1960-12-27 1967-10-10 Saint Gobain Apparatus for measuring phase differences in polarized light

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