GB449741A - Improvements in or relating to centrifugal apparatus for applying light-sensitive layers and the like - Google Patents

Improvements in or relating to centrifugal apparatus for applying light-sensitive layers and the like

Info

Publication number
GB449741A
GB449741A GB34501/35A GB3450135A GB449741A GB 449741 A GB449741 A GB 449741A GB 34501/35 A GB34501/35 A GB 34501/35A GB 3450135 A GB3450135 A GB 3450135A GB 449741 A GB449741 A GB 449741A
Authority
GB
United Kingdom
Prior art keywords
plate
relating
holder
sensitive layers
applying light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB34501/35A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RICHARD WALTER HOH
Original Assignee
RICHARD WALTER HOH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RICHARD WALTER HOH filed Critical RICHARD WALTER HOH
Publication of GB449741A publication Critical patent/GB449741A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • G03F7/162Coating on a rotating support, e.g. using a whirler or a spinner

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Of Micro-Capsules (AREA)

Abstract

<PICT:0449741/III/1> <PICT:0449741/III/2> Light - sensitive material is spread centrifugally upon a plate in a holder d formed by crossed arms on a rotary shaft g. The holder is encircled by a protective ring h which rotates with the plate holder d and catches the particles of material thrown off from the plate. The ring h may be of cylindrical form or of truncated conical form as shown. In a modification the ring consists of two truncated conical portions with their small ends abutting against each other in the plane of the plate.
GB34501/35A 1935-05-29 1935-12-12 Improvements in or relating to centrifugal apparatus for applying light-sensitive layers and the like Expired GB449741A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE449741X 1935-05-29

Publications (1)

Publication Number Publication Date
GB449741A true GB449741A (en) 1936-07-02

Family

ID=6538310

Family Applications (1)

Application Number Title Priority Date Filing Date
GB34501/35A Expired GB449741A (en) 1935-05-29 1935-12-12 Improvements in or relating to centrifugal apparatus for applying light-sensitive layers and the like

Country Status (1)

Country Link
GB (1) GB449741A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4033288A (en) * 1971-11-20 1977-07-05 Basf Aktiengesellschaft Apparatus for coating magnetic disks
FR2369881A1 (en) * 1976-11-08 1978-06-02 Ibm METHOD AND DEVICE FOR COATING BY CENTRIFUGATION TO AVOID LATERAL ACCUMULATIONS
US4108109A (en) * 1974-05-13 1978-08-22 Dynatech Corporation Blood filming apparatus
US5002799A (en) * 1988-09-29 1991-03-26 Mitsubishi Denki Kabushiki Kaisha Method for manufacturing anti-static cathode ray tubes
EP0454314A2 (en) * 1990-04-24 1991-10-30 MACHINE TECHNOLOGY INC., a New Jersey Corporation Method and apparatus for applying a layer of fluid material on a semiconductor wafer

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4033288A (en) * 1971-11-20 1977-07-05 Basf Aktiengesellschaft Apparatus for coating magnetic disks
US4108109A (en) * 1974-05-13 1978-08-22 Dynatech Corporation Blood filming apparatus
FR2369881A1 (en) * 1976-11-08 1978-06-02 Ibm METHOD AND DEVICE FOR COATING BY CENTRIFUGATION TO AVOID LATERAL ACCUMULATIONS
US5002799A (en) * 1988-09-29 1991-03-26 Mitsubishi Denki Kabushiki Kaisha Method for manufacturing anti-static cathode ray tubes
GB2224596B (en) * 1988-09-29 1993-01-27 Mitsubishi Electric Corp Method for manufacturing anti-static cathode ray tubes
EP0454314A2 (en) * 1990-04-24 1991-10-30 MACHINE TECHNOLOGY INC., a New Jersey Corporation Method and apparatus for applying a layer of fluid material on a semiconductor wafer
EP0454314A3 (en) * 1990-04-24 1992-03-25 Machine Technology Inc., A New Jersey Corporation Method and apparatus for applying a layer of fluid material on a semiconductor wafer

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