GB449741A - Improvements in or relating to centrifugal apparatus for applying light-sensitive layers and the like - Google Patents
Improvements in or relating to centrifugal apparatus for applying light-sensitive layers and the likeInfo
- Publication number
- GB449741A GB449741A GB34501/35A GB3450135A GB449741A GB 449741 A GB449741 A GB 449741A GB 34501/35 A GB34501/35 A GB 34501/35A GB 3450135 A GB3450135 A GB 3450135A GB 449741 A GB449741 A GB 449741A
- Authority
- GB
- United Kingdom
- Prior art keywords
- plate
- relating
- holder
- sensitive layers
- applying light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing Of Micro-Capsules (AREA)
Abstract
<PICT:0449741/III/1> <PICT:0449741/III/2> Light - sensitive material is spread centrifugally upon a plate in a holder d formed by crossed arms on a rotary shaft g. The holder is encircled by a protective ring h which rotates with the plate holder d and catches the particles of material thrown off from the plate. The ring h may be of cylindrical form or of truncated conical form as shown. In a modification the ring consists of two truncated conical portions with their small ends abutting against each other in the plane of the plate.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE449741X | 1935-05-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB449741A true GB449741A (en) | 1936-07-02 |
Family
ID=6538310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB34501/35A Expired GB449741A (en) | 1935-05-29 | 1935-12-12 | Improvements in or relating to centrifugal apparatus for applying light-sensitive layers and the like |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB449741A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4033288A (en) * | 1971-11-20 | 1977-07-05 | Basf Aktiengesellschaft | Apparatus for coating magnetic disks |
FR2369881A1 (en) * | 1976-11-08 | 1978-06-02 | Ibm | METHOD AND DEVICE FOR COATING BY CENTRIFUGATION TO AVOID LATERAL ACCUMULATIONS |
US4108109A (en) * | 1974-05-13 | 1978-08-22 | Dynatech Corporation | Blood filming apparatus |
US5002799A (en) * | 1988-09-29 | 1991-03-26 | Mitsubishi Denki Kabushiki Kaisha | Method for manufacturing anti-static cathode ray tubes |
EP0454314A2 (en) * | 1990-04-24 | 1991-10-30 | MACHINE TECHNOLOGY INC., a New Jersey Corporation | Method and apparatus for applying a layer of fluid material on a semiconductor wafer |
-
1935
- 1935-12-12 GB GB34501/35A patent/GB449741A/en not_active Expired
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4033288A (en) * | 1971-11-20 | 1977-07-05 | Basf Aktiengesellschaft | Apparatus for coating magnetic disks |
US4108109A (en) * | 1974-05-13 | 1978-08-22 | Dynatech Corporation | Blood filming apparatus |
FR2369881A1 (en) * | 1976-11-08 | 1978-06-02 | Ibm | METHOD AND DEVICE FOR COATING BY CENTRIFUGATION TO AVOID LATERAL ACCUMULATIONS |
US5002799A (en) * | 1988-09-29 | 1991-03-26 | Mitsubishi Denki Kabushiki Kaisha | Method for manufacturing anti-static cathode ray tubes |
GB2224596B (en) * | 1988-09-29 | 1993-01-27 | Mitsubishi Electric Corp | Method for manufacturing anti-static cathode ray tubes |
EP0454314A2 (en) * | 1990-04-24 | 1991-10-30 | MACHINE TECHNOLOGY INC., a New Jersey Corporation | Method and apparatus for applying a layer of fluid material on a semiconductor wafer |
EP0454314A3 (en) * | 1990-04-24 | 1992-03-25 | Machine Technology Inc., A New Jersey Corporation | Method and apparatus for applying a layer of fluid material on a semiconductor wafer |
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