GB2604649A

GB2604649A - Conduit system and method therefor

Info

Publication number: GB2604649A
Application number: GB2103437.6A
Authority: GB
Inventors: Richard Dean Julian; Shaw Helen; John Norrington Michael
Original assignee: Edwards Ltd
Current assignee: Edwards Ltd
Priority date: 2021-03-12
Filing date: 2021-03-12
Publication date: 2022-09-14
Also published as: GB202103437D0

Abstract

A conduit system, wherein: the conduit system comprises a plurality of conduit components including: one or more conduit sections 200; and a connector 202; the connector comprises a first end and a second end opposite to the first end; the connector is expandable and compressible such that a length of the connector between the first end and the second end may be varied; the one or more conduit sections and the connector are connected together to form a continuous conduit 106 for permitting the flow therethrough of a fluid. The method comprises: disconnecting two of the conduit components from each other; and compressing the connector 202, thereby to create a gap between the conduit components that have been disconnected from each other. An embodiment includes the system further comprises: one or more support members (e.g. bracket or clamp 208 and strut 210) coupled to one or more of the one or more conduit sections for supporting the conduit sections relative to a support structure (e.g. beam 206); wherein each support member comprises a low-friction portion (e.g. liner 412 (Fig 4A/4B)) in contact with the one or more of the one or more conduit sections coupled thereto.

Description

CONDUIT SYSTEM AND METHOD THEREFOR

FIELD OF THE INVENTION

The present invention relates to conduit systems comprising conduits, and methods therefor. Conduits include, but are not limited to, those fluid lines for use with vacuum pumping and/or abatement apparatuses. Methods include, but are not limited to, methods for gaining access to obstructed components within the conduit, and for performing inspection, servicing, maintenance, and/or repair of said components.

BACKGROUND

Vacuum pumping and abatement systems are used in varied and different technological fields, for example semiconductor fabrication. Typically, in said systems, vacuum pumping equipment is used to pump gas (e.g., gas from an industrial process) out of a particular location, and abatement equipment is used to abate (e.g., destroy or dispose of) undesirable substances (e.g., exhaust gas) which have been produced. Typically, an elongate fluid line, or "foreline", connects the vacuum pumping equipment and the location from which the gas is being pumped. The pumped gas is conveyed via this elongate fluid line.

SUMMARY OF INVENTION

In many applications, the fluid line via which pumped gas is conveyed is formed from discrete sections that are attached together. Seals or sealing members, such as 0-rings, may be disposed between adjacent sections of the fluid line to provide for a gas-tight sealing between section.

The present inventors have realised that inspection, servicing, maintenance, and/or repair of said sealing members, and other components, of the fluid input line is difficult, especially when the fluid input line is fully assembled. In particular, access to a given section of the fluid line tends to be prevented or opposed by adjacent sections of the fluid line attached thereto. Aspects of the present invention tend to address this deficiency. -2 -

In a first aspect, there is provided a method for use with a conduit system. The conduit system comprises a plurality of conduit components including one or more conduit sections and a connector. The connector comprises a first end and a second end opposite to the first end. The connector is expandable and compressible such that a length of the connector between the first end and the second end may be varied. The one or more conduit sections and the connector are connected together to form a continuous conduit for permitting the flow therethrough of a fluid. The method comprises disconnecting two of the conduit components from each other, and compressing the connector, thereby to create a gap between the conduit components that have been disconnected from each other.

The method may further comprise performing an operation on a further conduit component of the conduit system including accessing the further conduit component via the gap. The operation may be an operation selected from the group of operations consisting of inspection, servicing, maintenance, repair, and replacement. The further conduit component may be a sealing member (such as an 0-ring) for forming a seal between the conduit components that have been disconnected from each other. The method may further comprise, after performing the operation expanding the connector, thereby to close the gap between the conduit components that have been disconnected from each other, and reconnecting said two conduit components to each other.

The connector may comprise: a first flange at or proximate to the first end of the connector; a second flange at or proximate to the second end of the connector; an expandable and compressible portion coupled between the first flange and the second flange; and an actuation means coupled between the first and second flanges and operable to move the first flange with respect to the second flange thereby to vary the length of the connector. Compressing the connector may comprise compressing the connector by the actuation means. The actuation means may comprise a plurality of threaded rods and a plurality of nuts threadedly mounted on the plurality of threaded rods. Each threaded rod may be attached to the first and second flanges and extends between the first and second flanges. Each threaded rod may be attached to at least one of the first and second flanges by one or more of the nuts. Compressing the connector by the actuation -3 -means may comprise rotating the plurality of nuts with respect the threaded rods thereby to cause the plurality of nuts to move along the threaded rods so as to force the first and second flanges to move closer together. The expandable and compressible portion may be a bellows-like portion.

The disconnecting two of the conduit components from each other may comprise disconnecting the connector from one of the conduit sections.

The disconnecting two of the conduit components from each other may comprise disconnecting two of the conduit sections from each other. In this case for example, the compressing the connector may cause one or more of the conduit sections attached thereto to be moved in a longitudinal direction. The one or more conduit sections that are moved in the longitudinal direction may be coupled to a support structure via one or more support members. Each support member may comprise a low-friction portion (e.g., comprising nylon, or rollers, or bearings, etc.) in contact with the one or more conduit sections coupled thereto, thereby to facilitate sliding of said one or more conduit sections relative to said support member.

The conduit system may comprise a fluid line (e.g., a fluid input line or foreline) for use with a vacuum pump and/or abatement system.

In a further aspect, there is provided a conduit system comprising: a conduit, the conduit comprising one or more conduit sections; and a connector.

The connector comprises a first end and a second end opposite to the first end. The connector is expandable and compressible such that a length of the connector between the first end and the second end may be varied. The one or more conduit sections and the connector are detachably connected together to form a continuous conduit for permitting the flow therethrough of a fluid. The system further comprises one or more support members coupled to one or more of the one or more conduit sections for supporting said one or more of the one or more conduit sections relative to a support structure. Each support member comprises a low-friction portion in contact with the one or more of the one or more conduit sections coupled thereto.

BRIEF DESCRIPTION OF DRAWINGS -4 -

Figure 1 is a schematic illustration (not to scale) showing a system in which a vacuum pumping and abatement system is fluidly connected to an entity via a fluid input line; Figure 2 is a schematic illustration (not to scale) showing a portion of the fluid input line; Figure 3 is a schematic illustration (not to scale) showing a perspective view of a connector of the fluid input line; Figures 4A and 4B are schematic illustrations (not to scale) showing a clamp of the fluid input line; Figure 5 is a process flow chart showing certain steps of a process of performing maintenance or repair on the fluid input line; and Figures 6, 7A, and 7B are schematic illustrations (not to scale) of the portion of the fluid input line at various stages of the process of Figure 5.

DETAILED DESCRIPTION

Figure 1 is a schematic illustration (not to scale) showing a system 100 in which a vacuum pumping and abatement system 102 is fluidly connected to an entity 104 via a fluid input line 106, commonly referred to as a "foreline", between the vacuum pumping and abatement system 102 and the entity 104. The entity 104 may, for example, be a chamber or room used in an industrial process such as semiconductor fabrication. The vacuum pumping and abatement system 102 is also fluidly connected to an exhaust line 108.

In operation, the vacuum pumping and abatement system 102 pumps gas out of the entity 104 via the fluid input line 106 and abates (e.g. destroys or disposes of) undesirable substances produced by the entity 104 which may be present in the pumped gas. The vacuum pumping and abatement system 102 also pumps exhaust gas into the exhaust line 108, thereby to dispose of the exhaust gas.

The fluid input line 106 may, for example, have a length of approximately 30 50m and a diameter of between about 50mm and 300mm, and more preferably between about 160mm and 200mm. -5 -

Figure 2 is a schematic illustration (not to scale) showing a portion of the fluid input line 106.

In this embodiment, the fluid input line 106 comprises a plurality of fluid line sections 200 and a connector 202.

Each fluid line section 200 may, for example, have a length of between about lm and 3m and a diameter of between about 160mm and 200mm The fluid line sections 200 and the connector 202 are connected together to form the continuous fluid input line 106. Each fluid line section 200 comprises a flange 204 at each of its respective ends via which that fluid line section 200 is to attached to an adjacent fluid line section 200 or the connector 202. Sealing members, such as 0-rings, are disposed between the connected fluid line sections 200 and the connector 202, thereby to reduce the likelihood of leakage.

In this embodiment, the fluid input line 106 is suspended from a beam 206 or other support structure of the facility in which the fluid input line 106 resides.

For example, the fluid input line 106 may be suspended from a ceiling of said facility. More specifically, in this embodiment, the fluid input line 106 is coupled to the beam 206 by means of a plurality of support members. Each support member comprises a bracket or clamp 208, and a plurality of struts 210. Although Figure 2 shows only one of the fluid line sections 200 being coupled to the beam 206 via the clamps 208 and the struts 210, it will be appreciated by those skilled in the art that, in practice, multiple fluid line sections 200 may be coupled to the beam 206, or other support structure, along the length of the fluid input line 106.

Each clamp 208 clamps around a circumference of a respective fluid line sections 200. The clamps are described in more detail later below with reference 25 to Figures 4A and 4B.

Each strut 210 is connected between the beam 206 and a clamp 208, thereby to fixedly and securely attach that clamp 208 relative to the beam 206. In this embodiment, each clamp 208 is attached to the beam via a respective plurality of the struts 210.

In this embodiment, the connector 202 is removably attached between respective flanges 204 of two adjacent fluid line sections 200, thereby to fluidly -6 -connect said two adjacent fluid line sections 200. Further details of the connector 202 are shown in Figure 3 Figure 3 is a schematic illustration (not to scale) showing a perspective view of the connector 202.

In this embodiment, the connector 202 comprises a first flange 212, a second flange 214, a bellows portion 216, a plurality of threaded rods 218, and plurality of nuts 220.

The first flange 212 and the second flange 214 are connected to the bellows portion 216 at opposite sides of the bellows portion 216. In other words, a first end of the bellows portion 216 is attached to the first flange 212, and a second end of the bellows portion 216 opposite to the first end is attached to the second flange 214.

In the configuration shown in Figure 2, the first flange 212 is further attached to a flange 204 of one of the fluid line sections 200. The first flange 212 is attached to said flange 204 at the opposite side of the first flange 212 to the bellows portion 216. The first flange 212 may be connected to said flange 204 by a plurality of bolts or fasteners.

In the configuration shown in Figure 2, the second flange 214 is further attached to a flange 204 of another one of the fluid line sections 200. The second flange 214 is attached to said flange 204 at the opposite side of the second flange 214 to the bellows portion 216. The second flange 214 may be connected to said flange 204 by a plurality of bolts or fasteners.

The first flange 212 is an external flange. Thus, the first flange 212 forms a rim or collar that extends radially outwards at the first end of the bellows portion 25 216.

The second flange 214 is an external flange. Thus, the second flange 214 forms a rim or collar that extends radially outwards at the second end of the bellows portion 216.

In this embodiment, the bellows portion 216 is a conduit (e.g. a tubular 30 member) that permits the flow therethrough of the process gas. The bellows portion 216 has a bellows-like structure and may be expanded or compressed in -7 -folds like a bellows or a concertina. In other words, the bellows portion 216 is expandable (i.e. may be elongated) and compressible (i.e. may be shortened).

In this embodiment, each of the threaded rods 218 is attached between the first and second flanges 212, 214. The threaded rods 218 are attached to the first and second flanges 212, 214 by a respective plurality of the nuts 220. For ease of depiction, Figure 3 shows nuts 220 attaching only one of the threaded rods 218 to the first and second flanges 212, 214; however, it will be appreciated by those skilled in the art that, in practice, a respective plurality of nuts 220 attaches each of the threaded rods 218 to the first and second flanges 212, 214.

to Each threaded rod 218 is attached proximate to one of its ends to the first flange 212, and is also attached proximate to the other of its ends to the second flange 214.

In some embodiments, one or more of the threaded rods 218 is fixedly attached to one of the first and second flanges 212, 214, e.g. by welding, and is attached to the other of the first and second flanges 212, 214 by a plurality of nuts 220.

In this embodiment, the threaded rods 218 and the nuts 220 fix, or define, a length of the bellows portions 216, and thus a length of the connector 202 between the first and second flanges 212, 214. A length of the bellows portion 216 may be varied or controlled by rotating the nuts 220 relative to the corresponding threaded rods 218, thereby to cause the nuts 220 to move along the lengths of the corresponding threaded rods 218, and thus cause the first and second flanges 212, 214 to be moved closer together or further apart and the bellows portion 216 to be compressed or elongated. Such use of the connector 202 for facilitating maintenance and servicing of the fluid input line 106 is described in more detail later below with reference to Figures 5 to 7B.

As shown in Figure 3, the first and second flanges 212, 214 comprise respective pluralities of through holes 222 through which fasters, such as bolt may be positioned to bolt the first and second flanges 212, 214 to flanges 204 of respective fluid line sections 200.

The first and second flanges 212, 214 may be formed of, for example, stainless steel. -8 -

Figures 4A and 4B are schematic illustrations (not to scale) showing further details of a clamp 208. Figure 4A illustrates a clamp 208 in its tightened, or closed, state. Figure 4B illustrates the clamp 208 in its loosened, or open, state.

In this embodiment, the clamp 208 comprises a first clamping member 401 and a second clamping member 402. The first and second clamping members 401, 402 together form a split-ring clamp for clamping around the circumference of fluid line section 200. The first and second clamping members 401, 402 are a pair of generally C-shaped clamping members, each comprising a substantially semi cylindrical shell having longitudinal edges. The first and second clamping members 401, 402 are arranged such that the longitudinal edges of the first and second clamping members 401, 402 are opposite to or facing each other.

The first clamping member 401 comprises outwardly extending flanges 406 along each of its longitudinal edges. The second clamping member 402 comprises outwardly extending flanges 408 along each of its longitudinal edges.

The first clamping member 401 and the second clamping member 402 may be formed of, for example, mild (i.e., low carbon) steel.

In this embodiment, the first and second clamping members 401, 402 are attached together by a plurality of fasteners 410. Each fastener 410 is positioned through a respective pair of aligned holes through the outwardly extending 20 flanges 406, 408 of the first and second clamping members 401, 402.

The fasteners 410 may be tightened thereby to configure the clamp 208 in its tightened state, which is shown in Figure 4A. In this configuration, the opposing outwardly extending flanges 406, 408 of the first and second clamping members 401, 402 abut such that the first and second clamping members 401, 402 form a collar having an internal passage of generally circular cross-section. The fluid line section 200 is securely held between the first and second clamping members 401, 402 within this internal passage.

The fasteners 410 may be loosened thereby to allow for the clamp 208 to be moved into its loosened state, which is shown in Figure 4B. In this configuration, the first and second clamping members 401, 402 are spaced thereby to allow for the fluid line section 200 therebetween to move relative to the -g -clamp 208, at least in a direction along the longitudinal axis of the fluid line section 200.

The fasteners 410 may be removed from the first and second clamping members 401, 402 thereby to allow full separation or decoupling of the first and second clamping members 401, 402. This may be done to allow the first and second clamping members 401, 402 to be positioned around fluid a line section 200.

In this embodiment, the clamp 208 further comprises a liner 412 disposed on an internal surface of the second clamping member 402. In other words, the to second clamping member 402 comprises a liner 412 on its surface that is in contact with the fluid line section 200 when the fluid line section 200 is clamped in the clamp 208. In this embodiment, the liner 412 is made of a low friction material, such as nylon. Advantageously, when the clamp 208 is in its loosened state, the liner 412 tends to facilitate the movement of the fluid line section 200 relative to the clamp 208, in a direction along the longitudinal axis of the fluid line section 200. In particular, the liner 412 tends to facilitate the fluid line section 200 sliding over the internal surface of the second clamping member 402.

Figure 5 is a process flow chart showing certain steps of a process 500 of performing maintenance or repair on the fluid input line 106. In particular, the process 500 shown in Figure 5 and described in more detail below is a process of inspection, servicing, repair, or replacement of the sealing members (e.g., the 0-rings) which are disposed between the connected fluid line sections 200 and the connector 202.

At step s502, an operator identifies a location of a sealing member that is to undergo an inspection, servicing, repair, or replacement operation.

Figure 6 is a schematic illustration (not to scale) of the portion of the fluid input line 106. A first example location of a first sealing member that is to be serviced is indicated in Figure 6 by the reference numeral 601. A second example location of a second sealing member is that to be serviced is indicated in Figure 6 by the reference numeral 602.

-10 -At step s504, the operator decouples the flanges at the identified location. In this embodiment, this is achieved by removing the plurality of bolts or fasteners that attach those flanges together.

By way of example, if the sealing member to be serviced is the first sealing member at the first location 601, the operator decouples the first flange 212 of the connector 202 from the flange 204 of the fluid line section 200 to which it was previously attached.

As another example, if the sealing member to be serviced is the second sealing member at the second location 602, the operator decouples the flanges to 204 of the attached together fluid line sections 200.

At step s506, the operator operates the connector 202 to shorten its length, i.e. to compress the connector 202. In particular, the operator rotates the nuts 220 relative to the threaded rods 218, thereby to cause the nuts 220 to move along the threaded rods 218, and thus cause the first and second flanges 212, 214 to be moved closer together. The bellows portion 216 is thus compressed.

This compression of the connector 202 creates a gap or space in the fluid input line 106 at the location of the sealing member is that to be serviced.

Considering the example in which the first sealing member at the first location 601 is to be serviced, a gap is created at the first location 601. Figure 7A is a schematic illustration (not to scale) showing the portion of the fluid input line 106 in a configuration where the first flange 212 of the connector 202 has been decoupled from the flange 204 of the fluid line section 200, and the connector 202 has been compressed. A first gap 701 is thus formed between the connector 202 and said fluid line section 200. This first gap 701 permits or facilitates operator access to the first sealing member at the first location 601, e.g., for the purpose of servicing, repair, or replacement.

Considering the example in which the second sealing member at the second location 602 is to be serviced, a gap is created at the second location 602. Figure 7B is a schematic illustration (not to scale) showing the portion of the fluid input line 106 in a configuration where the flanges 204 of the fluid line sections 200 at the second location 602 have been decoupled, and the connector 202 has been compressed. A second gap 702 is thus formed between the fluid line sections 200 at the second location 602. This second gap 702 permits or facilitates operator access to the first sealing member at the second location 602, e.g., for the purpose of servicing, repair, or replacement In the example of Figure 7B, i.e. the example in which the second sealing member at the second location 602 is to be serviced, the compression of the connector 202 causes the fluid line section 200 that is attached to the first flange 212 to be moved, along its longitudinal axis, in a direction towards the connector 202. The fluid line section 200 is moved relative the clamps 308 that hold that fluid line section 200. Thus, in this example, prior to the compression of the connector 202, the clamps 208 holding the fluid line section 200 that is attached to the first flange 212 are configured to be in their loosened state. This allows the fluid line section 200 to move longitudinal with respect to the clamps 208. Furthermore, the low-friction liner 412 facilitates this movement of the fluid line section 200.

At step s506, the operator performs the inspection, servicing, repair, or replacement operation on the sealing member at the identified location.

By way of example, the operator may access the first sealing member at the first location 601 via the first gap 701, and perform the inspection, servicing, repair, or replacement operation thereon As another example, the operator may access the second sealing member at the second location 602 via the second gap 702, and perform the inspection, servicing, repair, or replacement operation thereon.

At step s508, the operator operates the connector 202 to increase its length, i.e. to expand the connector 202. In particular, the operator rotates the nuts 220 relative to the threaded rods 218, thereby to cause the nuts 220 to move along the threaded rods 218, and thus cause the first and second flanges 212, 214 to be moved apart. The bellows portion 216 is thus elongated.

This expansion of the connector 202 closes the gap or space in the fluid input line 106 at the location of the serviced sealing member.

At step s510, the operator recouples the flanges at the identified location.

In this embodiment, this is achieved by replacing the plurality of bolts or fasteners to attach those flanges together.

-12 -Thus, a process 500 of performing maintenance or repair on the fluid input line 106 is provided.

Advantageously, the above-described fluid input line is provided in discrete sections for ease of handling and installation.

The above-described system and method tends to allow for servicing of components, such as sealing members, in a section of the fluid input line that may be otherwise obstructed by other sections of the fluid input line. The inspection, servicing, repair, or replacement of components, such as sealing members, is facilitated.

Advantageously, the above-described connector tends to provide for gas-tight attachment between two sections of the fluid input line.

In the above embodiments, the fluid input line is implemented as a foreline connecting a vacuum pumping and abatement system to an entity such as a chamber or room used in semiconductor fabrication. However, in other embodiments, the fluid input line is implemented in a different system to convey a different fluid between two different entities.

and the vacuum pumping and/or abatement apparatus. However, in other embodiments, the connection system is used to connect together a different pair of entities, for example a vacuum pumping and/or abatement apparatus may be connection by the connection system to an exhaust line.

In the above embodiment, the connector comprises a bellows portion. However, in other embodiments, the connection system comprises a different type of extendible/compressible portion instead of or in addition to the bellows portion, for example a telescopic section.

In the above embodiments, the first and second flanges of the connector are moved relative to each other by rotating nuts, thereby to translate said nuts along the threaded rods disposed through said first and second flanges. However, in other embodiments, the connector is actuated in a different way, for example by hydraulic or pneumatic pistons disposed between the first and second flanges.

-13 -In the above embodiments, the fluid input line is suspended from a beam or other support structure of the facility in which the fluid input line resides. In other words, the fluid input line is supported from above. However, in other embodiments, the fluid input line is supported or secured in place in a different way. For example, in some embodiments, the fluid input line is supported from below, or from a sideward direction.

In the above embodiments, the second clamping member of the clamp comprises a low-friction liner disposed on its internal surface. However, in other embodiments, the liner is omitted. In other embodiments, the liner is disposed on a different surface of the clamp instead of or in addition to the internal surface of the second clamping member, such as the internal surface of the first clamping member.

In the above embodiments, the liner may be made of nylon. However, in other embodiments, a different type of low-friction material is used. In other embodiments, rollers or bearings may be used to provide a low-friction surface of a clamping member.

-14 -

REFERENCE NUMERALS

-system 102 -vacuum pumping and abatement system 104 -entity 106-fluid input line 108-exhaust line -fluid line sections 202 -connector 204 -flange to 206 -beam 208 -clamp 210-struts 212-first flange 214-second flange 216-bellows portion 218 -threaded rods 220 -nuts 222 -through holes 401 -first clamping member 402 -second clamping member 406 -outwardly extending flanges 408 -outwardly extending flanges 410 -fasteners 412-liner 500 -process s502-s510 -process steps 601 -first location 602 -second location 701 -first gap 702 -second gap

Claims

-16 -CLAIMS1. A method for use with a conduit system, wherein: the conduit system comprises a plurality of conduit components including: one or more conduit sections and a connector; the connector comprises: a first end; and a second end opposite to the first end; the connector is expandable and compressible such that a length of the connector between the first end and the second end may be varied; the one or more conduit sections and the connector are connected together to form a continuous conduit for permitting the flow therethrough of a fluid; and the method comprises: disconnecting two of the conduit components from each other; and compressing the connector, thereby to create a gap between the conduit components that have been disconnected from each other.
2. The method of claim 1, further comprising performing an operation on a further conduit component of the conduit system including accessing the further conduit component via the gap.
3. The method of claim 2, wherein the operation is an operation selected from the group of operations consisting of inspection, servicing, maintenance, repair, and replacement.
4. The method of claim 2 01 3, wherein the further conduit component is a sealing member for forming a seal between the conduit components that have been disconnected from each other.
5. The method of any of claims 2 to 4, further comprising, after performing the operation: expanding the connector, thereby to close the gap between the conduit components that have been disconnected from each other; and reconnecting said two conduit components to each other.
6. The method of any of claims 1 to 5, wherein: the connector comprises: a first flange at or proximate to the first end of the connector; a second flange at or proximate to the second end of the connector; an expandable and compressible portion coupled between the first flange and the second flange; and an actuation means coupled between the first and second flanges and operable to move the first flange with respect to the second flange thereby to vary the length of the connector; and the compressing the connector comprises compressing the connector by the actuation means.
7. The method of claim 6, wherein: the actuation means comprises: a plurality of threaded rods; and a plurality of nuts threadedly mounted on the plurality of threaded rods; -1 8 -each threaded rod is attached to the first and second flanges and extends between the first and second flanges; each threaded rod is attached to at least one of the first and second flanges by one or more of the nuts, and the compressing of the connector by the actuation means comprises rotating the plurality of nuts with respect the threaded rods thereby to cause the plurality of nuts to move along the threaded rods so as to force the first and second flanges to move closer together.
8. The method of claim 6 or 7, wherein the expandable and compressible portion is a bellows-like portion.
9. The method of any of claims 1 to 8, wherein the disconnecting two of the conduit components from each other comprises disconnecting the connector from one of the conduit sections.
10. The method of any of claims 1 to 8, wherein the disconnecting two of the conduit components from each other comprises disconnecting two of the conduit sections from each other.
11. The method of claim 10, wherein compressing the connector causes one or more of the conduit sections attached thereto to be moved in a longitudinal direction.
12. The method of claim 11, wherein: the one or more conduit sections that are moved in the longitudinal direction are coupled to a support structure via one or more support members; each support member comprises a low-friction portion in contact with the one or more conduit sections coupled thereto, thereby to facilitate sliding of said one or more conduit sections relative to said support member.
13. The method of claim 12, wherein the low-friction portion comprises a nylon liner.
14. The method of any of claims 1 to 13, wherein the conduit system comprises a fluid line for use with a vacuum pump and/or abatement system.
15. A conduit system comprising: a conduit comprising: one or more conduit sections. and a connector; wherein the connector comprises: a first end; and a second end opposite to the first end; the connector is expandable and compressible such that a length of the connector between the first end and the second end may be varied; the one or more conduit sections and the connector are detachably connected together to form a continuous conduit for permitting the flow therethrough of a fluid; and the system further comprises: one or more support members coupled to one or more of the one or more conduit sections for supporting said one or more of the one or more conduit sections relative to a support structure; wherein each support member comprises a low-friction portion in contact with the 25 one or more of the one or more conduit sections coupled thereto.