GB2594152B - Waveguide mirror and method of fabricating a waveguide mirror - Google Patents

Waveguide mirror and method of fabricating a waveguide mirror Download PDF

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Publication number
GB2594152B
GB2594152B GB2103977.1A GB202103977A GB2594152B GB 2594152 B GB2594152 B GB 2594152B GB 202103977 A GB202103977 A GB 202103977A GB 2594152 B GB2594152 B GB 2594152B
Authority
GB
United Kingdom
Prior art keywords
waveguide mirror
fabricating
waveguide
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2103977.1A
Other versions
GB2594152A (en
GB202103977D0 (en
Inventor
Nykänen Henri
Paul Drake John
Kho Evie
Lerose Damiana
Leena Mäkelä Sanna
Singh Nagra Amit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rockley Photonics Ltd
Original Assignee
Rockley Photonics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rockley Photonics Ltd filed Critical Rockley Photonics Ltd
Priority to GB2103977.1A priority Critical patent/GB2594152B/en
Priority claimed from GB1805241.5A external-priority patent/GB2572426B/en
Publication of GB202103977D0 publication Critical patent/GB202103977D0/en
Publication of GB2594152A publication Critical patent/GB2594152A/en
Application granted granted Critical
Publication of GB2594152B publication Critical patent/GB2594152B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12178—Epitaxial growth
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
GB2103977.1A 2018-03-29 2018-03-29 Waveguide mirror and method of fabricating a waveguide mirror Active GB2594152B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2103977.1A GB2594152B (en) 2018-03-29 2018-03-29 Waveguide mirror and method of fabricating a waveguide mirror

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2103977.1A GB2594152B (en) 2018-03-29 2018-03-29 Waveguide mirror and method of fabricating a waveguide mirror
GB1805241.5A GB2572426B (en) 2018-03-29 2018-03-29 Waveguide mirror and method of fabricating a waveguide mirror

Publications (3)

Publication Number Publication Date
GB202103977D0 GB202103977D0 (en) 2021-05-05
GB2594152A GB2594152A (en) 2021-10-20
GB2594152B true GB2594152B (en) 2022-03-02

Family

ID=75690037

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2103977.1A Active GB2594152B (en) 2018-03-29 2018-03-29 Waveguide mirror and method of fabricating a waveguide mirror

Country Status (1)

Country Link
GB (1) GB2594152B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110156183A1 (en) * 2009-12-31 2011-06-30 Ansheng Liu Integrated optical receiver architecture for high speed optical i/o applications
EP2813873A1 (en) * 2013-06-10 2014-12-17 Freescale Semiconductor, Inc. Integrated mirror in a semiconductor waveguide device
WO2019056799A1 (en) * 2017-09-22 2019-03-28 北京万集科技股份有限公司 Silicon-based optical antenna based on reflective layer and preparation method therefor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110156183A1 (en) * 2009-12-31 2011-06-30 Ansheng Liu Integrated optical receiver architecture for high speed optical i/o applications
EP2813873A1 (en) * 2013-06-10 2014-12-17 Freescale Semiconductor, Inc. Integrated mirror in a semiconductor waveguide device
WO2019056799A1 (en) * 2017-09-22 2019-03-28 北京万集科技股份有限公司 Silicon-based optical antenna based on reflective layer and preparation method therefor

Also Published As

Publication number Publication date
GB2594152A (en) 2021-10-20
GB202103977D0 (en) 2021-05-05

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20220901 AND 20220907

732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20230511 AND 20230517