GB2562177B - MEMS device and process - Google Patents

MEMS device and process

Info

Publication number
GB2562177B
GB2562177B GB1810077.6A GB201810077A GB2562177B GB 2562177 B GB2562177 B GB 2562177B GB 201810077 A GB201810077 A GB 201810077A GB 2562177 B GB2562177 B GB 2562177B
Authority
GB
United Kingdom
Prior art keywords
mems device
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1810077.6A
Other versions
GB201810077D0 (en
GB2562177A (en
Inventor
Sebastian Piechocinski Marek
Robert Jenkins Colin
Robert Graham Clive
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cirrus Logic International Semiconductor Ltd
Original Assignee
Cirrus Logic International Semiconductor Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cirrus Logic International Semiconductor Ltd filed Critical Cirrus Logic International Semiconductor Ltd
Priority to GB1810077.6A priority Critical patent/GB2562177B/en
Priority claimed from GB1611412.6A external-priority patent/GB2551796B/en
Publication of GB201810077D0 publication Critical patent/GB201810077D0/en
Publication of GB2562177A publication Critical patent/GB2562177A/en
Application granted granted Critical
Publication of GB2562177B publication Critical patent/GB2562177B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0027—Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0264—Pressure sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Micromachines (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
GB1810077.6A 2016-06-30 2016-06-30 MEMS device and process Active GB2562177B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1810077.6A GB2562177B (en) 2016-06-30 2016-06-30 MEMS device and process

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1611412.6A GB2551796B (en) 2016-06-30 2016-06-30 MEMS device and process
GB1810077.6A GB2562177B (en) 2016-06-30 2016-06-30 MEMS device and process

Publications (3)

Publication Number Publication Date
GB201810077D0 GB201810077D0 (en) 2018-08-08
GB2562177A GB2562177A (en) 2018-11-07
GB2562177B true GB2562177B (en) 2019-01-09

Family

ID=63042807

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1810077.6A Active GB2562177B (en) 2016-06-30 2016-06-30 MEMS device and process

Country Status (1)

Country Link
GB (1) GB2562177B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050000932A1 (en) * 2003-01-23 2005-01-06 Gabriel Kaigham J. Multi-metal layer MEMS structure and process for making the same
US20100020991A1 (en) * 2008-07-25 2010-01-28 United Microelectronics Corp. Diaphragm of mems electroacoustic transducer
US20130334626A1 (en) * 2012-06-14 2013-12-19 Robert Bosch Gmbh Hybrid integrated component and method for the manufacture thereof
GB2515836A (en) * 2013-07-05 2015-01-07 Wolfson Microelectronics Plc MEMS device and process
US20150198493A1 (en) * 2014-01-14 2015-07-16 Robert Bosch Gmbh Micromechanical pressure sensor device and corresponding manufacturing method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050000932A1 (en) * 2003-01-23 2005-01-06 Gabriel Kaigham J. Multi-metal layer MEMS structure and process for making the same
US20100020991A1 (en) * 2008-07-25 2010-01-28 United Microelectronics Corp. Diaphragm of mems electroacoustic transducer
US20130334626A1 (en) * 2012-06-14 2013-12-19 Robert Bosch Gmbh Hybrid integrated component and method for the manufacture thereof
GB2515836A (en) * 2013-07-05 2015-01-07 Wolfson Microelectronics Plc MEMS device and process
US20150198493A1 (en) * 2014-01-14 2015-07-16 Robert Bosch Gmbh Micromechanical pressure sensor device and corresponding manufacturing method

Also Published As

Publication number Publication date
GB201810077D0 (en) 2018-08-08
GB2562177A (en) 2018-11-07

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