GB2533294B - Micro-hotplates - Google Patents

Micro-hotplates Download PDF

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Publication number
GB2533294B
GB2533294B GB1422253.3A GB201422253A GB2533294B GB 2533294 B GB2533294 B GB 2533294B GB 201422253 A GB201422253 A GB 201422253A GB 2533294 B GB2533294 B GB 2533294B
Authority
GB
United Kingdom
Prior art keywords
hotplates
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1422253.3A
Other versions
GB2533294A (en
Inventor
Zeeshan Ali Syed
Govett Matthew
Jonathan Stacey Simon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Sensors UK Ltd
Original Assignee
Ams Sensors UK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ams Sensors UK Ltd filed Critical Ams Sensors UK Ltd
Priority to GB1422253.3A priority Critical patent/GB2533294B/en
Publication of GB2533294A publication Critical patent/GB2533294A/en
Application granted granted Critical
Publication of GB2533294B publication Critical patent/GB2533294B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
GB1422253.3A 2014-12-15 2014-12-15 Micro-hotplates Active GB2533294B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1422253.3A GB2533294B (en) 2014-12-15 2014-12-15 Micro-hotplates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1422253.3A GB2533294B (en) 2014-12-15 2014-12-15 Micro-hotplates

Publications (2)

Publication Number Publication Date
GB2533294A GB2533294A (en) 2016-06-22
GB2533294B true GB2533294B (en) 2020-08-19

Family

ID=56072075

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1422253.3A Active GB2533294B (en) 2014-12-15 2014-12-15 Micro-hotplates

Country Status (1)

Country Link
GB (1) GB2533294B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10132769B2 (en) * 2016-07-13 2018-11-20 Vaon, Llc Doped, metal oxide-based chemical sensors
US11203183B2 (en) 2016-09-27 2021-12-21 Vaon, Llc Single and multi-layer, flat glass-sensor structures
US11243192B2 (en) 2016-09-27 2022-02-08 Vaon, Llc 3-D glass printable hand-held gas chromatograph for biomedical and environmental applications
CN110651179B (en) 2017-04-26 2023-08-15 内华达纳米技术系统公司 Gas sensor including micro-hotplate with resistive heater and related methods
JP6797852B2 (en) * 2018-02-28 2020-12-09 株式会社東芝 Gas sensor
US20200064294A1 (en) * 2018-08-22 2020-02-27 AerNos, Inc. Nano gas sensor system based on a hybrid nanostructure sensor array, electronics, algorithms, and normalized cloud data to detect, measure and optimize detection of gases to provide highly granular and actionable gas sensing information
US11371976B2 (en) 2018-08-22 2022-06-28 AerNos, Inc. Systems and methods for an SoC based electronic system for detecting multiple low concentration gas levels
US20200096396A1 (en) * 2018-09-26 2020-03-26 Ams Sensors Uk Limited Gas Sensors
US11674916B2 (en) 2018-11-12 2023-06-13 Sciosense B.V. Gas sensor
US20200150069A1 (en) * 2018-11-12 2020-05-14 Ams Sensors Uk Limited Gas sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050050944A1 (en) * 2003-09-06 2005-03-10 Ha Seung Chul Sensor and method for manufacturing the same
US20080134753A1 (en) * 2006-12-07 2008-06-12 Electronics And Telecommunications Research Institute Micro gas sensor and method for manufacturing the same
JP2013015401A (en) * 2011-07-04 2013-01-24 Toyota Central R&D Labs Inc Semiconductor type thin-film gas sensor and method for manufacturing the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050050944A1 (en) * 2003-09-06 2005-03-10 Ha Seung Chul Sensor and method for manufacturing the same
US20080134753A1 (en) * 2006-12-07 2008-06-12 Electronics And Telecommunications Research Institute Micro gas sensor and method for manufacturing the same
JP2013015401A (en) * 2011-07-04 2013-01-24 Toyota Central R&D Labs Inc Semiconductor type thin-film gas sensor and method for manufacturing the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Rehakova et al, Annual India Conference, 2006, IEEE, pages 279 - 282, "Preparation and Characterization of Microhotplate for Gas Sensors" *

Also Published As

Publication number Publication date
GB2533294A (en) 2016-06-22

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