GB2502694B - Ion Generation in Mass Spectrometers by Cluster Bombardment - Google Patents

Ion Generation in Mass Spectrometers by Cluster Bombardment

Info

Publication number
GB2502694B
GB2502694B GB1307089.1A GB201307089A GB2502694B GB 2502694 B GB2502694 B GB 2502694B GB 201307089 A GB201307089 A GB 201307089A GB 2502694 B GB2502694 B GB 2502694B
Authority
GB
United Kingdom
Prior art keywords
ion generation
mass spectrometers
cluster bombardment
bombardment
cluster
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1307089.1A
Other versions
GB2502694A (en
GB201307089D0 (en
Inventor
Duerr Michael
Gebhardt Christoph
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bruker Daltonics GmbH and Co KG
Original Assignee
Bruker Daltonik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bruker Daltonik GmbH filed Critical Bruker Daltonik GmbH
Publication of GB201307089D0 publication Critical patent/GB201307089D0/en
Publication of GB2502694A publication Critical patent/GB2502694A/en
Application granted granted Critical
Publication of GB2502694B publication Critical patent/GB2502694B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/026—Cluster ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0468—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample
    • H01J49/0481—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample with means for collisional cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Combustion & Propulsion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
GB1307089.1A 2012-04-25 2013-04-19 Ion Generation in Mass Spectrometers by Cluster Bombardment Active GB2502694B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102012008259.2A DE102012008259B4 (en) 2012-04-25 2012-04-25 Ion generation in mass spectrometers by cluster bombardment

Publications (3)

Publication Number Publication Date
GB201307089D0 GB201307089D0 (en) 2013-05-29
GB2502694A GB2502694A (en) 2013-12-04
GB2502694B true GB2502694B (en) 2017-11-08

Family

ID=48537480

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1307089.1A Active GB2502694B (en) 2012-04-25 2013-04-19 Ion Generation in Mass Spectrometers by Cluster Bombardment

Country Status (3)

Country Link
US (1) US9263223B2 (en)
DE (1) DE102012008259B4 (en)
GB (1) GB2502694B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9287103B2 (en) * 2012-10-12 2016-03-15 Dh Technologies Development Pte. Ltd. Ion guide for mass spectrometry
WO2014096917A1 (en) * 2012-12-20 2014-06-26 Dh Technologies Development Pte. Ltd. Parsing events during ms3 experiments
GB201307792D0 (en) * 2013-04-30 2013-06-12 Ionoptika Ltd Use of a water cluster ion beam for sample analysis
GB201308505D0 (en) * 2013-05-13 2013-06-19 Ionoptika Ltd Use of a gas cluster ion beam containing hydrocarbon for sample analysis
JP6545053B2 (en) * 2015-03-30 2019-07-17 東京エレクトロン株式会社 Processing apparatus and processing method, and gas cluster generating apparatus and generating method
JP6442622B2 (en) * 2015-11-30 2018-12-19 東京エレクトロン株式会社 Chamber cleaning method for substrate processing apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040238754A1 (en) * 2001-09-17 2004-12-02 Baranov Vladimir I. Method and apparatus for cooling and focusing ions
US7247845B1 (en) * 1999-07-21 2007-07-24 Max-Planck Gesellschaft Zur Forderung Der Wissenschaften E.V. Method and device for cluster fragmentation
US20080203286A1 (en) * 2007-01-19 2008-08-28 Mds Analytical Technologies, A Business Unit Of Mds Inc. Apparatus and method for cooling ions

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002006556A1 (en) * 2000-07-14 2002-01-24 Epion Corporation Gcib size diagnostics and workpiece processing
CA2527701A1 (en) * 2003-06-06 2005-01-06 J. Albert Schultz Gold implantation/deposition of biological samples for laser desorption three dimensional depth profiling of tissues
GB0424426D0 (en) * 2004-11-04 2004-12-08 Micromass Ltd Mass spectrometer
US8853622B2 (en) * 2007-02-07 2014-10-07 Thermo Finnigan Llc Tandem mass spectrometer
US8507850B2 (en) * 2007-05-31 2013-08-13 Perkinelmer Health Sciences, Inc. Multipole ion guide interface for reduced background noise in mass spectrometry

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7247845B1 (en) * 1999-07-21 2007-07-24 Max-Planck Gesellschaft Zur Forderung Der Wissenschaften E.V. Method and device for cluster fragmentation
US20040238754A1 (en) * 2001-09-17 2004-12-02 Baranov Vladimir I. Method and apparatus for cooling and focusing ions
US20080203286A1 (en) * 2007-01-19 2008-08-28 Mds Analytical Technologies, A Business Unit Of Mds Inc. Apparatus and method for cooling ions

Also Published As

Publication number Publication date
GB2502694A (en) 2013-12-04
US9263223B2 (en) 2016-02-16
GB201307089D0 (en) 2013-05-29
US20130285552A1 (en) 2013-10-31
DE102012008259A1 (en) 2013-10-31
DE102012008259B4 (en) 2014-06-26

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Free format text: REGISTERED BETWEEN 20210722 AND 20210728