GB2499662B - Surface measurement apparatus and method - Google Patents

Surface measurement apparatus and method

Info

Publication number
GB2499662B
GB2499662B GB1203343.7A GB201203343A GB2499662B GB 2499662 B GB2499662 B GB 2499662B GB 201203343 A GB201203343 A GB 201203343A GB 2499662 B GB2499662 B GB 2499662B
Authority
GB
United Kingdom
Prior art keywords
measurement apparatus
surface measurement
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB1203343.7A
Other versions
GB2499662A (en
GB201203343D0 (en
Inventor
Ian Mansfield Daniel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taylor Hobson Ltd
Original Assignee
Taylor Hobson Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taylor Hobson Ltd filed Critical Taylor Hobson Ltd
Priority to GB1203343.7A priority Critical patent/GB2499662B/en
Publication of GB201203343D0 publication Critical patent/GB201203343D0/en
Priority to US14/381,068 priority patent/US20150025845A1/en
Priority to EP13711454.2A priority patent/EP2820377B1/en
Priority to PCT/GB2013/050485 priority patent/WO2013128183A1/en
Publication of GB2499662A publication Critical patent/GB2499662A/en
Application granted granted Critical
Publication of GB2499662B publication Critical patent/GB2499662B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G01B5/201—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures for measuring roundness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
    • G01B7/282—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures for measuring roundness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
GB1203343.7A 2012-02-27 2012-02-27 Surface measurement apparatus and method Expired - Fee Related GB2499662B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB1203343.7A GB2499662B (en) 2012-02-27 2012-02-27 Surface measurement apparatus and method
US14/381,068 US20150025845A1 (en) 2012-02-27 2013-02-27 Surface measurement apparatus and method
EP13711454.2A EP2820377B1 (en) 2012-02-27 2013-02-27 Data processor for a metrological apparatus for measuring a surface characteristic of a workpiece and corresponding measuring method
PCT/GB2013/050485 WO2013128183A1 (en) 2012-02-27 2013-02-27 Surface measurement apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1203343.7A GB2499662B (en) 2012-02-27 2012-02-27 Surface measurement apparatus and method

Publications (3)

Publication Number Publication Date
GB201203343D0 GB201203343D0 (en) 2012-04-11
GB2499662A GB2499662A (en) 2013-08-28
GB2499662B true GB2499662B (en) 2018-09-26

Family

ID=45991770

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1203343.7A Expired - Fee Related GB2499662B (en) 2012-02-27 2012-02-27 Surface measurement apparatus and method

Country Status (1)

Country Link
GB (1) GB2499662B (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000298014A (en) * 1999-04-15 2000-10-24 Ricoh Co Ltd Method for searching for measurement origin of shape- measuring apparatus
US6484571B1 (en) * 1999-07-23 2002-11-26 Mitutoyo Corporation Surface configuration measuring method
GB2422015A (en) * 2005-02-01 2006-07-12 Taylor Hobson Ltd A metrological instrument for determining a surface profile
EP2023076A1 (en) * 2007-08-03 2009-02-11 Mitutoyo Corporation Surface texture measuring instrument
WO2010001161A1 (en) * 2008-07-01 2010-01-07 University Of Huddersfield Surface analysis apparatus and method
EP2249123A1 (en) * 2009-05-08 2010-11-10 Mitutoyo Corporation Surface texture measuring device, surface texture measuring method, and program
US20110096339A1 (en) * 2009-10-28 2011-04-28 Nanometrics Incorporated Optical Metrology On Textured Samples

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000298014A (en) * 1999-04-15 2000-10-24 Ricoh Co Ltd Method for searching for measurement origin of shape- measuring apparatus
US6484571B1 (en) * 1999-07-23 2002-11-26 Mitutoyo Corporation Surface configuration measuring method
GB2422015A (en) * 2005-02-01 2006-07-12 Taylor Hobson Ltd A metrological instrument for determining a surface profile
EP2023076A1 (en) * 2007-08-03 2009-02-11 Mitutoyo Corporation Surface texture measuring instrument
WO2010001161A1 (en) * 2008-07-01 2010-01-07 University Of Huddersfield Surface analysis apparatus and method
EP2249123A1 (en) * 2009-05-08 2010-11-10 Mitutoyo Corporation Surface texture measuring device, surface texture measuring method, and program
US20110096339A1 (en) * 2009-10-28 2011-04-28 Nanometrics Incorporated Optical Metrology On Textured Samples

Also Published As

Publication number Publication date
GB2499662A (en) 2013-08-28
GB201203343D0 (en) 2012-04-11

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20210227