GB2490445A - Apparatus and method for tuning pump speed - Google Patents

Apparatus and method for tuning pump speed Download PDF

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Publication number
GB2490445A
GB2490445A GB1213758.4A GB201213758A GB2490445A GB 2490445 A GB2490445 A GB 2490445A GB 201213758 A GB201213758 A GB 201213758A GB 2490445 A GB2490445 A GB 2490445A
Authority
GB
United Kingdom
Prior art keywords
chamber
speed
pump speed
tuning
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB1213758.4A
Other versions
GB201213758D0 (en
GB2490445B (en
Inventor
Gerald Robin Shelley
Mark Kollin Romeo
Jeffrey Robert Schwab
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of GB201213758D0 publication Critical patent/GB201213758D0/en
Publication of GB2490445A publication Critical patent/GB2490445A/en
Application granted granted Critical
Publication of GB2490445B publication Critical patent/GB2490445B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08—Regulating by delivery pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/20—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by changing the driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/12—Parameters of driving or driven means
    • F04B2201/1201—Rotational speed of the axis
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2207/00—External parameters
    • F04B2207/02—External pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S415/00—Rotary kinetic fluid motors or pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Abstract

An apparatus for tuning pump speed at an optimal or desired speed using an automated method is disclosed. The apparatus includes a vacuum pump connected to a chamber for evacuating gas from the chamber. A sensor measures one or more characteristics, such as pressure, of the gas in the chamber. The measured characteristic is compared to a predetermined value. The speed of vacuum pump is adjusted based on the comparison until it falls in a desired range.
GB1213758.4A 2010-02-16 2011-01-25 Apparatus and method for tuning pump speed Expired - Fee Related GB2490445B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/706,167 US8657584B2 (en) 2010-02-16 2010-02-16 Apparatus and method for tuning pump speed
PCT/US2011/022461 WO2011102941A1 (en) 2010-02-16 2011-01-25 Apparatus and method for tuning pump speed

Publications (3)

Publication Number Publication Date
GB201213758D0 GB201213758D0 (en) 2012-09-12
GB2490445A true GB2490445A (en) 2012-10-31
GB2490445B GB2490445B (en) 2016-06-15

Family

ID=44369767

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1213758.4A Expired - Fee Related GB2490445B (en) 2010-02-16 2011-01-25 Apparatus and method for tuning pump speed

Country Status (9)

Country Link
US (1) US8657584B2 (en)
EP (1) EP2536953B1 (en)
JP (1) JP2013519840A (en)
KR (1) KR102091286B1 (en)
CN (1) CN102753827B (en)
GB (1) GB2490445B (en)
IL (1) IL221312A (en)
TW (1) TWI535934B (en)
WO (1) WO2011102941A1 (en)

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US9080576B2 (en) * 2011-02-13 2015-07-14 Applied Materials, Inc. Method and apparatus for controlling a processing system
GB2492065A (en) 2011-06-16 2012-12-26 Edwards Ltd Noise reduction of a vacuum pumping system
MX348628B (en) * 2011-12-12 2017-06-22 Sterling Ind Consult Gmbh Liquid ring vacuum pump with cavitation regulation.
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
CN103047144B (en) * 2012-12-29 2014-12-17 中国科学院沈阳科学仪器股份有限公司 Control method for dry vacuum pump capable of automatically adjusting pressure
CN105026758B (en) * 2013-01-21 2017-08-01 施特林工业咨询公司 Pump group part and for will be filled with steam chamber evacuate method
GB2569314A (en) * 2017-12-12 2019-06-19 Edwards Ltd A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber
GB2571971B (en) * 2018-03-14 2020-09-23 Edwards Tech Vacuum Engineering Qingdao Co Ltd Liquid ring pump control
EP3557068B1 (en) * 2018-04-17 2020-08-12 Xylem Europe GmbH Drainage pump assembly and method for controlling a drainage pump
DE202018003585U1 (en) * 2018-08-01 2019-11-06 Leybold Gmbh vacuum pump
TW202035873A (en) * 2019-03-29 2020-10-01 亞台富士精機股份有限公司 Control method and vacuum system
DE102019112792A1 (en) * 2019-05-15 2020-11-19 Leistritz Pumpen Gmbh Method for determining a flow volume of a fluid conveyed by a pump
GB2592573A (en) * 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.
KR102297804B1 (en) * 2020-11-19 2021-09-06 영진기술 주식회사 Apparatus, system and method of atmospheric sampling

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US20030021673A1 (en) * 2001-07-05 2003-01-30 Yasushi Maejima Vacuum pump
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US20040064291A1 (en) * 2002-09-30 2004-04-01 Kabushiki Kaisha Toshiba System for predicting life of a rotary machine, method for predicting life of a manufacturing apparatus which uses a rotary machine and a manufacturing apparatus
US7248975B2 (en) * 2005-09-20 2007-07-24 Tech Semiconductor Singapore Pte Ltd Real time monitoring of particulate contamination in a wafer processing chamber

Also Published As

Publication number Publication date
KR102091286B1 (en) 2020-03-19
JP2013519840A (en) 2013-05-30
US20110200450A1 (en) 2011-08-18
TWI535934B (en) 2016-06-01
KR20130040770A (en) 2013-04-24
US8657584B2 (en) 2014-02-25
EP2536953A1 (en) 2012-12-26
GB201213758D0 (en) 2012-09-12
EP2536953A4 (en) 2018-01-10
GB2490445B (en) 2016-06-15
CN102753827B (en) 2015-05-06
IL221312A (en) 2015-10-29
TW201144603A (en) 2011-12-16
CN102753827A (en) 2012-10-24
WO2011102941A1 (en) 2011-08-25
IL221312A0 (en) 2012-10-31
EP2536953B1 (en) 2019-08-07

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PCNP Patent ceased through non-payment of renewal fee

Effective date: 20200125