GB2468148B - An apparatus and method for chemical analysis of thin surface sections - Google Patents

An apparatus and method for chemical analysis of thin surface sections

Info

Publication number
GB2468148B
GB2468148B GB0903377.0A GB0903377A GB2468148B GB 2468148 B GB2468148 B GB 2468148B GB 0903377 A GB0903377 A GB 0903377A GB 2468148 B GB2468148 B GB 2468148B
Authority
GB
United Kingdom
Prior art keywords
chemical analysis
surface sections
thin surface
thin
sections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0903377.0A
Other versions
GB2468148A (en
GB0903377D0 (en
Inventor
Peter Jonathan Cumpson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB0903377.0A priority Critical patent/GB2468148B/en
Publication of GB0903377D0 publication Critical patent/GB0903377D0/en
Publication of GB2468148A publication Critical patent/GB2468148A/en
Application granted granted Critical
Publication of GB2468148B publication Critical patent/GB2468148B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/60—SECM [Scanning Electro-Chemical Microscopy] or apparatus therefor, e.g. SECM probes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB0903377.0A 2008-04-14 2009-02-27 An apparatus and method for chemical analysis of thin surface sections Expired - Fee Related GB2468148B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0903377.0A GB2468148B (en) 2008-04-14 2009-02-27 An apparatus and method for chemical analysis of thin surface sections

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US4450708P 2008-04-14 2008-04-14
GB0903377.0A GB2468148B (en) 2008-04-14 2009-02-27 An apparatus and method for chemical analysis of thin surface sections

Publications (3)

Publication Number Publication Date
GB0903377D0 GB0903377D0 (en) 2009-04-08
GB2468148A GB2468148A (en) 2010-09-01
GB2468148B true GB2468148B (en) 2013-04-24

Family

ID=40565846

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0903377.0A Expired - Fee Related GB2468148B (en) 2008-04-14 2009-02-27 An apparatus and method for chemical analysis of thin surface sections

Country Status (1)

Country Link
GB (1) GB2468148B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114460114B (en) * 2022-04-13 2022-06-21 季华实验室 Sample analysis method, device, apparatus and storage medium

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060278823A1 (en) * 2005-06-09 2006-12-14 Kabushiki Kaisha Toshiba Apparatus, method, and computer program product for deconvolution analysis

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060278823A1 (en) * 2005-06-09 2006-12-14 Kabushiki Kaisha Toshiba Apparatus, method, and computer program product for deconvolution analysis

Also Published As

Publication number Publication date
GB2468148A (en) 2010-09-01
GB0903377D0 (en) 2009-04-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20170227