GB2467600A - Method and apparatus for detection of air ingress into cryogen vessels - Google Patents
Method and apparatus for detection of air ingress into cryogen vessels Download PDFInfo
- Publication number
- GB2467600A GB2467600A GB0902155A GB0902155A GB2467600A GB 2467600 A GB2467600 A GB 2467600A GB 0902155 A GB0902155 A GB 0902155A GB 0902155 A GB0902155 A GB 0902155A GB 2467600 A GB2467600 A GB 2467600A
- Authority
- GB
- United Kingdom
- Prior art keywords
- crystal sensor
- cryogen vessel
- crystal
- detecting
- cryogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/16—Vacuum gauges by measuring variation of frictional resistance of gases
- G01L21/22—Vacuum gauges by measuring variation of frictional resistance of gases using resonance effects of a vibrating body; Vacuum gauges of the Klumb type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity
- G01N9/002—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity using variation of the resonant frequency of an element vibrating in contact with the material submitted to analysis
Abstract
Apparatus for detecting air ingress into a cryogen vessel, comprising: a quartz crystal microbalance 60, itself comprising a crystal sensor placed within the cryogen vessel (12), and an actuating circuit 42 for actuating resonance of the crystal sensor; detection equipment 44 for detecting a change in resonant characteristics of the crystal sensor; and signalling equipment for indicating the detected change.
Description
METHODS AND APPARATUS FOR
DETECTION OF AIR INGRESS INTO CRYOGEN VESSELS.
The present invention relates to methods and apparatus for detection of air ingress into cryogen vessels. It is particularly related to the detection of air ingress into cryogen vessels used to cool superconducting magnets used in imaging systems such as magnetic resonance imaging, nuclear magnetic resonance imaging and nuclear magnetic spectroscopy. The invention, however, may be applied to the detection of air ingress into any cryogen vessel.
Fig. 1 shows a conventional arrangement of a cryostat including a cryogen vessel 12. A cooled superconducting magnet 10 is provided within cryogen vessel 12, itself retained within an outer vacuum chamber (OVC) 14. One or more thermal radiation shields 16 are provided in the vacuum space between the cryogen vessel 12 and the outer vacuum chamber 14. In some known arrangements, a refrigerator 17 is mounted in a refrigerator sock 15 located in a turret 18 provided for the purpose, which in this case is shown on the side of the cryostat, but may be located elsewhere. The refrigerator 17 provides active refrigeration to cool cryogen gas within the cryogen vessel 12, in some arrangements, by recondensing it into a liquid.
The refrigerator 17 may also serve to cool the radiation shield 16. As illustrated in Fig. 1, the refrigerator 17 may be a two-stage refrigerator. A first cooling stage is thermally linked to the radiation shield 16, and provides cooling to a first stage temperature, typically in the region of 50-lOOK. A second cooling stage provides cooling of the cryogen gas to a much lower temperature, typically in the region of 4-10K and may recondense the gas into liquid state.
A negative electrical connection 21a is usually provided to the magnet 10 through the body of the cryostat. A positive electrical connection 21 is usually provided by either a conductor passing through the vent tube 20 or conduction through a component of turret 19.
For fixed current lead designs, a separate vent path (auxiliary vent) (not shown in Fig.1) may be provided as a fail-safe vent in case of blockage of the vent tube 20.
The cryogen 15 is typically liquid helium at a temperature of about 4K, although other cryogens may be used such as liquid hydrogen, liquid neon or liquid nitrogen. At service intervals, it is necessary to remove the refrigerator 17, and to open the vent tube 20. There is a risk that air could enter the cryogen vessel when the refrigerator is removed, or when the vent tube 20 is opened. Furthermore, experiments have shown that air continually diffuses into the cryogen vessel through the quench valve, and the vent valve, each conventionally provided on cryogen vessels, despite the cryogen vessel being held at positive pressure.
If air enters the cryogen vessel, it will freeze onto the coldest surfaces.
With higher-boiling-point cryogens, such as nitrogen, only the water contained in air may be frozen. This may block the access between refrigerator and the cryogen vessel, or degrade the performance of the refrigerator, leading to a rise in temperature and pressure within the cryogen vessel, in turn leading to increased consumption of cryogen. The frost deposit may also build up around the vent tube 20. The vent tube allows boiled-off cryogen gas to escape from the cryogen vessel, and is particularly important in the case of a magnet quench. During a magnet quench, a superconductive magnet suddenly becomes resistive, and loses all of its stored energy to the cryogen. This results in very rapid boil-off of cryogen. If the vent tube is constricted, or even blocked, then dangerously high pressure may build up within the cryogen vessel.
To remove a frost deposit from the inside of the cryogen vessel requires removing all of the cryogen and allowing the cryogen vessel and the magnet or other equipment within it to warm up -for example, to room temperature. This is a time consuming and costly process, as the removed cryogen will need to be replenished, and, in the case of a superconducting magnet, a shimming operation may need to be performed to correct any changes in magnetic field homogeneity which may have been brought about by the warming and re-cooling of the magnet. During this whole process, the apparatus cooled within the cryogen vessel, and the system of which it forms a part, is unusable. This may have consequential effects such as not being able to image patients, and their maladies remaining undiagnosed. It is therefore not practical to warm the cryogen vessels and their contents as a preventative service operation. However, by not performing such preventative measures, the danger of blockages and excessive cryogen pressures remains.
The present invention aims to provide apparatus and methods for detecting the presence of frost inside the cryogen vessel. The presence of a frost may then be signalled to a user or a service technician, and the warming of the cryogen vessel may be planned, for a convenient time, in order to remove the frost.
Accordingly, the present invention provides methods and apparatus as defined in the appended claims.
The above, and further, objects and characteristics of the present invention may be determined from the following description of certain embodiments thereof, in conjunction with the following description, wherein: Fig. 1 shows a conventional arrangement of a cryostat including a cryogen vessel; Figs. 2A and 2B illustrate an example circuit which may be used to measure the resonant frequency, and Q-factor of resonance, of a QCM crystal.
Fig. 3 shows an example in the change in resonant response of the QCM crystal sensor; and Fig. 4 schematically illustrates an example arrangement of a QCM crystal within a cryogen vessel.
The present invention employs a Quartz Crystal Microbalance (QCM) to detect the deposition of frost, and to indicate this to a user or service technician.
A QCM comprises a crystal sensor composed of a quartz crystal, for instance an AT-cut, with electrodes positioned on its opposing faces. In operation, it uses the reverse piezoelectric effect -that when a voltage is applied across the electrodes, some deformation of the crystal will result.
A tuneable resonant electrical circuit or other frequency synthesiser is applied to the electrodes, across the quartz crystal. The resonant circuit is tuned to the resonant frequency of the quartz crystal, typically in the range 10-20MHz, and the series resonance of the quartz crystal is indicated by a minimum resistance when the circuit operates at the series resonant frequency of the crystal sensor.
The quality of resonance, measured by the Q-factor, is an indication of the sharpness of the resonance with varying frequency. The Q-factor characterises the resonance by the ratio of its bandwidth to the resonant frequency. An alternative measure is the dissipation D, which is the inverse of the Q-factor.
Figs. 2A and 2B illustrate an example circuit which may be used to measure the resonant frequency, and Q-factor of resonance, of a QCM crystal.
As illustrated in Fig. 2A, the QCM crystal 60 is electrically connected into the signal line of a 50I coaxial cable 40. One end of the coaxial cable is connected to a frequency synthesiser 42, while the other end is connected to measuring apparatus 44, for example a digital voltmeter (DVM).
Fig. 2B shows an approximate electrical schematic diagram. The QCM crystal 60 is represented by its approximate equivalent circuit: a series combination 32 of capacitor, resistor and inductor in parallel with a capacitor 34. The labelled 50 �= impedances 36 represent the characteristic impedance of the coaxial cable 40. As viewed from the frequency synthesiser, the QCM crystal 60 and the 50�= impedance 36 of the coaxial cable in front of the DVM form a potential divider. To test the resonant frequency, and the Q-factor of resonance, of the QCM crystal 60, the output of the frequency synthesiser is made to sweep through a range of frequencies, which includes the expected resonant frequency. As the frequency output by the frequency synthesiser reaches the series resonant frequency of the QCM crystal, the impedance of the series branch 32 falls to a minimum. By consequence, the output to the DVM becomes a maximum. This maximum can be detected, and the frequency at which it occurs can be used to determine the series resonant frequency. As the frequency generated by the frequency synthesiser is further increased, a parallel resonance condition occurs in which the combination of series branch 32 and parallel capacitance 34 resonate. At that frequency, a maximum impedance of the QCM crystal 60 occurs, indicated by a minimum DVM signal.
This arrangement may be used to initially determine the resonant frequency and the Q factor of the QCM crystal, and may also be used for measurements of the crystal in use.
In embodiments of the present invention, the crystal sensor 60 is placed inside the cryogen vessel in regions where the formation of ice would be undesirable. The frequency synthesiser, and other apparatus, may be placed outside of the cryogen vessel, electrically connected to the crystal sensor.
When material, such as a frost of water, nitrogen or other contaminant, is deposited on the crystal sensor, its resonant frequency will change as a result of the increased effective mass of the crystal sensor.
Fig. 3 shows an example in the change in resonant response of the QCM crystal sensor in response to a deposition of a frost on the crystal. The initial resonant peak 50, shown to the right of the drawing, represents the natural resonant response of the QCM crystal sensor, when it is free from any deposits on its surface. The detected resonant peak 52 represents the resonant response of the QCM crystal sensor once a deposit has occurred on the surface of the QCM crystal sensor. The added mass causes the resonant frequency to fall. In a liquid or gas, the quality (Q-factor) of the resonance would also be reduced, indicated by the lower and wider resonance peak. As will be apparent to those skilled in the art, the change in frequency and quality of the resonant response of the QCM may be detected by suitable circuitry connected to measure the voltage across, and current through, the QCM crystal. For example, the circuitry as described with reference to Figs. 2A and 2B may be used.
Once resonance is detected at a frequency below a certain threshold, for example, the frequency indicated at 54 in Fig. 3, a solid deposit may be deemed to have occurred on the QCM crystal sensor. This fact can be indicated to a user or to a service technician by any suitable known signalling equipment -an indicator lamp, an audible warning, telephone, SMS text message, email, fax and so on. A service visit may be scheduled, to remove the cryogen from the cryogen vessel, and warm it up to room temperature. In the case of a water-based deposit, it may be preferred to warm the interior of the cryogen vessel above room temperature, to speed up the evaporation of the water.
A QCM can also be used to detect a change in gas density. This may be useful for detecting air ingress which does not form a frost on the crystal sensor. For example, in a helium-filled cryogen vessel, the ingress of nitrogen will produce a noticeable change in the density of the gas. This may also be detected by the QCM as a change in resonant frequency and the Q factor.
Where the QCM is used to measure the change in the composition of the gas within the cryogen vessel, for example, to detect the appearance of nitrogen mixed into a helium environment, the mass of the QCM crystal will not change. The viscosity encountered by the crystal will change, from the viscosity of a helium environment to the viscosity of an environment composed of a mixture of helium and nitrogen. Similarly, the density of the gaseous environment will change from that of a helium environment to that of an environment composed of a helium and nitrogen mixture.
This change will cause the frequency and quality (Q-factor) of the resonance characteristic to reduce. This may be detected by a suitable detection circuit, for example by comparing the resonant frequency and/or the Q-factor to a respective predetermined threshold 54. The detection may be used to alert a user or a service technician to the detected ingress of air.
With the QCM crystal placed near the source of air ingress, the gas density experienced by the QCM crystal will change if air enters the cryogen vessel.
This will cause the QCM crystal's resonant frequency and Q-factor to be modified. These effects may be relied upon to detect the air ingress. In cryogen vessels cooled to below the freezing point of nitrogen, the QCM crystal may be placed further inside the cryogen vessel, where deposition of solid nitrogen frost may be expected. A solid nitrogen frost may be detected and removed as discussed above.
Fig. 4 schematically illustrates an example arrangement of the QCM crystal within the cryogen vessel 12, while the frequency synthesiser 62 lies outside of the cryogen vessel, typically at room temperature. The frequency synthesiser 62 may produce an oscillating current at a frequency of about 20MHz.
The provision of the QCM crystal sensor 60 inside the cryogen vessel 12 will require the provision of at least one further electrical connection 64 into the cryogen vessel -the second electrical connection 66 may be made through the earth connection of the body of the cryogen vessel, assuming that it is made of a metal. Preferably, however, both electrical connections are made by wires leading into the cryogen vessel, to remove any possible effects of the resistance of the cryogen vessel on the resonant response.
Preferably, this is achieved by use of a coaxial cable 40 as discussed with reference to Fig. 2A.
In an alternative arrangement, an oscillator circuit is provided inside the turret of the cryogen vessel. This applies the initial resonant frequency to the QCM crystal. Connections are provided to outside the cryogen vessel, enabling the direct measurement of the frequency and measurement of the magnitude of the signal at resonance. This allows simple calculation of the Q factor. The power source may be mounted outside the cryostat.
The QCM crystal sensor 60 and its associated wiring 64, 66 may be placed in the appropriate position within the cryogen vessel 12 during manufacture of the cryogen vessel. Alternatively, the QCM crystal sensor 60 may be retro-fitted to a cryogen vessel 12 during a service. For example, the wires 64, 66; 40 may be passed through a siphon port, conventionally provided to the cryogen vessel, allowing fitting without disturbing any other connections.
The QCM crystal sensor is driven at its resonant frequency and consumes very little power. This is important as any power consumed by the QCM crystal sensor is dissipated as heat within the cryogen vessel, leading to loss of cryogen or additional load onto the refrigerator.
A QCM suitable for use at temperatures below 10K is available from TELONIC INSTRUMENTS LIMITED, Wokingham RG41 1QN UK (www.teionic.co.uk) under reference Ml 6-17-18. -10-
The natural resonant frequency 50 of the QCM crystal is determined by the material and thickness of the crystal. It may be best to determine the natural resonant frequency by observation. Determination of the resonant frequency of the crystal sensor may be performed by either of the following methods, or by the method described with reference to Figs. 2A and 2B.
Using the circuit of Fig. 2B, the frequency synthesiser may apply an AC voltage of a frequency corresponding to the approximate expected resonant frequency of the crystal sensor. The resonant frequency is determined from monitoring the voltage detected by DVM 44, and varying the frequency of the applied AC voltage until a maximum value of voltage is detected by the DVM 44. Intermittently, or constantly, the applied AC voltage may be varied slightly in frequency, to ensure that its frequency matches the resonant frequency of the crystal sensor. A data output from the AC voltage generator may be employed to indicate the resonant frequency of the crystal sensor.
Alternatively, at intervals or continuously, an AC voltage of varying frequency is applied to the crystal sensor, and the corresponding voltages detected by DVM 44 recorded. Once the voltages detected by DVM 44 have been recorded over a range of applied AC frequencies, the highest voltages detected by DVM 44 may be determined, and this will indicate the resonant frequency of the crystal sensor at the time. An advantage of this method is that the Q-factor at the time may be determined by consideration of the rate and magnitude of the change in voltages detected by DVM 44 at frequencies close to the resonant frequency, both greater and less than the resonant frequency itself. -11 -
The methods described in the preceding two paragraphs may also be used for detecting variation in the resonant frequency of the QCM crystal, during operation in detecting air ingress.
Claims (7)
- CLAIMS: 1. Apparatus for detecting air ingress into a cryogen vessel, comprising: -a quartz crystal microbalance, itself comprising a crystal sensor placed within the cryogen vessel, and an actuating circuit for actuating resonance of the crystal sensor; -detection equipment for detecting a change in resonant characteristics of the crystal sensor; and -signalling equipment for indicating the detected change.
- 2. Apparatus according to claim 1 wherein the detection equipment is arranged to detect a resonant frequency of the crystal sensor falling below a threshold value.
- 3. Apparatus according to claim 1 wherein the detection equipment is arranged to detect a Q-factor of the resonance of the crystal sensor falling below a threshold value.
- 4. Apparatus according to any preceding claim wherein the crystal sensor is located within the cryogen vessel and the detection equipment is located outside of the cryogen vessel, the crystal sensor being electrically connected to the detection equipment.
- 5. A method for detecting air ingress into a cryogen vessel, comprising: -providing a quartz crystal microbalance, itself comprising a crystal sensor placed within the cryogen vessel; -detecting a change in resonant characteristics of the crystal sensor; and -13 - -indicating the detected change.
- 6. A method according to claim 5 wherein the step of detection is performed by detecting a resonant frequency of the crystal sensor falling below a threshold value.
- 7. A method according to claim 5 wherein the step of detection is performed by detecting a Q-factor of the resonance of the crystal sensor falling below a threshold value.AMENDMENTS TO THE CLAIMS HAVE BEEN FILED AS FOLLOWSCLAIMS: 1. Apparatus for detecting deposition of a solid frost of water, nitrogen or other contaminant, caused by air ingress into a cryogen vessel, comprising: -a quartz crystal microbalance, itself comprising a crystal sensor placed within the cryogen vessel, and an actuating circuit for actuating resonance of the crystal sensor; -detection equipment for detecting a change in resonant characteristics of the crystal sensor caused by deposition of said frost on the crystal sensor; and -signalling equipment for indicating the detected change. 0*)2. Apparatus according to claim 1 wherein the detection equipment is o 15 arranged to detect a resonant frequency of the crystal sensor falling below a threshold value.3. Apparatus according to claim 1 wherein the detection equipment is arranged to detect a Q-factor of the resonance of the crystal sensor falling below a threshold value.4. Apparatus according to any preceding claim wherein the crystal sensor is located within the cryogen vessel and the detection equipment is located outside of the cryogen vessel, the crystal sensor being electrically connected to the detection equipment.5. A method of detecting deposition of a solid frost of water, nitrogen or other contaminant, caused by air ingress into a cryogen vessel, comprising: -providing a quartz crystal microbalance, itself comprising a crystal sensor placed within the cryogen vessel; -detecting a change in resonant characteristics of the crystal sensor caused by deposition of said frost on the crystal sensor; and -indicating the detected change.6. A method according to claim 5 wherein the step of detection is performed by detecting a resonant frequency of the crystal sensor falling below a threshold value.7. A method according to claim 5 wherein the step of detection is o performed by detecting a Q-factor of the resonance of the crystal sensor falling below a threshold value.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0902155A GB2467600B (en) | 2009-02-10 | 2009-02-10 | Methods and apparatus for detection of air ingress into cryogen vessels |
| CN2010101066953A CN101819120B (en) | 2009-02-10 | 2010-02-08 | Method and apparatus for detection of air ingress into cryogen vessels |
| US12/702,484 US8418534B2 (en) | 2009-02-10 | 2010-02-09 | Methods and apparatus for detection of air ingress into cryogen vessels |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0902155A GB2467600B (en) | 2009-02-10 | 2009-02-10 | Methods and apparatus for detection of air ingress into cryogen vessels |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB0902155D0 GB0902155D0 (en) | 2009-03-25 |
| GB2467600A true GB2467600A (en) | 2010-08-11 |
| GB2467600B GB2467600B (en) | 2011-09-14 |
Family
ID=40527107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB0902155A Expired - Fee Related GB2467600B (en) | 2009-02-10 | 2009-02-10 | Methods and apparatus for detection of air ingress into cryogen vessels |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8418534B2 (en) |
| CN (1) | CN101819120B (en) |
| GB (1) | GB2467600B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2630479B1 (en) * | 2010-10-20 | 2020-04-08 | Qorvo US, Inc. | Apparatus and method for measuring binding kinetics and concentration with a resonating sensor |
| US10352970B2 (en) | 2011-12-21 | 2019-07-16 | Sony Corporation | Detection apparatus, power receiving apparatus, non-contact power transmission system and detection method |
| JP6029278B2 (en) | 2011-12-21 | 2016-11-24 | ソニー株式会社 | Power receiving device and non-contact power transmission system |
| GB2504769B (en) * | 2012-08-10 | 2017-05-17 | Siemens Healthcare Ltd | Methods and apparatus for shimming a superconducting magnet |
| US10054357B2 (en) * | 2016-10-12 | 2018-08-21 | Raytheon Company | Purity monitor |
| CN107677563A (en) * | 2017-10-11 | 2018-02-09 | 北京航空航天大学 | Quartz crystal temperature probe, quartz crystal microbalance and its application method |
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|---|---|---|---|---|
| US2222222A (en) * | 1939-03-15 | 1940-11-19 | Jr John Dennis | Foldable bed |
| US3333333A (en) * | 1963-08-14 | 1967-08-01 | Rca Corp | Method of making magnetic material with pattern of embedded non-magnetic material |
| US3534585A (en) * | 1967-12-07 | 1970-10-20 | Webb James E | Microbalance including crystal oscillators for measuring contaminates in a gas system |
| DE3641842A1 (en) * | 1986-12-08 | 1988-06-16 | Paul Prof Dr Leiderer | Method and device for pressure measurement in a gaseous medium |
| US5136885A (en) * | 1991-04-05 | 1992-08-11 | Tif Instruments, Inc. | Quartz crystal pressure sensor |
| WO1998032006A1 (en) * | 1997-01-17 | 1998-07-23 | Advanced Technology Materials, Inc. | Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same |
| US6156578A (en) * | 1998-06-01 | 2000-12-05 | Advanced Technology Materials, Inc. | Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream |
| WO2001033175A1 (en) * | 1999-11-01 | 2001-05-10 | The Johns Hopkins University | Self-monitoring controller for quartz crystal microbalance sensors |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3317074A (en) * | 1963-06-17 | 1967-05-02 | Douglas Aircraft Co Inc | Cryogenic containers |
| JPH0886557A (en) * | 1994-09-19 | 1996-04-02 | Ishizuka Denshi Kk | Frost detector |
| CN2549444Y (en) * | 2002-05-10 | 2003-05-07 | 武汉大学 | Quatrz micro-balance analyzer |
| EP1794574A4 (en) * | 2004-09-15 | 2009-09-23 | Agency Science Tech & Res | Surface plasmon resonance and quartz crystal microbalance sensor |
| CN1884983A (en) * | 2006-07-07 | 2006-12-27 | 中国科学技术大学 | Amplitude controllable quartz crystal micro-balance attenuation factor measuring apparatus |
| US8109161B2 (en) * | 2008-02-27 | 2012-02-07 | Baker Hughes Incorporated | Methods and apparatus for monitoring deposit formation in gas systems |
| CN101876615B (en) * | 2009-12-17 | 2012-07-11 | 中国航天科技集团公司第五研究院第五一○研究所 | Method for monitoring plume contamination of attitude control engine of spacecraft |
-
2009
- 2009-02-10 GB GB0902155A patent/GB2467600B/en not_active Expired - Fee Related
-
2010
- 2010-02-08 CN CN2010101066953A patent/CN101819120B/en not_active Expired - Fee Related
- 2010-02-09 US US12/702,484 patent/US8418534B2/en not_active Expired - Fee Related
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|---|---|---|---|---|
| US2222222A (en) * | 1939-03-15 | 1940-11-19 | Jr John Dennis | Foldable bed |
| US3333333A (en) * | 1963-08-14 | 1967-08-01 | Rca Corp | Method of making magnetic material with pattern of embedded non-magnetic material |
| US3534585A (en) * | 1967-12-07 | 1970-10-20 | Webb James E | Microbalance including crystal oscillators for measuring contaminates in a gas system |
| DE3641842A1 (en) * | 1986-12-08 | 1988-06-16 | Paul Prof Dr Leiderer | Method and device for pressure measurement in a gaseous medium |
| US5136885A (en) * | 1991-04-05 | 1992-08-11 | Tif Instruments, Inc. | Quartz crystal pressure sensor |
| WO1998032006A1 (en) * | 1997-01-17 | 1998-07-23 | Advanced Technology Materials, Inc. | Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same |
| US6156578A (en) * | 1998-06-01 | 2000-12-05 | Advanced Technology Materials, Inc. | Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream |
| WO2001033175A1 (en) * | 1999-11-01 | 2001-05-10 | The Johns Hopkins University | Self-monitoring controller for quartz crystal microbalance sensors |
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| Title |
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Also Published As
| Publication number | Publication date |
|---|---|
| GB2467600B (en) | 2011-09-14 |
| GB0902155D0 (en) | 2009-03-25 |
| US8418534B2 (en) | 2013-04-16 |
| CN101819120B (en) | 2013-12-11 |
| CN101819120A (en) | 2010-09-01 |
| US20100199765A1 (en) | 2010-08-12 |
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