GB2457607B - Acoustically coupled resonators and method of making the same - Google Patents

Acoustically coupled resonators and method of making the same

Info

Publication number
GB2457607B
GB2457607B GB0907292A GB0907292A GB2457607B GB 2457607 B GB2457607 B GB 2457607B GB 0907292 A GB0907292 A GB 0907292A GB 0907292 A GB0907292 A GB 0907292A GB 2457607 B GB2457607 B GB 2457607B
Authority
GB
United Kingdom
Prior art keywords
resonator
stage
filter
signal line
acoustically coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0907292A
Other versions
GB0907292D0 (en
GB2457607A (en
Inventor
Kun Wang
Paul D Bradley
Richard C Ruby
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Avago Technologies General IP Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/109,596 external-priority patent/US7436269B2/en
Application filed by Avago Technologies General IP Singapore Pte Ltd filed Critical Avago Technologies General IP Singapore Pte Ltd
Publication of GB0907292D0 publication Critical patent/GB0907292D0/en
Publication of GB2457607A publication Critical patent/GB2457607A/en
Application granted granted Critical
Publication of GB2457607B publication Critical patent/GB2457607B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/0023—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output
    • H03H9/0095—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output using bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0566—Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers
    • H03H9/0571—Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers including bulk acoustic wave [BAW] devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/584—Coupled Resonator Filters [CFR]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/585—Stacked Crystal Filters [SCF]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/587—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices
    • H03H9/706—Duplexers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414—Resonance frequency
    • H03H2003/0421—Modification of the thickness of an element
    • H03H2003/0428—Modification of the thickness of an element of an electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/01—Frequency selective two-port networks
    • H03H7/17—Structural details of sub-circuits of frequency selective networks
    • H03H7/1708—Comprising bridging elements, i.e. elements in a series path without own reference to ground and spanning branching nodes of another series path

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

The filter 570 includes a first two-stage resonator filter 204c connected to an input signal line and a first output signal line, said first two-stage resonator filter comprising: a first stage including a first resonator 210c and a second resonator acoustically coupled to said first resonator; a second stage including a third resonator and a fourth resonator 240c acoustically coupled to said third resonator. A decoupling layer lies between said first resonator and said second resonator, and it extends between said third resonator and said fourth resonator. A second two-stage resonator filter 204d is constructed as the first two-stage filter and is connected to the input signal line and a second output signal line. Both said first two-stage resonator and said second two-stage resonator are connected to the same input signal line. The filter 570 may act as a single-ended to balanced converter.
GB0907292A 2005-04-18 2009-04-28 Acoustically coupled resonators and method of making the same Expired - Fee Related GB2457607B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/109,596 US7436269B2 (en) 2005-04-18 2005-04-18 Acoustically coupled resonators and method of making the same
GB0604892A GB2425417B (en) 2005-04-18 2006-03-10 Acoustically coupled resonators and method of making the same

Publications (3)

Publication Number Publication Date
GB0907292D0 GB0907292D0 (en) 2009-06-10
GB2457607A GB2457607A (en) 2009-08-26
GB2457607B true GB2457607B (en) 2009-11-18

Family

ID=40909963

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0907292A Expired - Fee Related GB2457607B (en) 2005-04-18 2009-04-28 Acoustically coupled resonators and method of making the same

Country Status (1)

Country Link
GB (1) GB2457607B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103975526A (en) * 2011-11-10 2014-08-06 高通股份有限公司 Two-port resonators electrically coupled in parallel
EP3506502A3 (en) * 2017-12-07 2019-10-30 Infineon Technologies AG Bandpass filter using coupled acoustic resonators

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10707828B2 (en) * 2018-05-04 2020-07-07 Samsung Electro-Mechanics Co., Ltd. Filter including bulk acoustic wave resonator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050140466A1 (en) * 2003-10-30 2005-06-30 Larson John D.Iii Decoupled stacked bulk acoustic resonator-based band-pass filter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050140466A1 (en) * 2003-10-30 2005-06-30 Larson John D.Iii Decoupled stacked bulk acoustic resonator-based band-pass filter

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103975526A (en) * 2011-11-10 2014-08-06 高通股份有限公司 Two-port resonators electrically coupled in parallel
EP3506502A3 (en) * 2017-12-07 2019-10-30 Infineon Technologies AG Bandpass filter using coupled acoustic resonators
US10840887B2 (en) 2017-12-07 2020-11-17 Infineon Technologies Ag System and method for a radio frequency filter
US10931262B2 (en) 2017-12-07 2021-02-23 Infineon Technologies Ag Tunable resonator element, filter circuit and method
US10965274B2 (en) 2017-12-07 2021-03-30 Infineon Technologies Ag System and method for a radio frequency filter
US10979021B2 (en) 2017-12-07 2021-04-13 Infineon Technologies Ag System and method for a radio frequency filter
US11005451B2 (en) 2017-12-07 2021-05-11 Infineon Technologies Ag Acoustically coupled resonator notch and bandpass filters
US11005449B2 (en) 2017-12-07 2021-05-11 Infineon Technologies Ag Acoustically coupled resonator notch and bandpass filters
US11012051B2 (en) 2017-12-07 2021-05-18 Infineon Technologies Ag System and method for a radio frequency filter
US11018652B2 (en) 2017-12-07 2021-05-25 Infineon Technologies Ag Tunable resonator element, filter circuit and method
US11057018B2 (en) 2017-12-07 2021-07-06 Infineon Technologies Ag Acoustically coupled resonator notch and bandpass filters
US11245381B2 (en) 2017-12-07 2022-02-08 Infineon Technologies Ag System and method for a radio frequency filter

Also Published As

Publication number Publication date
GB0907292D0 (en) 2009-06-10
GB2457607A (en) 2009-08-26

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Legal Events

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732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20100218 AND 20100224

732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20130725 AND 20130731

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20140310