GB2455214B - Mems device - Google Patents

Mems device

Info

Publication number
GB2455214B
GB2455214B GB0901066A GB0901066A GB2455214B GB 2455214 B GB2455214 B GB 2455214B GB 0901066 A GB0901066 A GB 0901066A GB 0901066 A GB0901066 A GB 0901066A GB 2455214 B GB2455214 B GB 2455214B
Authority
GB
United Kingdom
Prior art keywords
mems device
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0901066A
Other versions
GB0901066D0 (en
GB2455214A (en
Inventor
Richard Ian Laming
Anthony Bernard Traynor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cirrus Logic International UK Ltd
Original Assignee
Wolfson Microelectronics PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wolfson Microelectronics PLC filed Critical Wolfson Microelectronics PLC
Priority to GB0901066A priority Critical patent/GB2455214B/en
Priority claimed from GB0801843A external-priority patent/GB2443756B/en
Publication of GB0901066D0 publication Critical patent/GB0901066D0/en
Publication of GB2455214A publication Critical patent/GB2455214A/en
Application granted granted Critical
Publication of GB2455214B publication Critical patent/GB2455214B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
GB0901066A 2006-02-24 2006-02-24 Mems device Expired - Fee Related GB2455214B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0901066A GB2455214B (en) 2006-02-24 2006-02-24 Mems device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0901066A GB2455214B (en) 2006-02-24 2006-02-24 Mems device
GB0801843A GB2443756B (en) 2006-02-24 2006-02-24 MEMS device

Publications (3)

Publication Number Publication Date
GB0901066D0 GB0901066D0 (en) 2009-03-11
GB2455214A GB2455214A (en) 2009-06-03
GB2455214B true GB2455214B (en) 2010-08-11

Family

ID=40468942

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0901066A Expired - Fee Related GB2455214B (en) 2006-02-24 2006-02-24 Mems device

Country Status (1)

Country Link
GB (1) GB2455214B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000005001A1 (en) * 1998-07-23 2000-02-03 The Secretary Of State For Defence Method of manufacturing a capacitive ultrasound transducer
US6945115B1 (en) * 2004-03-04 2005-09-20 General Mems Corporation Micromachined capacitive RF pressure sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000005001A1 (en) * 1998-07-23 2000-02-03 The Secretary Of State For Defence Method of manufacturing a capacitive ultrasound transducer
US6945115B1 (en) * 2004-03-04 2005-09-20 General Mems Corporation Micromachined capacitive RF pressure sensor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"A MEMS implementation of an acoustic sensor array" S Chowdhury et al, Networking, Sensing and Control 2004, IEEE Conference on, Taipei, Taiwan, March 21-23, 2004, Piscataway, NJ, USA, IEEE, Vol 2, pages 819-824. *
"Single chip condensor microphone using porous silicon as sacrificial layer for the air gap" W Kronast et al, Sensors and Actuators A 87 (2001) pages 188-193. *

Also Published As

Publication number Publication date
GB0901066D0 (en) 2009-03-11
GB2455214A (en) 2009-06-03

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20150820 AND 20150826

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20230224