GB2416039A - Electrochemical microfluidic sensor and method of creation of its microchannels by embossing - Google Patents

Electrochemical microfluidic sensor and method of creation of its microchannels by embossing Download PDF

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Publication number
GB2416039A
GB2416039A GB0521160A GB0521160A GB2416039A GB 2416039 A GB2416039 A GB 2416039A GB 0521160 A GB0521160 A GB 0521160A GB 0521160 A GB0521160 A GB 0521160A GB 2416039 A GB2416039 A GB 2416039A
Authority
GB
United Kingdom
Prior art keywords
embossing
microchannels
creation
microfluidic channel
microfluidic sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0521160A
Other versions
GB0521160D0 (en
GB2416039B (en
Inventor
Henning Sirringhaus
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge University Technical Services Ltd CUTS
Original Assignee
Cambridge University Technical Services Ltd CUTS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge University Technical Services Ltd CUTS filed Critical Cambridge University Technical Services Ltd CUTS
Publication of GB0521160D0 publication Critical patent/GB0521160D0/en
Publication of GB2416039A publication Critical patent/GB2416039A/en
Application granted granted Critical
Publication of GB2416039B publication Critical patent/GB2416039B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip

Abstract

An electrochemical sensor and method of its production comprising a microfluidic channel and an electronic sensing device on a first substrate, and a second substrate bonded to the first substrate so as to close the microfluidic channel, wherein a functional part of the electronic sensing device is exposed at the surface of the microfluidic channel and wherein the microfluidic channel is formed by embossing. In one embodiment the electronic device is a vertical-channel field-effect transistor.

Description

GB 2416039 A continuation (74) Agent and/or Address for Service: Page
White & Farrer 54 Doughty Street, LONDON, WC1N 2LS, United Kingdom
GB0521160A 2003-03-18 2004-03-17 Technique for producing microfluidic sensor Expired - Fee Related GB2416039B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0306163.7A GB0306163D0 (en) 2003-03-18 2003-03-18 Embossing microfluidic sensors
PCT/GB2004/001135 WO2004083843A1 (en) 2003-03-18 2004-03-17 Electrochemical microfluidic sensor and method of creation of its microchannels by embossing

Publications (3)

Publication Number Publication Date
GB0521160D0 GB0521160D0 (en) 2005-11-23
GB2416039A true GB2416039A (en) 2006-01-11
GB2416039B GB2416039B (en) 2007-09-19

Family

ID=9954982

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB0306163.7A Ceased GB0306163D0 (en) 2003-03-18 2003-03-18 Embossing microfluidic sensors
GB0521160A Expired - Fee Related GB2416039B (en) 2003-03-18 2004-03-17 Technique for producing microfluidic sensor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB0306163.7A Ceased GB0306163D0 (en) 2003-03-18 2003-03-18 Embossing microfluidic sensors

Country Status (3)

Country Link
US (1) US8080152B2 (en)
GB (2) GB0306163D0 (en)
WO (1) WO2004083843A1 (en)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0229191D0 (en) * 2002-12-14 2003-01-22 Plastic Logic Ltd Embossing of polymer devices
JP4344270B2 (en) * 2003-05-30 2009-10-14 セイコーエプソン株式会社 Manufacturing method of liquid crystal display device
SG131130A1 (en) * 2004-07-06 2007-04-26 Agency Science Tech & Res Biochip for sorting and lysing biological samples
EP1672967A1 (en) * 2004-12-17 2006-06-21 Valtronic S.A. Fabrication method of a miniaturized volume device
TWI255059B (en) * 2005-02-18 2006-05-11 Ind Tech Res Inst Organic semiconductor components with multiple protection layers and the manufacturing method thereof
CN100468029C (en) * 2005-03-03 2009-03-11 清华大学 Referance leak and its production method
US20070175768A1 (en) * 2005-06-30 2007-08-02 Applera Corporation Microfluidic systems including porous polymer electrodes
KR100718144B1 (en) * 2006-01-09 2007-05-14 삼성전자주식회사 Fet based sensor for detecting ionic material, device for detecting ionic material comprising the same, and method for detecting ionic material using the fet based sensor
JP4735833B2 (en) * 2006-01-13 2011-07-27 セイコーエプソン株式会社 Biochip and biosensor
GB2436163A (en) * 2006-03-10 2007-09-19 Seiko Epson Corp Device fabrication by ink-jet printing materials into bank structures, and embossing tool
GB0607205D0 (en) * 2006-04-10 2006-05-17 Diagnoswiss Sa Miniaturised biosensor with optimized anperimetric detection
WO2014160962A2 (en) * 2013-03-29 2014-10-02 Life Technologies Corporation Method for treating a semiconductor device
US7768000B2 (en) * 2006-09-29 2010-08-03 Samsung Electronics Co., Ltd. Thin film transistor array panel and manufacturing method thereof
US7312042B1 (en) 2006-10-24 2007-12-25 Abbott Diabetes Care, Inc. Embossed cell analyte sensor and methods of manufacture
JP4847351B2 (en) * 2007-01-11 2011-12-28 キヤノン株式会社 Diffractive optical element and diffraction grating using the same
GB0717055D0 (en) * 2007-09-01 2007-10-17 Eastman Kodak Co An electronic device
JP5681965B2 (en) * 2007-09-26 2015-03-11 瑞穂 森田 Detection element and detection device using the same
KR101059970B1 (en) * 2008-03-26 2011-08-26 가부시키가이샤후지쿠라 Board for electronic component mounting, manufacturing method and electronic circuit component
GB2467316B (en) * 2009-01-28 2014-04-09 Pragmatic Printing Ltd Electronic devices, circuits and their manufacture
US9029132B2 (en) * 2009-08-06 2015-05-12 International Business Machines Corporation Sensor for biomolecules
US8052931B2 (en) 2010-01-04 2011-11-08 International Business Machines Corporation Ultra low-power CMOS based bio-sensor circuit
US9068935B2 (en) 2010-04-08 2015-06-30 International Business Machines Corporation Dual FET sensor for sensing biomolecules and charged ions in an electrolyte
EP2567213B1 (en) 2010-05-05 2018-01-24 The Governing Council of the Universtiy of Toronto Method of processing dried samples using digital microfluidic device
TW201237411A (en) * 2011-03-04 2012-09-16 Univ Nat Chiao Tung Biochemical matter sensor and manufacturing method thereof
CN104412101B (en) * 2012-03-06 2018-09-07 生命科学生物传感器诊断私人有限公司 Organic Thin Film Transistors and its purposes in Application in Sensing
US11371951B2 (en) 2012-09-27 2022-06-28 Sensirion Ag Gas sensor comprising a set of one or more sensor cells
US8802568B2 (en) * 2012-09-27 2014-08-12 Sensirion Ag Method for manufacturing chemical sensor with multiple sensor cells
US20140093979A1 (en) * 2012-10-01 2014-04-03 Drexel University Microfabricated QLIDA Biosensors with an Embedded Heating and Mixing Element
US8896032B2 (en) * 2013-01-23 2014-11-25 International Business Machines Corporation Self-aligned biosensors with enhanced sensitivity
US9557288B2 (en) 2013-04-29 2017-01-31 Hewlett-Packard Development Company, L.P. Electrochemical sensing well
CN105849032B (en) * 2013-10-23 2018-08-07 多伦多大学董事局 The use of printing digital micro-fluid device and its manufacturing method
US9733210B2 (en) 2014-12-31 2017-08-15 International Business Machines Corporation Nanofluid sensor with real-time spatial sensing
ES2924907T3 (en) 2015-03-05 2022-10-11 Life Technologies Corp Surface stabilization of biosensors
CN107530739B (en) 2015-03-26 2021-04-27 生命技术公司 Method for processing semiconductor sensor array device
WO2016197103A1 (en) 2015-06-05 2016-12-08 Miroculus Inc. Air-matrix digital microfluidics apparatuses and methods for limiting evaporation and surface fouling
EP3303548A4 (en) 2015-06-05 2019-01-02 Miroculus Inc. Evaporation management in digital microfluidic devices
US9735089B2 (en) * 2015-09-24 2017-08-15 Intel Corporation Thermal management for flexible integrated circuit packages
US10978653B2 (en) 2016-06-28 2021-04-13 Life Science Biosensor Diagnostics Pty Ltd Chemical sensor
EP3500660A4 (en) 2016-08-22 2020-03-04 Miroculus Inc. Feedback system for parallel droplet control in a digital microfluidic device
US9799752B1 (en) 2016-10-31 2017-10-24 Eastman Kodak Company Method for forming a thin-film transistor
CN110383061A (en) 2016-12-28 2019-10-25 米罗库鲁斯公司 Digital microcurrent-controlled device and method
WO2018187476A1 (en) 2017-04-04 2018-10-11 Miroculus Inc. Digital microfluidic apparatuses and methods for manipulating and processing encapsulated droplets
WO2019023133A1 (en) 2017-07-24 2019-01-31 Miroculus Inc. Digital microfluidics systems and methods with integrated plasma collection device
CN115582155A (en) 2017-09-01 2023-01-10 米罗库鲁斯公司 Digital microfluidic device and method of use thereof
US10539528B2 (en) 2017-12-19 2020-01-21 International Business Machines Corporation Stacked nanofluidics structure
CA3133124A1 (en) 2019-04-08 2020-10-15 Miroculus Inc. Multi-cartridge digital microfluidics apparatuses and methods of use
WO2021016614A1 (en) 2019-07-25 2021-01-28 Miroculus Inc. Digital microfluidics devices and methods of use thereof
GB2593511A (en) * 2020-03-25 2021-09-29 Sumitomo Chemical Co Sensor apparatus
US11495512B2 (en) * 2020-04-30 2022-11-08 Wisconsin Alumni Research Foundation Flexible transistors with near-junction heat dissipation
US11857961B2 (en) 2022-01-12 2024-01-02 Miroculus Inc. Sequencing by synthesis using mechanical compression

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0398587A2 (en) * 1989-05-19 1990-11-22 THORN EMI plc A method of encapsulation for devices
EP0633468A2 (en) * 1993-06-03 1995-01-11 Forschungszentrum Rossendorf e.V. Microcapillary with inbuilt chemical microsensors and method for its manufacture
EP0668500A2 (en) * 1994-02-17 1995-08-23 Forschungszentrum Rossendorf e.V. Chemical microanalyser
WO2002029912A1 (en) * 2000-10-04 2002-04-11 CAMBRIDGE UNIVERSITY TECHNICAL SERVICES LIMITED University of Cambridge, Department of Physics Solid state embossing of polymer devices
WO2002086162A1 (en) * 2001-04-23 2002-10-31 Samsung Electronics Co., Ltd. Molecular detection chip including mosfet, molecular detection device employing the chip, and molecular detection method using the device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2244135B (en) * 1990-05-04 1994-07-13 Gen Electric Co Plc Sensor devices
US5250168A (en) * 1990-07-03 1993-10-05 Hitachi, Ltd. Integrated ion sensor
DE4115414C2 (en) * 1991-05-10 1995-07-06 Meinhard Prof Dr Knoll Process for the production of miniaturized chemo- and biosensor elements with an ion-selective membrane as well as carriers for these elements
JP2541081B2 (en) * 1992-08-28 1996-10-09 日本電気株式会社 Biosensor and method of manufacturing and using biosensor
US5405511A (en) * 1993-06-08 1995-04-11 Boehringer Mannheim Corporation Biosensing meter with ambient temperature estimation method and system
US6167910B1 (en) * 1998-01-20 2001-01-02 Caliper Technologies Corp. Multi-layer microfluidic devices
US6890715B1 (en) * 1999-08-18 2005-05-10 The California Institute Of Technology Sensors of conducting and insulating composites
US6676815B1 (en) * 1999-12-30 2004-01-13 Roche Diagnostics Corporation Cell for electrochemical analysis of a sample
US6730212B1 (en) * 2000-10-03 2004-05-04 Hrl Laboratories, Llc Sensor for chemical and biological materials

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0398587A2 (en) * 1989-05-19 1990-11-22 THORN EMI plc A method of encapsulation for devices
EP0633468A2 (en) * 1993-06-03 1995-01-11 Forschungszentrum Rossendorf e.V. Microcapillary with inbuilt chemical microsensors and method for its manufacture
EP0668500A2 (en) * 1994-02-17 1995-08-23 Forschungszentrum Rossendorf e.V. Chemical microanalyser
WO2002029912A1 (en) * 2000-10-04 2002-04-11 CAMBRIDGE UNIVERSITY TECHNICAL SERVICES LIMITED University of Cambridge, Department of Physics Solid state embossing of polymer devices
WO2002086162A1 (en) * 2001-04-23 2002-10-31 Samsung Electronics Co., Ltd. Molecular detection chip including mosfet, molecular detection device employing the chip, and molecular detection method using the device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BAUMANN W H ET AL: "Microelectronic sensor system for microphysical application on living cells" SENSORS AND ACTUATORS B, ELSEVIER SEQUOIA S.A., LAUSANNE CH., Vol 55 No. 1, 25 April 1999, pages 77-89, XP004175066. ISSN: 0925-4005 *
RUSSIER J S ET AL: "Enzyme Linked Immunoabsorbent Assay. On a Microchip With Electrochemical Detection", LAB ON A CHIP, ROYAL SOCIETY OF CHEMISTRY, CAMBRIDGE, GB. Vol. 1, no. 2, December 2001, pages 153-157. XP009030699. ISSN: 1473-0197. *

Also Published As

Publication number Publication date
US20060272942A1 (en) 2006-12-07
GB0521160D0 (en) 2005-11-23
US8080152B2 (en) 2011-12-20
WO2004083843A1 (en) 2004-09-30
GB0306163D0 (en) 2003-04-23
GB2416039B (en) 2007-09-19

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20210317